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Profile Measurement System of Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated byTwo Optical Fibers

Research Project

Project/Area Number 22560109
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

NAKANO Motohiro  大阪大学, 大学院・工学研究科, 准教授 (40164256)

Co-Investigator(Kenkyū-buntansha) INOUE Haruyuki  大阪大学, 大学院・工学研究科, 助教 (30304009)
OSHIKANE Yasushi  大阪大学, 大学院・工学研究科, 助教 (40263206)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2010: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Keywords精密位置決め / 加工計測 / PDI(Point Diffraction Interferometer) / 位相シフト干渉計 / 光ファイバ / 精密加工計測 / PDI / Point Diffraction Interferometer / Point Diffraction Interierometer
Research Abstract

A phase-shifting point diffraction interferometer (PS/PDI) withtwo optical fibers has been developed for absolute surface profile measurement of large aperture optics. Since the PS/PDI has flexibility of the positions for two point lightsources, it can generate the fringes included information for surface profile without use of imaging optics. Surface profile of a mirror can be reconstructed precisely conducting wavefront analyses by digital holography. As the application to aspheric mirror, profile measurement of a flat mirror has been studied.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (12 results)

All 2012 2011 2010 Other

All Presentation (6 results) Book (2 results) Remarks (4 results)

  • [Presentation] Phase-Shifting Point Diffraction Interferometer with Two Point Light Sources of Single-Mode Optical Fibers2011

    • Author(s)
      N. Ogawa, T. Nishioka, M. Nakano, Y. Oshikane, H. Inoue
    • Organizer
      Fourth international symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka University
    • Year and Date
      2011-11-24
    • Related Report
      2012 Final Research Report
  • [Presentation] Phase-Shifting Point Diffraction Interferometer with Two Point light Sources of Single-Mode Optical Fibers2011

    • Author(s)
      N.Ogawa, T.Nishioka, M.Nakano, Y.Oshikane, H.Inoue
    • Organizer
      Fourth international symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      Osaka
    • Year and Date
      2011-11-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] 2本の光ファイバからの点光源回折球面波を基準とする位相シフト干渉計-ファイバ保持方法の改良とノイズの低減-2011

    • Author(s)
      小川尚利,西岡孝純,中野元博,押鐘寧,井上晴行
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学
    • Year and Date
      2011-09-20
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] Phase-Shifting Point Diffraction Interferometer with Spherical Reference Wavefronts Generated by two Optical Fibers2010

    • Author(s)
      N.Ogawa, Y.Oshikane, H.Inoue, M.Nakano
    • Organizer
      Third International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      大阪大学(大阪市)
    • Year and Date
      2010-11-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] 2本の光ファイバからの点光源回折球面波を基準とする位相シフト干渉計-非球面凹面ミラーの表面形状計測精度-2010

    • Author(s)
      小川尚利,中野元博,押鐘寧,井上晴行,山内和人、
    • Organizer
      2010年度精密工学会秋季大会学術講演会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2010-09-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 2本の光ファイバからの点光源回折球面波を基準とする位相シフト干渉計-非球面凹面ミラーの表面形状計測精度-2010

    • Author(s)
      小川尚利, 中野元博, 押鐘寧, 井上晴行, 山内和人
    • Organizer
      2010年度精密工学会秋季大会学術講演会
    • Place of Presentation
      名古屋大学(名古屋市)
    • Year and Date
      2010-09-27
    • Related Report
      2010 Annual Research Report
  • [Book] Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers, Selected Topics on Optical Fiber Technology, Part 2, Chapter 142012

    • Author(s)
      Oshikane Yasushi, Nakano Motohiro and Inoue Haruyuki
    • Total Pages
      67
    • Publisher
      (Moh. Yasin, Sulaiman W. Harun and Hamzah Arof, eds.), InTech, Croatia
    • Related Report
      2012 Final Research Report
  • [Book] Selected Topics on Optical Fiber Technology, Part 2, Chapter 14, Phase-Shifting Point Diffraction Interferometer Having Two Point Light Sources of Single-Mode Optical Fibers2012

    • Author(s)
      Oshikane Yasushi, Nakano Motohiro, Inoue Haruyuki
    • Publisher
      InTech (ISBN 978-953-51-0091-1)
    • Related Report
      2011 Annual Research Report
  • [Remarks] 量子計測領域ホームページ

    • URL

      http://www-qm.prec.eng.osaka-u.ac.jp/

    • Related Report
      2012 Final Research Report
  • [Remarks] 量子計測領域ホームページ

    • URL

      http://www-qm.prec.eng.osaka-u.ac.jp/

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www-qm.prec.eng.osaka-u.ac.jp/researches.html

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www-qm.prec.eng.osaka-u.ac.jp/PDI.html

    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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