High speed deposition of zinc oxide film using atmospheric pressure glow discharge

• Project/Area Number: 22560113
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Kagawa University
• Principal Investigator: SUZKI Yoshifumi 香川大学, 工学部, 教授 (60206456)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2011: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
• Keywords: ナノ・マイクロ加工 / 大気圧低温プラズマ / 成膜方法 / 酸化亜鉛 / 大気圧プラズマ / 誘電体バリア放電 / グロー放電 / 透明導電性薄膜 / 大気圧CVD / 有機錯体材料 / ガス流れ / 大面積成膜

Research Abstract

Transparent conductive thin films used for a liquid crystal display or a solar cell etc. have to fabricated in large area with low cost system. Therefore, I generated coldplasma under atmospheric pressure, and developed the deposition system of Zinc oxide films. For fabricating thin films uniformly in large area, slit width was expanded into 100 mm. The uniform films were fabricated. The subject remained about improvement in deposition rate.

Research Products

• [Journal Article] Fabrication of Transparent Antifouling Thin Films with Fractal Structure by Atmospheric Pressure Cold Plasma Deposition (2012)
  • Author(s): Hayato Miyagawa 、 Yoshifumi Suzaki
  • Journal Title: Langmuir Volume: Vol.28 Issue: 51 Pages: 17585-17860
  • DOI: 10.1021/la303316w
  • Peer Reviewed
• [Journal Article] Fabrication of Al doped ZnO films using atmospheric pressure cold plasma (2012)
  • Author(s): Yoshifumi Suzaki
  • Journal Title: Thin Solid Films Volume: Vol.522 Pages: 324-329
  • DOI: 10.1016/j.tsf.2012.09.016
  • Peer Reviewed
• [Journal Article] Effect of substrate temperature on ZnO thin film fabrication by using an atmospheric pressure cold plasma generator (2011)
  • Author(s): Yoshifumi Suzaki
  • Journal Title: Phisica Status Solidi Volume: Vol.C8 Pages: 503-505
  • Peer Reviewed
• [Journal Article] Fabrication of ZnO Films Using Atmospheric Pressure Cold Plasma at Various Discharge Voltage (2011)
  • Author(s): Yoshifumi Suzaki
  • Journal Title: Frontier of Applied Plasma Technology Volume: Vol.4 Pages: 85-88
  • Peer Reviewed
• [Journal Article] Effect of RF Power on the Fabrication of ZnO Films Using Open-Air Atmospheric Pressure Cold Plasma (2010)
  • Author(s): Yoshifumi Suzaki
  • Journal Title: Frontier of Applied Plasma Technology Volume: Vol.3 Pages: 97-101
  • Peer Reviewed
• [Journal Article] Optical Emission Spectroscopy of Atmospheric Pressure Cold Plasma and Fabrication of ZnO Films (2010)
  • Author(s): Dong-Bum Shin 、 Yoshifumi Suzaki
  • Journal Title: Frontier of Applied Plasma Technology Volume: Vol.3 Pages: 126-129
  • Peer Reviewed
• [Presentation] 大気圧低温プラズマにより作製した AZO/ZnO 2 層膜の特性 (2012)
  • Author(s): 宗清 修、須崎嘉文
  • Organizer: 2012 年春季第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2012-03-27
• [Presentation] 光ファイバーを用いた電流センサの開発 (2012)
  • Author(s): 岩田 弘、須崎嘉文
  • Organizer: 日本設計工学会四国支部平成 23 年度研究発表会
  • Place of Presentation: 徳島大学工学部
  • Year and Date: 2012-03-22
• [Presentation] 光ファイバーを用いた電流センサの開発 (2012)
  • Author(s): 岩田弘
  • Organizer: 日本設計工学会四国支部平成23年度研究発表会
  • Place of Presentation: 徳島大学工学部
  • Year and Date: 2012-03-22
• [Presentation] 大気圧低温プラズマにより作製したAZO/ZnO 2層膜の特性 (2012)
  • Author(s): 宗清修
  • Organizer: 2012年春季第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学
  • Year and Date: 2012-03-17
• [Presentation] Fabrication of Transparent Antifouling Thin Films Using an Atmospheric Pressure Cold Plasma Deposition System (2012)
  • Author(s): Yoshifumi Suzaki
  • Organizer: 14th International Conference on Organized Molecular Films
  • Place of Presentation: Paris
• [Presentation] 大気圧低温プラズマ法により作製した ZnO:Al 膜における下地層の効果 (2011)
  • Author(s): 奈良卓哉、須崎嘉文
  • Organizer: 平成 23 年度電気関係学会四国支部連合大会
  • Place of Presentation: 阿南工業高等専門学校
  • Year and Date: 2011-09-23
• [Presentation] 大気圧低温プラズマ法により作製したZnO:Al膜における下地層の効果 (2011)
  • Author(s): 奈良卓哉
  • Organizer: 平成23年度電気関係学会四国支部連合大会
  • Place of Presentation: 阿南工業高等専門学校
  • Year and Date: 2011-09-23
• [Presentation] Fabrication of ZnO Thin Films Using Atmospheric Pressure Helium Cold Plasma at Various Oxygen Flow Rates (2011)
  • Author(s): Yoshifumi Suzaki
  • Organizer: The Japan-Thailand-Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011、招待講演
  • Place of Presentation: Nongkhai, Thailand)
  • Year and Date: 2011-09-21
• [Presentation] Fabrication of Transparent Antifouling Thin Films Using an Atmospheric Pressure Cold Plasma Deposition System (2011)
  • Author(s): Koji Yamauchi 、 Yoshifumi Suzaki
  • Organizer: The Japan-Thailand-Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011
  • Place of Presentation: (Nongkhai, Thailand)
  • Year and Date: 2011-09-21
• [Presentation] Creep Test of a Strain Sensor Using Double-Layered Metalized Fiber Grating and Soldering (2011)
  • Author(s): Masato Asada、Yoshifumi Suzaki
  • Organizer: The Japan-Thailand-Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011
  • Place of Presentation: (Nongkhai, Thailand)
  • Year and Date: 2011-09-21
• [Presentation] Fabrication of ZnO Thin Films Using Atmospheric Pressure Helium Cold Plasma at Various Oxygen Flow Rates (2011)
  • Author(s): Yoshifumi Suzaki
  • Organizer: The Japan-Thailand-Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011 (JTL-AEME2011)
  • Place of Presentation: Nongkhai, Thailand(ノンカイ、タイ国)(招待講演)
  • Year and Date: 2011-09-21
• [Presentation] Fabrication of Transparent Antifouling Thin Films Using an Atmospheric Pressure Cold Plasma Deposition System (2011)
  • Author(s): Koji Yamauchi
  • Organizer: The Japan-Thailand-Lao P.D.R.Joint Friendship Intemational Conference on Applied Electrical and Mechanical Engineering 2011 (JTL-AEME2011)
  • Place of Presentation: Nongkhai, Thailand(ノンカイ、タイ国)
  • Year and Date: 2011-09-21
• [Presentation] Creep Test of a strain Sensor Using Double-Layered Metalized Fiber Grating and Soldering (2011)
  • Author(s): Masato Asada
  • Organizer: The Japan-Thailand-Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011 (JTL-AEME2011)
  • Place of Presentation: Nongkhai, Thailand(ノンカイ、タイ国)
  • Year and Date: 2011-09-21
• [Presentation] Gd/Fe 磁性多層膜のライン周期構造の作製と磁区観察 (2011)
  • Author(s): 吉岡裕司、須崎嘉文
  • Organizer: 応用物理学会中国四国支部・日本物理学会四国支部・物理教育学会中国支部 2011年度学術講演会
  • Place of Presentation: 鳥取大学鳥取キャンパス
  • Year and Date: 2011-07-30
• [Presentation] Gd/Fe磁性多層膜のライン周期構造の作製と磁区観察 (2011)
  • Author(s): 吉岡裕司
  • Organizer: 応用物理学会中国四国支部・日本物理学会四国支部・物理教育学会中国支部2011年度学術講演会
  • Place of Presentation: 鳥取大学鳥取キャンパス
  • Year and Date: 2011-07-30
• [Presentation] 大気圧低温プラズマ成膜装置を用いた透過性防汚膜の作製 (2011)
  • Author(s): 山内康司、須崎嘉文
  • Organizer: 日本材料学会四国支部第9回学術講演会
  • Place of Presentation: 徳島大学工学部
  • Year and Date: 2011-06-25
• [Presentation] 二層薄膜メタライズドFBGの歪みセンサへの応用 (2011)
  • Author(s): 浅田将人、須崎嘉文
  • Organizer: 日本材料学会四国支部第9回学術講演会
  • Place of Presentation: 徳島大学工学部
  • Year and Date: 2011-06-25
• [Presentation] Fabrication of ZnO films Using Atmospheric Pressure Cold Plasma at Various Discharge Voltages (2011)
  • Author(s): Gi-Taek Kim 、 Yoshifumi Suzaki
  • Organizer: The 4th International Workshop on Plasma Application and Hybrid Functionally Materials
  • Place of Presentation: Victria University(Melbourne, Australia)
  • Year and Date: 2011-03-12
• [Presentation] Fabrication of ZnO Films Using Atmospheric Pressure Cold Plasma at Various Substrate Temperatures (2011)
  • Author(s): Yoshifumi Suzaki
  • Organizer: The 4th International Workshop on Plasma Application and Hybrid Functionally Materials
  • Place of Presentation: Victria University(Melbourne, Australia)
  • Year and Date: 2011-03-12
• [Presentation] Optical Emission Spectroscopy of Atmospheric Cold Plasma and the Fabrication of ZnO Films (2010)
  • Author(s): Dong-Bum Shin 、 Yoshifumi Suzaki
  • Organizer: The 1st Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学工学部(香川県)
  • Year and Date: 2010-09-29
• [Presentation] Effect of Oxygen Flow Rate on Fabrication of ZnO Thin Films by Usingan Atmospheric Pressure Helium Cold Plasma (2010)
  • Author(s): Yoshifumi Suzaki
  • Organizer: The 1st Joint Workshop ofAdvanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学工学部(香川県)
  • Year and Date: 2010-09-29
• [Presentation] Effect of Substrate Temperature on ZnO Thin Film Deposition by Usingan Atmospheric Pressure Cold Plasma Generator (2010)
  • Author(s): Takehiko MURASE 、 Yoshifumi Suzaki
  • Organizer: The 1st Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学工学部(香川県)
  • Year and Date: 2010-09-29
• [Presentation] Fabrication of ZnO:Al Thin Films by Using an Atmospheric Pressure Cold Plasma Generator (2010)
  • Author(s): Akiou KAWAGUCHI 、 Yoshifumi Suzaki
  • Organizer: The 1st Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学工学部(香川県)
  • Year and Date: 2010-09-29
• [Presentation] Effect of Oxygen Flow Rate on Fabrication of ZnO Thin Films by Using an Atmospheric Pressure Helium Cold Plasma (2010)
  • Author(s): Yoshifumi SUZAKI
  • Organizer: The 1st Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学工学部(香川県)
  • Year and Date: 2010-09-29
• [Presentation] Effect of Substrate Temperature on ZnO Thin Film Deposition by Using an Atmospheric Pressure Cold Plasma Generator (2010)
  • Author(s): Takehiko MURASE
  • Organizer: The 1st Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学工学部(香川県)
  • Year and Date: 2010-09-29
• [Presentation] Fabrication of ZnO : Al Thin Films by Using an Atmospheric Pressure Cold Plasma Generator (2010)
  • Author(s): Akiou KAWAGUCHI
  • Organizer: The 1st Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学工学部(香川県)
  • Year and Date: 2010-09-29
• [Presentation] Effect of substrate temperature on ZnO thin film fabrication by using an atmospheric pressure cold plasma generator (2010)
  • Author(s): Yoshifumi Suzaki
  • Organizer: the 37th International Symposium on Compound Semiconductors
  • Place of Presentation: 高松シンボルタワー国際会議場(香川県)
  • Year and Date: 2010-06-04
• [Presentation] 光ファイバーFBG 素子を用いた電流センサの研究
  • Author(s): 岩田 弘
  • Organizer: 日本機械学会中国四国支部学術講演会
  • Place of Presentation: 高知工科大学
• [Presentation] ＦＢＧ電流センサの研究
  • Author(s): 岩田 弘
  • Organizer: 日本設計工学会四国支部研究発表講演会
  • Place of Presentation: 香川高等専門学校
• [Presentation] 光ファイバーＦＢＧを用いた電流センサーの開発
  • Author(s): 須崎嘉文
  • Organizer: 精密工学会2013年度春季大会
  • Place of Presentation: 東京工業大学
• [Presentation] Fabrication of a Transparent Antifauling Thin Film Using an Atmospheric Pressure Cold Plasma Deposition System
  • Author(s): Koji YAMAUCHI
  • Organizer: The 2nd Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学
• [Presentation] FBG 電流センサーの開発
  • Author(s): 牧野 和史
  • Organizer: 日本材料学会四国支部第 10 回学術講演会
  • Place of Presentation: 香川大学
• [Presentation] Development of a FBG current sensor
  • Author(s): Kazufumi Makino
  • Organizer: The 2nd Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学
• [Presentation] Creep test of a strain sensor using double-layered metalized fiber grating and soldering
  • Author(s): Masato Asada
  • Organizer: The 2nd Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学
• [Presentation] Effect of substrate on ZnO thin film fabrication by using an atmospheric pressure cold plasma generator
  • Author(s): Mina Kim
  • Organizer: The 2nd Joint Workshop of Advanced Materials Science and Engineering between Kagawa University and Hanbat National University
  • Place of Presentation: 香川大学
• [Remarks]
  • URL: http://www.eng.kagawa-u.ac.jp/~suzaki/suzaki.html