| Project/Area Number |
22560124
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
|
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| Research Institution | Aichi Institute of Technology |
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Principal Investigator |
TAKAGI Makoto 愛知工業大学, 工学部, 教授 (40288428)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUMURO Akihito 愛知工業大学, 工学部, 教授 (80173889)
|
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2010: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | MEMS / シリコン / ナノ加工 / SPM / 機械的性質 / シリコン単結晶 / ナノスケール加工 / MEMS/NEMS / 走査プローブ顕微鏡 / 原子間力顕微鏡 / 透過型電子顕微鏡 / ナノインデンター / 加工硬化 / ナノ加工(微細加工) / 走査プローブ / ナノインデンテーション / 転位 |
|---|
| Research Abstract |
Change in microstructure and mechanical properties of a Si surface after scanning-scratching tests under a very small loading force in an AFM was investigated by cross-sectional TEM observations and nano-indentation test. Amorphous Si phase and dislocations were generated by scratching, and amorphous Si phase was removed during scanning-scratching. The scratched sub-surface got harder.
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