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Study on Ultrasonic 2-axis Vibration Assisted Polishing

Research Project

Project/Area Number 22560125
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionChubu University

Principal Investigator

SUZUKI Hirofumi  中部大学, 工学部, 教授 (20282098)

Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2010: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywords超音波研磨 / 砥粒加工 / マイクロ非球面金型 / 超音波2軸振動 / 表面粗さ / 形状精度 / 振動解析 / 圧電素子 / 超音波2軸振動 / 非球面金型 / ダイヤモンド砥粒 / 単一加工痕
Research Abstract

Micro glass lenses for digital cameras and blue laser DVD pick-up devices are generally molded by using micro aspheric ceramic molds made of tungsten carbides. These molds are finished by micro polishing using loose abrasives after grinding. Improvement to the accuracy of the molds is necessary, and high numerical aperture (NA) optics with steep angles are required. In order to finish the molds of high NA, an ultrasonic two-axis vibration assisted polishing machine with piezo-electric actuators was proposed and developed. Some micro aspheric molds made of binderless tungsten carbide were polished, and surface roughness of 8 nm Rz was obtained.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (25 results)

All 2013 2012 2011 2010 Other

All Journal Article (8 results) (of which Peer Reviewed: 5 results) Presentation (11 results) Remarks (1 results) Patent(Industrial Property Rights) (5 results)

  • [Journal Article] Micro-aspheric mold polishing utilizing magnetostrictive vibration-assisted polishing machine2013

    • Author(s)
      J. Guo
    • Journal Title

      Key Engineering Materials

      Volume: 523 Pages: 768-773

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A low contact force polishing system for micro molds that utilizes 2-dimensional low frequency vibrations (2DLFV) with piezoelectric actuators (PZT) and a mechanical transformer mechanism2013

    • Author(s)
      S.K.Chee
    • Journal Title

      International Journal of Automation Technology

      Volume: 7 Pages: 71-82

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of pressure control system for ultra-precision finishing2013

    • Author(s)
      J. Guo
    • Journal Title

      Precision Engineering

      Volume: 37 Pages: 81-87

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 低周波振動援用による微細構造をもつ金型の研磨法の研究2012

    • Author(s)
      林偉民,徐世傑,矢野健,藤本正和,呉勇波,鈴木浩文,樋口俊郎
    • Journal Title

      型技術

      Volume: 27,7 Pages: 118-119

    • Related Report
      2012 Final Research Report
  • [Journal Article] Preliminary Studies for Precision Polishing of Micro Structured Mold by Using Three-dimensional Low Frequency Vibration Utilizing Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism2012

    • Author(s)
      S. K. Chee
    • Journal Title

      Advanced Materials Research

      Volume: 565 Pages: 231-236

    • DOI

      10.4028/www.scientific.net/amr.565.231

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 圧電素子を用いた振動研磨による微細形状の超精密精密研磨2011

    • Author(s)
      鈴木浩文,岡田睦,徐世傑,矢野健,樋口俊郎
    • Journal Title

      型技術

      Volume: 26,7 Pages: 42-43

    • Related Report
      2012 Final Research Report
  • [Journal Article] レーザプローブ走査方式の超精密測定の研究-青色レーザ利用による高精度化2011

    • Author(s)
      岡田睦,鈴木浩文,三浦勝弘,松岡伸夫
    • Journal Title

      型技術

      Volume: 26,7 Pages: 134-135

    • NAID

      130005030337

    • Related Report
      2012 Final Research Report
  • [Journal Article] Precision Polishing of Micro Mold by using Piezoelectric Actuator Incorporated with Mechanical Amplitude Magnified Mechanism2011

    • Author(s)
      S.K.Chee, H.Suzuki, M.Okada, Takeshi Yano, T.Higuchi, W.Lin
    • Journal Title

      Advance in Abrasive Technology

      Volume: 325 Pages: 470-475

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Polishing Experiments of Micro Aspheric Mold Using Vibration Assisted Polishing Machine2012

    • Author(s)
      郭江,鈴木浩文,森田晋也,山形豊,樋口俊郎
    • Organizer
      2012年度精密工学会春季大会学術講演会講演論文集
    • Related Report
      2012 Final Research Report
  • [Presentation] Finishing of Micro Aspheric Molds by Vibration Assisted Polishing Using Magnetostrictive Material2011

    • Author(s)
      J.Guo, H.Suzuki, T.Higuchi
    • Organizer
      Proceedings of 11th euspen international Conference
    • Place of Presentation
      Como, Italy
    • Year and Date
      2011-05-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of Micro Polishing System by Using Magnetostriction Vibrator2011

    • Author(s)
      郭江, 鈴木浩文, ほか
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学(東京都)
    • Year and Date
      2011-03-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Preliminary studies of an application of the piezoelectric actuator incorporated with mechanical transformer as a precision polishing actuator2011

    • Author(s)
      徐世傑, 鈴木浩文, ほか
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学(東京都)
    • Year and Date
      2011-03-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Development of Micro Polishing System by Using Magnetostriction Vibrator2011

    • Author(s)
      J. GUO, H. Suzuki, K. Yoshida, T. Higuchi
    • Organizer
      2011 年度精密工学会春季大会学術講演会講演論文集
    • Related Report
      2012 Final Research Report
  • [Presentation] 低周波振動援用研磨による金型材料の加工特性2011

    • Author(s)
      小林直貴,久保田享,林偉民,呉勇波,藤本正和,徐世傑,矢野健,山形豊,樋口俊郎,鈴木浩文,牧野俊清
    • Organizer
      2011年度精密工学会春季大会学術講演会講演論文集
    • Related Report
      2012 Final Research Report
  • [Presentation] Study on precision polishing of micro structured mold -Development of micro polishing system using piezoelectric actuator-incorporated with mechanical transformer-2011

    • Author(s)
      S.K. Chee, H. Suzuki , M. Okada,K. Yoshida, W. Lin, T. Yano, T. Higuchi
    • Organizer
      2011年度精密工学会春季大会学術講演会講演論文集
    • Related Report
      2012 Final Research Report
  • [Presentation] Preliminary studies on precision polishing of micro structured mold -Development of micro polishing system using piezoelectric actuator incorporated with mechanical transformer -2011

    • Author(s)
      S. K. Chee, H. Suzuki, M. Okada, K. Yoshida, W. Lin, T. Yano, T. Higuchi
    • Organizer
      2011 年度砥粒加工学会学術講演会講演論文集
    • Related Report
      2012 Final Research Report
  • [Presentation] マイクロ非球面研磨用磁歪振動研磨装置の開発2011

    • Author(s)
      郭江,鈴木浩文,樋口俊郎
    • Organizer
      2011年度砥粒加工学会学術講演会講演論文集
    • Related Report
      2012 Final Research Report
  • [Presentation] 低周波振動援用研磨法による金型材料の加工効果2011

    • Author(s)
      林偉民,小林直樹,藤本正和,呉勇波,徐世傑,矢野健,鈴木浩文
    • Organizer
      2011年度砥粒加工学会学術講演会講演論文集
    • Related Report
      2012 Final Research Report
  • [Presentation] Development of pressure control system for ultra-precision finishing

    • Author(s)
      H. Suzuki
    • Organizer
      Proceedings of 12th euspen international Conference
    • Place of Presentation
      Stockholm, Sweden
    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.chubu.ac.jp/about/faculty/profile/81055a74934afd47b755fc8aca81a2b9e76024dc.html

    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 研磨装置2012

    • Inventor(s)
      徐世傑,鈴木浩文,林偉民,樋口俊郎,吉田和史,矢野健
    • Industrial Property Rights Holder
      同上
    • Filing Date
      2012-06-28
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 変位拡大機構及び研磨装置2012

    • Inventor(s)
      徐世傑,矢野健,鈴木浩文,林偉民,樋口俊郎,吉田和史
    • Industrial Property Rights Holder
      同上
    • Filing Date
      2012-09-10
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 研磨装置2012

    • Inventor(s)
      徐 世傑,鈴木浩文,林 偉民,樋口俊郎,吉田和史,矢野 健
    • Industrial Property Rights Holder
      徐 世傑,鈴木浩文,林 偉民,樋口俊郎,吉田和史,矢野 健
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-06-18
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 変位拡大機構及び研磨2012

    • Inventor(s)
      徐 世傑,矢野 健,鈴木浩文,林 偉民,樋口俊郎,吉田和史
    • Industrial Property Rights Holder
      徐 世傑,矢野 健,鈴木浩文,林 偉民,樋口俊郎,吉田和史
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-09-10
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 圧電アクチュエータを用いた研磨装置2010

    • Inventor(s)
      徐世傑, 鈴木浩文, 林偉民, 樋口俊郎, 吉田和史, 矢野健
    • Industrial Property Rights Holder
      有限会社メカノトランスフォーマ
    • Industrial Property Number
      2010-257994
    • Filing Date
      2010-11-18
    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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