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Error analysis and reduction in profilometry using multi-probe methods

Research Project

Project/Area Number 22560130
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionHigh Energy Accelerator Research Organization

Principal Investigator

KUME Tatsuya  大学共同利用機関法人高エネルギー加速器研究機構, 機械工学センター, 研究機関講師 (40353362)

Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2012: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2011: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2010: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords形状測定 / 誤差伝播 / 多点法 / スティッチング / ゼロ点ずれ / 精密形状測定
Research Abstract

The estimated errors for the profiles obtained by 2-point method, 3-point method, and stitching agree well with the experimental values and it shows validity for our error estimation. It also shows that the systematic error shown in the measurements by using our profile measurement system adopting zero-adjustment method, which prevents zero difference between the three displacement meters for 3-point method affecting the measurements, can be caused by error in the measurement positions. Furthermore, it was experimentally shown that the fluctuation of the zero difference can be detected and compensated with the stability equal to the resolution of the displacement meters.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (40 results)

All 2013 2012 2011 2010 Other

All Journal Article (14 results) (of which Peer Reviewed: 2 results) Presentation (23 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Large-scale Accelerator Alignment Using an Inclinometer2013

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, and K.Furukawa
    • Journal Title

      Precision Engineering, Accepted

    • URL

      http://dx.doi.org/doi:10.1016/j.precisioneng.2013.03.009

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 多点法による形状測定におけるゼロ点ずれ除去方法の検討 (第3 報)-ゼロ点ずれ変動検出方法の改良-2013

    • Author(s)
      久米, 江並, 東, 上野, 山中
    • Journal Title

      2013 年度精密工学会春季大会予稿集

      Volume: N46

    • NAID

      130005032081

    • Related Report
      2012 Final Research Report
  • [Journal Article] Large-scale Accelerator Alignment Using an Inclinometer2013

    • Author(s)
      久米 達哉
    • Journal Title

      Precision Engineering

      Volume: - Issue: 4 Pages: 825-830

    • DOI

      10.1016/j.precisioneng.2013.03.009

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of the alignment for long linear accelerators using a level2012

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, and K.Furukawa
    • Journal Title

      第9回日本加速器学会年会 2012 予稿集

      Volume: WEPS130

    • Related Report
      2012 Final Research Report
  • [Journal Article] 大型対象物の形状測定における偶然誤差の蓄積2012

    • Author(s)
      久米, 江並, 東, 山中, 上野
    • Journal Title

      2012 年度精密工学会春季大会予稿集

      Volume: F19

    • NAID

      130005031251

    • Related Report
      2012 Final Research Report
  • [Journal Article] 多点法による形状測定におけるゼロ点ずれ除去方法の検討-第2 報 ゼロ点ずれ変動監視機構の検討2011

    • Author(s)
      久米, 江並, 東, 上野
    • Journal Title

      2011年度精密工学会秋季大会予稿集

      Volume: N69

    • NAID

      130004660495

    • Related Report
      2012 Final Research Report
  • [Journal Article] 水準器を用いた床面変動測定2011

    • Author(s)
      久米, 奥山, 佐藤, 諏訪田, 古川
    • Journal Title

      第8回加速器学会年会予稿集

      Volume: MOPS156

    • Related Report
      2012 Final Research Report
  • [Journal Article] Error estimation for the stitched profile in straightness measurement2011

    • Author(s)
      T.Kume, K.Enami, Y.Higashi, and K.Ueno
    • Journal Title

      euspen 2011

    • Related Report
      2012 Final Research Report
  • [Journal Article] 多点法による形状測定におけるゼロ点ずれ除去方法の検討-繰返し性の無い変動をするゼロ点ずれの除去2011

    • Author(s)
      久米, 江並, 東, 上野
    • Journal Title

      2011 年度精密工学会春季大会予稿集

      Volume: K06

    • NAID

      130005030865

    • Related Report
      2012 Final Research Report
  • [Journal Article] スティッチング法を用いた形状測定における誤差伝搬(第2 報)-誤差伝搬モデルの見直し2010

    • Author(s)
      久米, 江並, 東, 上野
    • Journal Title

      2010 年度精密工学会秋季大会予稿集

      Volume: H14

    • NAID

      130005030204

    • Related Report
      2012 Final Research Report
  • [Journal Article] Straightness evaluation for the KEK electron/positron linac using a level2010

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, K.Furukawa
    • Journal Title

      IWAA2010

    • Related Report
      2012 Final Research Report
  • [Journal Article] Long distance straightness measurement using a level2010

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, K.Furukawa
    • Journal Title

      ISMQC 2010

      Volume: F6

    • NAID

      130004659683

    • Related Report
      2012 Final Research Report
  • [Journal Article] 水準器を用いた KEK 入射器の真直度測定2010

    • Author(s)
      久米, 奥山, 佐藤, 諏訪田, 古川
    • Journal Title

      第7回加速器学会年会予稿集

      Volume: THPS121

    • Related Report
      2012 Final Research Report
  • [Journal Article] Straightness alignment of linac by detecting slope angle2010

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, K.Furukawa
    • Journal Title

      IPAC10, WEPEB055

    • Related Report
      2012 Final Research Report
  • [Presentation] 多点法による形状測定におけるゼロ点ずれ除去方法の検討 (第3 報)-ゼロ点ずれ変動検出方法の改良-2013

    • Author(s)
      久米, 江並, 東, 上野, 山中
    • Organizer
      2013 年度精密工学会春季大会
    • Place of Presentation
      東工大, 東京都目黒区
    • Year and Date
      2013-03-14
    • Related Report
      2012 Final Research Report
  • [Presentation] 多点法による形状測定におけるゼロ点ずれ除去方法の検討 (第3報)-ゼロ点ずれ変動検出方法の改良-2013

    • Author(s)
      久米 達哉
    • Organizer
      2013年度精密工学会春季大会
    • Place of Presentation
      東京都目黒区
    • Related Report
      2012 Annual Research Report
  • [Presentation] 大型対象物の形状測定における偶然誤差の蓄積2012

    • Author(s)
      久米, 江並, 東, 山中, 上野
    • Organizer
      2012 年度精密工学会春季大会, F19
    • Place of Presentation
      首都大, 八王子市
    • Year and Date
      2012-03-14
    • Related Report
      2012 Final Research Report
  • [Presentation] Straightness evaluation for the 206-m-long part of the KEK electron/positron linac using inclinometers2012

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, and K.Furukawa
    • Organizer
      IWAA2012
    • Place of Presentation
      Batavia, IL., USA
    • Related Report
      2012 Final Research Report
  • [Presentation] Evaluation of the alignment for long linear accelerators using a level2012

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, and K.Furukawa
    • Organizer
      第9回日本加速器学会年会 2012, WEPS130
    • Place of Presentation
      大阪大, 豊中市
    • Related Report
      2012 Final Research Report
  • [Presentation] Evaluation of the alignment for long linear accelerators using a level2012

    • Author(s)
      久米 達哉
    • Organizer
      第9回日本加速器学会年会
    • Place of Presentation
      豊中市
    • Related Report
      2012 Annual Research Report
  • [Presentation] Straightness evaluation for the 206-m-long part of the KEK electron/positron linac using inclinometers2012

    • Author(s)
      久米 達哉
    • Organizer
      IWAA2012
    • Place of Presentation
      Batavia, IL, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] 大型対象物の形状測定における偶然誤差の蓄積2012

    • Author(s)
      久米達哉
    • Organizer
      2012年度精密工学会春季大会
    • Place of Presentation
      首都大学東京(東京都)
    • Related Report
      2011 Annual Research Report
  • [Presentation] 多点法による形状測定におけるゼロ点ずれ除去方法の検討-第2 報 ゼロ点ずれ変動監視機構の検討2011

    • Author(s)
      久米, 江並, 東, 上野
    • Organizer
      2011年度精密工学会秋季大会, N69
    • Place of Presentation
      金沢大, 金沢市
    • Year and Date
      2011-09-22
    • Related Report
      2012 Final Research Report
  • [Presentation] 水準器を用いた床面変動測定2011

    • Author(s)
      久米, 奥山, 佐藤, 諏訪田, 古川
    • Organizer
      第8回日本加速器学会年会, MOPS156
    • Place of Presentation
      つくば市
    • Year and Date
      2011-09-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Error estimation for the stitched profile in straightness measurement2011

    • Author(s)
      T.Kume, K.Enami, Y.Higashi, and K.Ueno
    • Organizer
      euspen 2011
    • Place of Presentation
      Como, Italy
    • Year and Date
      2011-05-25
    • Related Report
      2012 Final Research Report
  • [Presentation] 多点法による形状測定におけるゼロ点ずれ除去方法の検討-繰返し性の無い変動をするゼロ点ずれの除去2011

    • Author(s)
      久米, 江並, 東, 上野
    • Organizer
      2011 年度精密工学会春季大会, K06
    • Place of Presentation
      東洋大, 東京都文京区
    • Year and Date
      2011-03-14
    • Related Report
      2012 Final Research Report
  • [Presentation] 多点法による形状測定におけるゼロ点ずれ除去方法の検討-繰返し性の無い変動をするゼロ点ずれの除去2011

    • Author(s)
      久米達哉
    • Organizer
      2011年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学白山キャンパス(東京都文京区)
    • Year and Date
      2011-03-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Error estimation for the stitched profile in straightness measurement2011

    • Author(s)
      T.Kume
    • Organizer
      euspen2011
    • Place of Presentation
      Como, Italy
    • Related Report
      2011 Annual Research Report
  • [Presentation] スティッチングを用いた真直度測定における誤差伝播2011

    • Author(s)
      久米達哉
    • Organizer
      第12回高エネ研メカ・ワークショップ
    • Place of Presentation
      つくば市(茨城県)
    • Related Report
      2011 Annual Research Report
  • [Presentation] 多点法による形状測定におけるゼロ点ずれ除去方法の検討(第2報)ゼロ点ずれ変動監視機構の検討2011

    • Author(s)
      久米達哉
    • Organizer
      2011年度精密工学会秋季大会
    • Place of Presentation
      金沢大学(石川県)
    • Related Report
      2011 Annual Research Report
  • [Presentation] スティッチング法を用いた形状測定における誤差伝搬(第2 報)-誤差伝搬モデルの見直し2010

    • Author(s)
      久米, 江並, 東, 上野
    • Organizer
      2010 年度精密工学会秋季大会, H14
    • Place of Presentation
      名古屋大, 名古屋市
    • Year and Date
      2010-09-27
    • Related Report
      2012 Final Research Report
  • [Presentation] Straightness evaluation for the KEK electron/positron linac using a level2010

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, K.Furukawa
    • Organizer
      IWAA2010
    • Place of Presentation
      Hamburg, Germany
    • Year and Date
      2010-09-16
    • Related Report
      2012 Final Research Report
  • [Presentation] Long distance straightness measurement using a level2010

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, K.Furukawa
    • Organizer
      ISMQC 2010, F6
    • Place of Presentation
      大阪大, 吹田市
    • Year and Date
      2010-09-08
    • Related Report
      2012 Final Research Report
  • [Presentation] 水準器を用いた KEK 入射器の真直度測定2010

    • Author(s)
      久米, 奥山, 佐藤, 諏訪田, 古川
    • Organizer
      第7回日本加速器学会年会, THPS121
    • Place of Presentation
      姫路市
    • Year and Date
      2010-08-05
    • Related Report
      2012 Final Research Report
  • [Presentation] Straightness alignment of linac by detecting slope angle2010

    • Author(s)
      T.Kume, E.Okuyama, M.Satoh, T.Suwada, K.Furukawa
    • Organizer
      IPAC10, WEPEB055
    • Place of Presentation
      Kyoto
    • Year and Date
      2010-05-25
    • Related Report
      2012 Final Research Report
  • [Presentation] 多点法を用いた加速器の高精度アライメント方法 の検討

    • Author(s)
      久米 達哉
    • Organizer
      第13回高エ研メカ・ワークショップ
    • Place of Presentation
      つくば市
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高精度傾斜計を用いた大型線形加速器の真直度評価

    • Author(s)
      久米 達哉
    • Organizer
      第14回高エ研メカ・ワークショップ
    • Place of Presentation
      つくば市
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 形状測定装置及び形状測定方法2013

    • Inventor(s)
      久米 達哉
    • Industrial Property Rights Holder
      高エネルギー加速器研究機構
    • Industrial Property Number
      2013-001861
    • Filing Date
      2013-01-09
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 形状測定装置及び形状測定方法2013

    • Inventor(s)
      久米 達哉
    • Industrial Property Rights Holder
      高エネルギー加速器研究機構
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-001861
    • Filing Date
      2013-01-09
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 方向検出装置2010

    • Inventor(s)
      久米 達哉
    • Industrial Property Rights Holder
      高エネルギー加速器研究機構
    • Industrial Property Number
      2010-105707
    • Filing Date
      2010-04-30
    • Related Report
      2012 Final Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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