• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of high-functional photocatalytic film using nano/micro double ploughing texture

Research Project

Project/Area Number 22560134
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionIbaraki University

Principal Investigator

SHIMIZU Jun  茨城大学, 工学部, 教授 (40292479)

Co-Investigator(Kenkyū-buntansha) ZHOU Libo  茨城大学, 工学部, 教授 (90235705)
ONUKI Teppei  茨城大学, 工学部, 准教授 (70400447)
OJIMA Hirotaka  茨城大学, 工学部, 講師 (90375361)
YAMAMOTO Takeyuki  茨城大学, 工学部, 技術職員 (40396594)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2011: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywords掘起し / 引っかき / 光触媒 / 酸化チタン / 陽極酸化 / 振動
Research Abstract

In the present study, mechanically stronger and higher functional photocatalytic film was developed with a help of surface micro-ploughing texture. In its fabrication, a pure titanium plate was scratched by a sharply pointed triangular diamond tip vibrated in the scratching depth direction at several mm in amplitude prior to the anodic-oxidation. As a result, it was found that the microtextured titanium dioxide film had a larger real surface area, which is advantageous to activate the photocatalytic reaction. And it was also clarified that the wettability, which is one of the photocatalytic functions, of the microtextured titanium dioxide film was superior to that of the mirror finished one.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (52 results)

All 2013 2012 2011 2010 Other

All Journal Article (28 results) (of which Peer Reviewed: 27 results) Presentation (19 results) Remarks (5 results)

  • [Journal Article] A robust procedure of data analysis for micro/nano indentation2013

    • Author(s)
      W. Hang, L. Zhou, J. Shimizu, J. Yuan
    • Journal Title

      Precision Engineering

      Volume: Vol.37 Issue: 2 Pages: 408-414

    • DOI

      10.1016/j.precisioneng.2012.11.003

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-Scale Stick-Slip Phenomenon2013

    • Author(s)
      J. Shimizu, L. Zhou, T. Yamamoto
    • Journal Title

      Tribology Online

      Volume: 8 Issue: 1 Pages: 38-43

    • DOI

      10.2474/trol.8.38

    • NAID

      130003368294

    • ISSN
      1881-218X, 1881-2198
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Molecular Dynamics Simulation of Metal Cutting with Local Hydrostatic Pressure Field Formation2012

    • Author(s)
      K. Uezaki, J. Shimizu, L. Zhou, T. Onuki, H. Ojima
    • Journal Title

      Key Engineering Materials

      Volume: Vols.523-524 Pages: 67-172

    • DOI

      10.4028/www.scientific.net/kem.523-524.167

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Study on micro/nano-indentation of typical soft-brittle materials2012

    • Author(s)
      W. Hang, L. Zhou, J. Shimizu, T. Yamamoto, J. Yuan
    • Journal Title

      Key Engineering Materials

      Volume: Vols.523-524 Pages: 7-12

    • DOI

      10.4028/www.scientific.net/kem.523-524.7

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] アブレシブ摩耗現象のシミュレーション2012

    • Author(s)
      清水 淳
    • Journal Title

      トライボロジスト

      Volume: 57巻 Pages: 339-344

    • NAID

      10030614027

    • URL

      http://www.tribology.jp/publication/journal/journal2012.html

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Influence of Surface Micro Texture on Photocatalitic Function of Titanium Dioxide Film2012

    • Author(s)
      J. Shimizu, G. Kobayashi, N. Hasegawa, T. Yamamoto, H. Ojima, T. Onuki, L. Zhou
    • Journal Title

      Materials Science Forum

      Volume: Vols.706-709 Pages: 2646-2651

    • DOI

      10.4028/www.scientific.net/msf.706-709.2646

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2012

    • Author(s)
      清水 淳,周 立波,小貫哲平,尾嶌裕隆,山本武幸,鈴木直紀
    • Journal Title

      砥粒加工学会誌

      Volume: 55巻 Pages: 662-667

    • URL

      https://www.jstage.jst.go.jp/article/jsat/55/11/55_662/_pdf

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] トライボロジスト2012

    • Author(s)
      清水 淳
    • Journal Title

      アブレシブ摩耗現象のシミュレーション

      Volume: 57巻 Pages: 339-344

    • Related Report
      2012 Annual Research Report
  • [Journal Article] A study on the diamond grinding of ultra-thin silicon wafers2012

    • Author(s)
      L.Zhou, Y.Tian, H.Huang, H.Sato, J.Shimizu
    • Journal Title

      Part B : Journal of Engineering Manufacture

      Volume: 226 Issue: 1 Pages: 66-76

    • DOI

      10.1177/0954405411414768

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 近赤外分光計測を用いた薄片シリコンウエハの厚さ計測法2011

    • Author(s)
      小貫哲平, 小野龍典, 尾嶌隆裕, 清水淳, 周立波
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 729-732

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 大口径Siウエハ表面形状の計測評価技術に関する研究,-第1報:ウェーブレット変換を用いたノイズ除去手法の開発-2011

    • Author(s)
      周立波, 小野真志, 尾嶌裕隆, 清水淳
    • Journal Title

      精密工学会誌

      Volume: 77 Pages: 1165-1169

    • NAID

      130002121500

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Siウエハ仕上げ加工に及ぼす加工変質層の影響の解析2011

    • Author(s)
      清水淳, 周立波, 小貫哲平, 尾嶌裕隆, 山本武幸, 鈴木直紀
    • Journal Title

      砥粒加工学会誌

      Volume: 55 Pages: 662-667

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Finite element analysis of deflection and residual stress on machined ultra-thin silicon wafers2011

    • Author(s)
      Y.B.Tian, L.Zhou, Z.W.Zhong, H.Sato, J.Shimizu
    • Journal Title

      Semiconductor Science and Technology

      Volume: 26 Issue: 10 Pages: 1-7

    • DOI

      10.1088/0268-1242/26/10/105002

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanogrinding of multi-layered thin film amorphous Si solar panels2011

    • Author(s)
      Taro Sumitomo, Han Huang, Libo Zhou, Jun Shimizu
    • Journal Title

      International Journal of Machine Tools and Manufacture

      Volume: 51 Issue: 10-11 Pages: 797-805

    • DOI

      10.1016/j.ijmachtools.2011.07.001

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deformation and material removal in a nanoscale multi-layer thin film solar panel using nanoscratch2011

    • Author(s)
      Taro Sumitomo, Han Huang, Libo Zhou
    • Journal Title

      International Journal of Machine Tools and Manufacture

      Volume: 51 Issue: 3 Pages: 182-189

    • DOI

      10.1016/j.ijmachtools.2010.11.012

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spectroscopic Measurements of Silicon Wafer Thickness for Backgrinding Process2011

    • Author(s)
      Teppei Onuki, Naoto Takagi, Jun Shimizu, Hirotaka Ojima, Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: 325 Pages: 672-677

    • DOI

      10.4028/www.scientific.net/amr.325.672

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of CMG Wheels for Stress Relief in Si Wafer Thinning Process2011

    • Author(s)
      Yuki Mikami, Libo Zhou, Jun Shimizu, Hirotaka Ojima, Yoshiaki Tashiro, Sumio Kamiya
    • Journal Title

      Advanced Materials Research

      Volume: 325 Pages: 678-683

    • DOI

      10.4028/www.scientific.net/amr.325.678

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Deformation and Material Removal in a Nanoscale Multi-layer Thin Film Solarpanel Using Nanoscratch2011

    • Author(s)
      Taro Sumitomo, Han Huang, Libo Zhou
    • Journal Title

      International Journal Machine Tools & Manufacture

      Volume: Vol.51 Pages: 182-189

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mold Fabricated by Nanoscratching for Nanoimprint Lithography2010

    • Author(s)
      W. Ohsone, J. Shimizu, L. Zhou, H. Ojima, T. Onuki, T. Yamamoto, H. Huang
    • Journal Title

      Advanced Materials Research

      Volume: Vols.126-128 Pages: 843-848

    • DOI

      10.4028/www.scientific.net/amr.126-128.843

    • Related Report
      2012 Final Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhancement of Photocatalytic Reaction of Titanium Dioxide Film by Surface Texturing2010

    • Author(s)
      J. Shimizu, L. Zhou, K. Takamori, H. Ojima, T. Yamamoto, H. Huang
    • Journal Title

      Materials Science Forum

      Volume: Vols.654-656 Pages: 1784-1787

    • DOI

      10.4028/www.scientific.net/msf.654-656.1784

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Molecular Dynamics Simulation of Rubbing Phenomena in Ultra-Precision Abrasive Machining2010

    • Author(s)
      J. Shimizu, L. Zhou, T. Yamamoto, H. Huang
    • Journal Title

      Key Engineering Materials

      Volume: Vol.443 Pages: 417-422

    • DOI

      10.4028/www.scientific.net/kem.443.417

    • Related Report
      2012 Final Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Molecular Dynamics Simulation of Chemical Reaction Assisted Grinding of Silicon Wafer by Controlling Interatomic Potential Parameters2010

    • Author(s)
      Jun Shimizu, Libo Zhou, Takeyuki Yamamoto
    • Journal Title

      Journal of Computational and Theoretical Nanoscience

      Volume: Vol.7 Pages: 2165-2170

    • NAID

      10026236879

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Wheel Additive On Chemo-Mechanical Grinding (CMG) of Single Crystal Si Wafer2010

    • Author(s)
      Hidenori Takahashi, Yebing Tian, Yuki Mikami, Jun Shimizu, Libo Zhou, Yoshiaki Tashiro, Hisao Iwase, Sumio Kamiya
    • Journal Title

      Key Engineering Materials

      Volume: Vols.447-448 Pages: 106-110

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design of Digital Filters for Si Wafer Surface Profile Measurement-Noise Reduction by Wavelet Transform-2010

    • Author(s)
      Masashi Ono, Kazutaka Nonomura, Libo Zhou, Jun Shimizu
    • Journal Title

      Key Engineering Materials

      Volume: Vols.447-448 Pages: 544-548

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhancement of Photocatalytic Reaction of Tifanium Dioxide Film by Surface Texturing2010

    • Author(s)
      Jun Shimizu, Libo Zhou, Kaoru Takamori, Hirotaka Ojima, Takeyuki Yamamoto, Han Huang
    • Journal Title

      Materials Science Forum

      Volume: Vols.654-656 Pages: 1784-1787

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Two Dimensional Ultrasonic Vibration Assisted Chemo-Mechanical Grinding of Si wafer2010

    • Author(s)
      WANG Zhen Zhong, Y. WU, L. ZHOU, GUO Yin Biao, WU Chen Xu
    • Journal Title

      Advanced Materials Research

      Volume: Vols.126-128 Pages: 282-288

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design of digital filters for Si wafer surface profile measurement-Noise reduction by lifting scheme wavelet transform-2010

    • Author(s)
      Kazutaka Nonomura, Masashi Ono, Libo Zhou, Jun Shimizu, Hirotaka Ojima
    • Journal Title

      Advanced Materials Research

      Volume: Vols.126-128 Pages: 544-548

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement in Oxide-pattern Sizes Controllability on Scanning Probe Nanolithography2010

    • Author(s)
      Teppei Onuki, Takashi Tokizaki, Ojima Hirotaka, Jun Shimizu, Libo Zhou
    • Journal Title

      Advanced Materials Research

      Volume: Vols.126-128 Pages: 701-706

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] 微小テクスチャ金型の開発とその応用(第2報)-振動切削の高周波化によるテクスチャの微小化-2013

    • Author(s)
      清水 淳
    • Organizer
      精密工学会春季大会
    • Place of Presentation
      東京工業大学(大岡山)
    • Year and Date
      2013-03-13
    • Related Report
      2012 Final Research Report
  • [Presentation] 微小テクスチャ金型の開発とその応用(第2報)-振動切削の高周波化によるテクスチャの微小化-2013

    • Author(s)
      清水 淳
    • Organizer
      精密工学会春季大会
    • Place of Presentation
      東京工業大学(大岡山)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 原子スケールのスティックスリップ現象を伴う摩擦におけるエネルギー散逸過程の分子動力学解析2012

    • Author(s)
      清水 淳
    • Organizer
      日本機械学会第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州国際会議場
    • Year and Date
      2012-10-24
    • Related Report
      2012 Final Research Report
  • [Presentation] 分子動力学によるすべり摩擦機構の解析-原子スケールのスティックスリップ現象におけるエネルギー散逸-2012

    • Author(s)
      清水 淳
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      室蘭工業大学
    • Year and Date
      2012-09-16
    • Related Report
      2012 Final Research Report
  • [Presentation] Siウエハ仕上げ加工に及ぼす加工変質層の影響-セリア砥粒による前加工面のナノスクラッチ実験-2012

    • Author(s)
      清水 淳
    • Organizer
      砥粒加工学会学術講演会
    • Place of Presentation
      同志社大学(京田辺)
    • Year and Date
      2012-08-31
    • Related Report
      2012 Final Research Report
  • [Presentation] 掘起しを利用した微小テクスチャ加工に関する研究2012

    • Author(s)
      清水 淳
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      国立オリンピック記念青少年総合センター
    • Year and Date
      2012-05-16
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] 原子スケールのスティックスリップ現象を伴う摩擦におけるエネルギー散逸過程の分子動力学解析2012

    • Author(s)
      清水 淳
    • Organizer
      日本機械学会第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州国際会議場
    • Related Report
      2012 Annual Research Report
  • [Presentation] 分子動力学によるすべり摩擦機構の解析-原子スケールのスティックスリップ現象におけるエネルギー散逸-2012

    • Author(s)
      清水 淳
    • Organizer
      日本トライボロジー学会トライボロジー会議
    • Place of Presentation
      室蘭工業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Siウエハ仕上げ加工に及ぼす加工変質層の影響-セリア砥粒による前加工面のナノスクラッチ実験-2012

    • Author(s)
      清水 淳
    • Organizer
      砥粒加工学会学術講演会
    • Place of Presentation
      同志社大学(京田辺)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development of Electrodes with Micro Ploughing Patterns for MEMS Applications2011

    • Author(s)
      清水淳
    • Organizer
      International Tribology Congress (ASIATRIB 2010)
    • Place of Presentation
      Hyatt Regency Perth, Australia
    • Year and Date
      2011-12-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011

    • Author(s)
      J. Shimizu
    • Organizer
      6th Int'l Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      大宮ソニックシティ
    • Year and Date
      2011-11-09
    • Related Report
      2012 Final Research Report
  • [Presentation] Nanomold Fabrication by Scratching and Its Application to Nanoimprint Lithography2011

    • Author(s)
      J.Shimizu, W.Ohsone, H.Ojima, T.Onuki, L.Zhou, T.Yamamoto
    • Organizer
      6th Int'l Conference on Leading Edge Manufacturing in 21st Century
    • Place of Presentation
      Saitama, Japan
    • Year and Date
      2011-11-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-scale Stick-slip Phenomenon2011

    • Author(s)
      J. Shimizu
    • Organizer
      Int'l Tribology Conference 2011
    • Place of Presentation
      広島国際会議場
    • Year and Date
      2011-11-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Molecular Dynamics Simulation of Energy Dissipation Process in Atomic-scale Stick-slip Phenomenon2011

    • Author(s)
      J.Shimizu, L.Zhou, T.Yamamoto
    • Organizer
      Int'l Tribology Conference 2011
    • Place of Presentation
      Hiroshima, Japan
    • Year and Date
      2011-11-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] SPMによるナノ構造の創成に関する研究-機械および電気的手法による検討-2011

    • Author(s)
      清水 淳
    • Organizer
      精密工学会秋季大会
    • Place of Presentation
      金沢大学(角間)
    • Year and Date
      2011-09-21
    • Related Report
      2012 Final Research Report
  • [Presentation] SPMによるナノ構造の創成に関する研究-機械および電気的手法による検討-2011

    • Author(s)
      清水淳, 高野巧一郎, 尾嶌裕隆, 小貫哲平, 山本武幸, 周立波
    • Organizer
      精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学(角間)
    • Year and Date
      2011-09-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of Electrodes with Micro Ploughing Patterns for MEMS Applications2010

    • Author(s)
      J. Shimizu
    • Organizer
      International Tribology Congress (ASIATRIB 2010)
    • Place of Presentation
      Hyatt Regency Perth (Australia)
    • Year and Date
      2010-12-07
    • Related Report
      2012 Final Research Report
  • [Presentation] Wavelet変換によるSiウエハ評価に関する研究(第1報)2010

    • Author(s)
      周 立波
    • Organizer
      砥粒加工学会学術講演会
    • Place of Presentation
      岡山大学工学部
    • Year and Date
      2010-08-26
    • Related Report
      2012 Final Research Report
  • [Presentation] Wavelet変換によるSiウエハ評価に関する研究(第1報)2010

    • Author(s)
      周立波
    • Organizer
      砥粒加工学会
    • Place of Presentation
      岡山大学工学部
    • Year and Date
      2010-08-26
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      https://sites.google.com/site/nlabibarakiuniv/

    • Related Report
      2012 Final Research Report
  • [Remarks] 茨城大学nLabホームページ

    • URL

      http://sites.google.com/site/nlabibarakitest/

    • Related Report
      2012 Annual Research Report
  • [Remarks] 茨城大学研究者情報総覧

    • URL

      http://info.ibaraki.ac.jp/Profiles/5/0000414/profile.html

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://sites.google.com/site/nlabibarakitest/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://info.ibaraki.ac.jp/Profiles/5/0000414/profile.html

    • Related Report
      2010 Annual Research Report

URL: 

Published: 2010-08-23   Modified: 2019-07-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi