Research and Development of MEMS Miniaturized Inductive Power Generator with Multilayer Ceramic Magnetic Circuit

• Project/Area Number: 22560254
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: Nihon University
• Principal Investigator: UCHIKOBA Fumio 日本大学, 理工学部, 教授 (60366557)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000); Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2011: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
• Keywords: マイクロ / ナノメカトロニクス / MEMS / 積層セラミック / 発電機 / エアタービン / 電磁誘導 / エアータービン / 磁気回路

Research Abstract

Combining different technical field of MEMS (Micro Electro Mechanical Systems) and multilayer ceramic system, miniaturized air turbine generators of millimeter size was developed. MEMS and multilayer technologies were adopted to the air turbine part and electromagnetic induction part, respectively. We achieved low leak magnetic flux and low internal resistance by developing the multilayer magnetic circuit. The maximum power was 1.53mVA when a spindle air turbine was used with the developed magnetic circuit.

Research Products

• [Journal Article] Patterning Technologyof Ferrite and Insulating Material in a Single Layer of the Multilayer Ceramic Device (2012)
  • Author(s): M. Takato, A. Kenmochi, T. Fujino, K.Saito, F.Uchikoba
  • Journal Title: New Journal of Glass and Ceramics Volume: vol.2 Pages: 105-110
  • URL: http://dx.doi.org/10.4236/njgc.2012.23015
  • Peer Reviewed
• [Journal Article] MillimeterScale MEMS Air Turbine Generator by Winding Wire and Multilayer Magnetic Ceramic Circuit (2012)
  • Author(s): A. Iizuka, M. Takato, M. Kaneko, T.Nishi, K.Saito, F. Uchikoba
  • Journal Title: Modern MechanicalEngineering Volume: vol.2 Pages: 41-46
  • URL: http://dx.doi.org/10.4236/mme.2012.22006
  • Peer Reviewed
• [Journal Article] Millimeter Scale MEMS Air Turbine Generator by Winding Wire and Multilayer Magnetic Ceramic Circuit (2012)
  • Author(s): A. Iizuka, M. Takato, M. Kaneko, T. Nishi, K. Saito, F. Uchikoba
  • Journal Title: Modern Mechanical Engineering Volume: 2 Issue: 02 Pages: 41-46
  • DOI: 10.4236/mme.2012.22006
  • Peer Reviewed
• [Journal Article] Patterning Technology of Ferrite and Insulating Material in a Single Layer of the Multilayer Ceramic Device (2012)
  • Author(s): M. Takato, A. Kenmochi, T. Fujino, K. Saito, F. Uchikoba
  • Journal Title: New Journal of Glass and Ceramics Volume: 2 Issue: 03 Pages: 105-110
  • DOI: 10.4236/njgc.2012.23015
  • Peer Reviewed
• [Journal Article] Development of the ElectromagneticInduction Type Micro Air Turbine Generator Using MEMS and Multilayer Ceramic Technology (2011)
  • Author(s): A. Iiduka, K. Ishigaki, Y. Takikawa,T. Ohse, K. Saito and F. Uchikoba
  • Journal Title: IOP Conf. Ser.: Mater. Sci.Eng. Volume: vol.18 Pages: 92358-92358
  • URL: http://dx.doi.org/10.1088/1757-899X/18/9/092035
  • Peer Reviewed
• [Journal Article] Development of the Electromagnetic Induction Type Micro Air Turbine Generator Using MEMS and Multilayer Ceramic Technology (2011)
  • Author(s): A.Iiduka, K.Ishigaki, Y.Takikawa, T.Ohse, K.Saito, F.Uchikoba
  • Journal Title: 2011 IOP Conf.Ser.:Mater.Sci.Eng. Volume: 18 Issue: 9 Pages: 9235-9235
  • DOI: 10.1088/1757-899x/18/9/092035
  • Peer Reviewed
• [Presentation] 電磁誘導式MEMSエアタービン発電機に用いる積層磁気回路についての検討 (2013)
  • Author(s): 金子真人、遠藤弘彬、片山晃、高藤美泉、齊藤健、内木場文男
  • Organizer: 第27回エレクトロニクス実装学会春季講演大会
  • Place of Presentation: 東北大学(仙台)
• [Presentation] 電磁誘導式MEMSエアタービン発電機に用いる積層磁気回路についての検討 (2013)
  • Author(s): 金子真人、遠藤弘彬、片山晃、高藤美泉、齊藤健、内木場文男
  • Organizer: 第27回エレクトロニクス実装学会 春季講演大会
  • Place of Presentation: 東北大学（仙台）
• [Presentation] 多層セラミックの異型成形と電磁誘導MEMS発電機への応用 (2012)
  • Author(s): 飯塚茜,高藤美泉,金子真人,西達也,藤野敏樹,見持亜樹,内木場文男
  • Organizer: セラミックス基礎科学討論会第50回記念大会
  • Place of Presentation: 東京
  • Year and Date: 2012-01-13
• [Presentation] MultilayerMagnetic Circuit for Millimeter Scale MEMS Air Turbine Generator (2012)
  • Author(s): M. Takato, A. Iizuka, M. Kaneko, T.Nishi, K.Saito, F. Uchikoba
  • Organizer: 2nd International Conference on Competitive Materials andTechnology Process
  • Place of Presentation: ミシュコルツ(ハンガリー)
• [Presentation] Multilayer Magnetic Circuit for Millimeter Scale MEMS Air Turbine Generator (2012)
  • Author(s): M. Takato, A. Iizuka, M. Kaneko, T. Nishi, K. Saito, F. Uchikoba
  • Organizer: 2nd International Conference on Competitive Materials and Technology Process
  • Place of Presentation: ミシュコルツ（ハンガリー）
• [Presentation] 積層セラミック技術を応用したMEMSマイクロ発電機の開発 (2011)
  • Author(s): 飯塚茜,千葉城治,高藤美泉,齊藤健,内木場文男
  • Organizer: 平成23年度電気学会マイクロマシン・センサシステム研究会
  • Place of Presentation: 東工大(東京)
  • Year and Date: 2011-07-15
• [Presentation] 積層セラミック技術を応用したMEMSマイクロ発電機の開発 (2011)
  • Author(s): 飯塚茜, 千葉城治, 高藤美泉, 齊藤健, 内木場文男
  • Organizer: 電気学会マイクロマシン・センサシステム研究会
  • Place of Presentation: 東工大
  • Year and Date: 2011-07-01
• [Presentation] Patterningof Different Materials Inside LTCC GreenSheet Using Photo Resist Film (2011)
  • Author(s): M. Takato and F. Uchikoba
  • Organizer: 2011International Conference on ElectronicsPackaging
  • Place of Presentation: 奈良
  • Year and Date: 2011-04-15
• [Presentation] Patterning of Different Materials Inside LTCC Green Sheet Using Photo Resist Film (2011)
  • Author(s): M.Takato, F.Uchikoba
  • Organizer: 2011 International Conference on Electronics Packaging
  • Place of Presentation: Nara
  • Year and Date: 2011-04-15
• [Presentation] Development of the ElectromagneticInduction Type Micro Air Turbine GeneratorUsing MEMS and Multilayer CeramicTechnology (2010)
  • Author(s): A. Iiduka, K. Ishigaki, Y. Takikawa,T. Ohse, K. Saito, F. Uchikoba
  • Organizer: ICC 3rd International Congress on Ceramics
  • Place of Presentation: 大阪
  • Year and Date: 2010-11-16
• [Presentation] Development of the Electromagnetic Induction Type Micro Air Turbine Generator Using MEMS and Multilayer Ceramic Technology (2010)
  • Author(s): A.Iiduka, K.Ishigaki, Y.Takikawa, T.Ohse, K.Saito, F.Uchikoba
  • Organizer: ICC 3rd International Congress on Ceramics
  • Place of Presentation: 大阪国際会議場(大阪)
  • Year and Date: 2010-11-16
• [Presentation] MEMSとセラミック磁性体を用いた超小型電磁誘導式エアタービン発電機の開発 (2010)
  • Author(s): 飯塚茜、石垣克磨、滝川勇介、大瀬智昭、齊藤健、内木場文男
  • Organizer: マイクロエレクトロニクスシンポジウムMES2010
  • Place of Presentation: 立命館大学(滋賀)
  • Year and Date: 2010-09-10
• [Presentation] MEMSとセラミック磁性体を用いた超小型電磁誘導式エアタービン発電機の開発 (2010)
  • Author(s): 飯塚茜, 石垣克磨, 滝川勇介, 大瀬智昭, 齊藤健, 内木場文男
  • Organizer: マイクロエレクトロニクスシンポジウムMES2010
  • Place of Presentation: 立命館大学(滋賀県)
  • Year and Date: 2010-09-10
• [Remarks]
  • URL: http://www.eme.cst.nihon-u.ac.jp/~uchikoba/