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Research and Development of MEMS Miniaturized Inductive Power Generator with Multilayer Ceramic Magnetic Circuit

Research Project

Project/Area Number 22560254
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionNihon University

Principal Investigator

UCHIKOBA Fumio  日本大学, 理工学部, 教授 (60366557)

Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywordsマイクロ / ナノメカトロニクス / MEMS / 積層セラミック / 発電機 / エアタービン / 電磁誘導 / エアータービン / 磁気回路
Research Abstract

Combining different technical field of MEMS (Micro Electro Mechanical Systems) and multilayer ceramic system, miniaturized air turbine generators of millimeter size was developed. MEMS and multilayer technologies were adopted to the air turbine part and electromagnetic induction part, respectively. We achieved low leak magnetic flux and low internal resistance by developing the multilayer magnetic circuit. The maximum power was 1.53mVA when a spindle air turbine was used with the developed magnetic circuit.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (20 results)

All 2013 2012 2011 2010 Other

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (13 results) Remarks (1 results)

  • [Journal Article] Patterning Technologyof Ferrite and Insulating Material in a Single Layer of the Multilayer Ceramic Device2012

    • Author(s)
      M. Takato, A. Kenmochi, T. Fujino, K.Saito, F.Uchikoba
    • Journal Title

      New Journal of Glass and Ceramics

      Volume: vol.2 Pages: 105-110

    • URL

      http://dx.doi.org/10.4236/njgc.2012.23015

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] MillimeterScale MEMS Air Turbine Generator by Winding Wire and Multilayer Magnetic Ceramic Circuit2012

    • Author(s)
      A. Iizuka, M. Takato, M. Kaneko, T.Nishi, K.Saito, F. Uchikoba
    • Journal Title

      Modern MechanicalEngineering

      Volume: vol.2 Pages: 41-46

    • URL

      http://dx.doi.org/10.4236/mme.2012.22006

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Millimeter Scale MEMS Air Turbine Generator by Winding Wire and Multilayer Magnetic Ceramic Circuit2012

    • Author(s)
      A. Iizuka, M. Takato, M. Kaneko, T. Nishi, K. Saito, F. Uchikoba
    • Journal Title

      Modern Mechanical Engineering

      Volume: 2 Issue: 02 Pages: 41-46

    • DOI

      10.4236/mme.2012.22006

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Patterning Technology of Ferrite and Insulating Material in a Single Layer of the Multilayer Ceramic Device2012

    • Author(s)
      M. Takato, A. Kenmochi, T. Fujino, K. Saito, F. Uchikoba
    • Journal Title

      New Journal of Glass and Ceramics

      Volume: 2 Issue: 03 Pages: 105-110

    • DOI

      10.4236/njgc.2012.23015

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of the ElectromagneticInduction Type Micro Air Turbine Generator Using MEMS and Multilayer Ceramic Technology2011

    • Author(s)
      A. Iiduka, K. Ishigaki, Y. Takikawa,T. Ohse, K. Saito and F. Uchikoba
    • Journal Title

      IOP Conf. Ser.: Mater. Sci.Eng.

      Volume: vol.18 Pages: 92358-92358

    • URL

      http://dx.doi.org/10.1088/1757-899X/18/9/092035

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of the Electromagnetic Induction Type Micro Air Turbine Generator Using MEMS and Multilayer Ceramic Technology2011

    • Author(s)
      A.Iiduka, K.Ishigaki, Y.Takikawa, T.Ohse, K.Saito, F.Uchikoba
    • Journal Title

      2011 IOP Conf.Ser.:Mater.Sci.Eng.

      Volume: 18 Issue: 9 Pages: 9235-9235

    • DOI

      10.1088/1757-899x/18/9/092035

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] 電磁誘導式MEMSエアタービン発電機に用いる積層磁気回路についての検討2013

    • Author(s)
      金子真人、遠藤弘彬、片山晃、高藤美泉、齊藤健、内木場文男
    • Organizer
      第27回エレクトロニクス実装学会春季講演大会
    • Place of Presentation
      東北大学(仙台)
    • Related Report
      2012 Final Research Report
  • [Presentation] 電磁誘導式MEMSエアタービン発電機に用いる積層磁気回路についての検討2013

    • Author(s)
      金子真人、遠藤弘彬、片山晃、高藤美泉、齊藤健、内木場文男
    • Organizer
      第27回エレクトロニクス実装学会 春季講演大会
    • Place of Presentation
      東北大学(仙台)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 多層セラミックの異型成形と電磁誘導MEMS発電機への応用2012

    • Author(s)
      飯塚茜,高藤美泉,金子真人,西達也,藤野敏樹,見持亜樹,内木場文男
    • Organizer
      セラミックス基礎科学討論会第50回記念大会
    • Place of Presentation
      東京
    • Year and Date
      2012-01-13
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] MultilayerMagnetic Circuit for Millimeter Scale MEMS Air Turbine Generator2012

    • Author(s)
      M. Takato, A. Iizuka, M. Kaneko, T.Nishi, K.Saito, F. Uchikoba
    • Organizer
      2nd International Conference on Competitive Materials andTechnology Process
    • Place of Presentation
      ミシュコルツ(ハンガリー)
    • Related Report
      2012 Final Research Report
  • [Presentation] Multilayer Magnetic Circuit for Millimeter Scale MEMS Air Turbine Generator2012

    • Author(s)
      M. Takato, A. Iizuka, M. Kaneko, T. Nishi, K. Saito, F. Uchikoba
    • Organizer
      2nd International Conference on Competitive Materials and Technology Process
    • Place of Presentation
      ミシュコルツ(ハンガリー)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 積層セラミック技術を応用したMEMSマイクロ発電機の開発2011

    • Author(s)
      飯塚茜,千葉城治,高藤美泉,齊藤健,内木場文男
    • Organizer
      平成23年度電気学会マイクロマシン・センサシステム研究会
    • Place of Presentation
      東工大(東京)
    • Year and Date
      2011-07-15
    • Related Report
      2012 Final Research Report
  • [Presentation] 積層セラミック技術を応用したMEMSマイクロ発電機の開発2011

    • Author(s)
      飯塚茜, 千葉城治, 高藤美泉, 齊藤健, 内木場文男
    • Organizer
      電気学会マイクロマシン・センサシステム研究会
    • Place of Presentation
      東工大
    • Year and Date
      2011-07-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] Patterningof Different Materials Inside LTCC GreenSheet Using Photo Resist Film2011

    • Author(s)
      M. Takato and F. Uchikoba
    • Organizer
      2011International Conference on ElectronicsPackaging
    • Place of Presentation
      奈良
    • Year and Date
      2011-04-15
    • Related Report
      2012 Final Research Report
  • [Presentation] Patterning of Different Materials Inside LTCC Green Sheet Using Photo Resist Film2011

    • Author(s)
      M.Takato, F.Uchikoba
    • Organizer
      2011 International Conference on Electronics Packaging
    • Place of Presentation
      Nara
    • Year and Date
      2011-04-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of the ElectromagneticInduction Type Micro Air Turbine GeneratorUsing MEMS and Multilayer CeramicTechnology2010

    • Author(s)
      A. Iiduka, K. Ishigaki, Y. Takikawa,T. Ohse, K. Saito, F. Uchikoba
    • Organizer
      ICC 3rd International Congress on Ceramics
    • Place of Presentation
      大阪
    • Year and Date
      2010-11-16
    • Related Report
      2012 Final Research Report
  • [Presentation] Development of the Electromagnetic Induction Type Micro Air Turbine Generator Using MEMS and Multilayer Ceramic Technology2010

    • Author(s)
      A.Iiduka, K.Ishigaki, Y.Takikawa, T.Ohse, K.Saito, F.Uchikoba
    • Organizer
      ICC 3rd International Congress on Ceramics
    • Place of Presentation
      大阪国際会議場(大阪)
    • Year and Date
      2010-11-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] MEMSとセラミック磁性体を用いた超小型電磁誘導式エアタービン発電機の開発2010

    • Author(s)
      飯塚茜、石垣克磨、滝川勇介、大瀬智昭、齊藤健、内木場文男
    • Organizer
      マイクロエレクトロニクスシンポジウムMES2010
    • Place of Presentation
      立命館大学(滋賀)
    • Year and Date
      2010-09-10
    • Related Report
      2012 Final Research Report
  • [Presentation] MEMSとセラミック磁性体を用いた超小型電磁誘導式エアタービン発電機の開発2010

    • Author(s)
      飯塚茜, 石垣克磨, 滝川勇介, 大瀬智昭, 齊藤健, 内木場文男
    • Organizer
      マイクロエレクトロニクスシンポジウムMES2010
    • Place of Presentation
      立命館大学(滋賀県)
    • Year and Date
      2010-09-10
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.eme.cst.nihon-u.ac.jp/~uchikoba/

    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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