| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2014: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2010: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
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| Outline of Final Research Achievements |
Micro laser-lithography systems were constructed for making sensors and actuators driven photothermally. These sensors and actuators can be fabricated at the side or the cross section of the optical fiber tip. Firstly, vibration type sensor was fabricated, and the amplitude of vibration was measured by vibrating the micro sphere which was holded in liquid by optical trap. It was considered that the viscosity coefficient might be determined in the low frequency region. This value can be also estimated by measuring the velocity of sphere released from the optical trap. Secondly, micro cleaner was fabricated. It was pointed out that the longer pipe was effective. Thirdly, micro twizzers, micro gripper, longitudinal vibration type actuator and fan-shaped cantilever were fabricated. Their usefulness was evaluated by measuring the displacement of them driven photothermally.
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