Development of guided-wave optical sensors with a micromechanical structure and its design support system
| Project/Area Number |
22560322
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Niigata University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
SATO Takashi 新潟大学, 自然科学系, 教授 (10143752)
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| Co-Investigator(Renkei-kenkyūsha) |
NIKKUNI Hiroyuki 東京工業高等専門学校, 電気工学科, 助教 (90547829)
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2010: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
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| Keywords | 光デバイス / 光回路 / 光導波型センサ / 光集積回路 / マイクロマシン / 光導波路 / ＭＯＥＭＳ / 設計 / MOEMS |
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| Research Abstract |
In order to establish design guidelines for guided-wave optical sensors with a micromechanical structure, sensitivity dependences on waveguide position, diaphragm dimensions and so on were determined by theoretical and experimental examinations. Also, regarding an effect of squeeze-film air damping in guided-wave optical microphones, damping ratio was found to increase as air-film thickness decreased, similar to the rough theoretical prediction. Moreover, for guided-wave optical pressure and flow sensors, desktop and web applications to design waveguide and diaphragm were developed, based on our theoretical and experimental results of each sensor.
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Report
(4 results)
Research Products
(27 results)
