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Development of ZnO-based transistors operated in gigahertzfrequency range

Research Project

Project/Area Number 22560353
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionOsaka Institute of Technology

Principal Investigator

SASA Shigehiko  大阪工業大学, 工学部, 教授 (50278561)

Co-Investigator(Kenkyū-buntansha) MAEMOTO Toshihiko  大阪工業大学, 工学部, 准教授 (80280072)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywords酸化亜鉛 / マイクロ波 / 遮断周波数 / ギガヘルツ
Research Abstract

We developed high-performance ZnO-based FETs operated in gigahertz frequency range. First, a hetero-MIS transistor was employed to exhibit high-frequency performance. A very high cutoff frequency of as high as 1.7 GHz was obtained. Sputter-deposited ZnO thin-film transistors were proved to exhibit comparable high-frequency performance by measuring their static performance.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (28 results)

All 2012 2011 2010 Other

All Journal Article (19 results) (of which Peer Reviewed: 16 results) Presentation (8 results) Remarks (1 results)

  • [Journal Article] Effects of post annealing on IZO thin-film transistor characteristics2012

    • Author(s)
      R. Morita, T. Maemoto, and S. Sasa
    • Journal Title

      2012 Int. Mtg. for Future of Electron Devices Kansai (IMFEDK)

      Pages: 118-119

    • DOI

      10.1109/imfedk.2012.6218610

    • Related Report
      2012 Final Research Report
  • [Journal Article] 高性能酸化亜鉛系FETと酸化物デバイス応用の広がり2012

    • Author(s)
      佐々誠彦,矢野満明,前元利彦,小池一歩,尾形健一
    • Journal Title

      電子情報通信学会誌

      Volume: Vol.95-4 Pages: 289-293

    • NAID

      110009437460

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 高性能酸化亜鉛系 FET と酸化物デバイス応用の広がり2012

    • Author(s)
      佐々誠彦,矢野満明,前元利彦,小池一歩,尾形健一
    • Journal Title

      電子情報通信学会誌

      Volume: 95 Pages: 289-293

    • NAID

      110009437460

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of Zinc Oxide Nanorods Via Aqueous Solution Process and Their Application for Biosensors2011

    • Author(s)
      尾形,土橋,小池,佐々,井上,矢野
    • Journal Title

      Journal of the Society of Materials Science, Japan

      Volume: 60 Issue: 11 Pages: 976-982

    • DOI

      10.2472/jsms.60.976

    • NAID

      130001396964

    • ISSN
      0514-5163, 1880-7488
    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Irradiation Effect of 8MeV Protons on Single-Crystalline Zinc Oxide Films2011

    • Author(s)
      小池,天野,青木,藤本,佐々,矢野,權田,石神,久米
    • Journal Title

      Journal of the Society of Materials Science, Japan

      Volume: 60 Issue: 11 Pages: 988-993

    • DOI

      10.2472/jsms.60.988

    • NAID

      130001396966

    • ISSN
      0514-5163, 1880-7488
    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effects of N and P ion-implantation and post-annealing on single-crystalline ZnO films2011

    • Author(s)
      T. Aoki, R. Fujimoto, K. Koike, S. Sasa, M.Yano, S. Nagamachi, and K. Yoshida
    • Journal Title

      30th Electronic Materials Symposium

      Pages: 287-288

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Irradiation effect of 8 MeV protons on single-crystalline zinc oxide2011

    • Author(s)
      T. Aoki, R. Fujimoto, K. Koike, S. Sasa, M.Yano, S. Gonda, R. Ishigami, and K. Kume
    • Journal Title

      Proc. of Int. Meeting for Future of Electron Devices

      Pages: 88-89

    • DOI

      10.1109/imfedk.2011.5944858

    • Related Report
      2012 Final Research Report
  • [Journal Article] Radiation-proof characteristic ofZnO/ZnMgO HFETs2011

    • Author(s)
      T. Yabe, T. Aoki, T. Higashiyama, K. Koike, S. Sasa, M. Yano, S. Gonda, R. Ishigami, K. Kume
    • Journal Title

      Proc. of Int. Meeting for Future of Electron Devices

      Pages: 90-91

    • DOI

      10.1109/imfedk.2011.5944859

    • Related Report
      2012 Final Research Report
  • [Journal Article] Flexible Zinc Oxide Thin-Film Transistors using Oxide buffer layers on Polyethylene Napthalate Substrates2011

    • Author(s)
      T.Higaki, T.Tachibana, Y.Kimura, T.Maemoto, S.Sasa, M.Inoue
    • Journal Title

      Proceedings of the 2011 International Meeting for Future of Electron Devices

      Pages: 92-93

    • DOI

      10.1109/imfedk.2011.5944860

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of ZnO Transistors and Their Application to Bio-Sensors2011

    • Author(s)
      矢野満明, 小池一歩, 佐々誠彦, 前元利彦, 井上正崇
    • Journal Title

      Journal of the Society of Materials Science, Japan

      Volume: 60 Issue: 5 Pages: 447-456

    • DOI

      10.2472/jsms.60.447

    • NAID

      130000861066

    • ISSN
      0514-5163, 1880-7488
    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Microwave performance of ZnO/ZnMgO heterostructure field effect transistors2011

    • Author(s)
      S. Sasa, T. Maitani, Y. Furuya, T. Amano, K.Koike, M. Yano, and M. Inoue
    • Journal Title

      Phys. Status Solidi A208

      Volume: 208 Issue: 2 Pages: 449-452

    • DOI

      10.1002/pssa.201000509

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 酸化亜鉛トランジスターの開発とバイオセンサー応用2011

    • Author(s)
      矢野満明, 小池一歩, 佐々誠彦, 前元利彦, 井上正崇
    • Journal Title

      材料

      Volume: 60 Pages: 447-456

    • NAID

      130000861066

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Flexible zinc oxide thin-film transistors using oxide buffer layers on polyethylene napthalate Substrates2011

    • Author(s)
      T.Higaki, T.Tachibana, Y.Kimura, T.Maemoto, S.Sasa, M.Inoue
    • Journal Title

      Proc.of International Meeting for Future of Electron Devices

      Pages: 92-93

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Radiation-proof characteristic of ZnO/ZnMgO HFETs2011

    • Author(s)
      T.Yabe, T.Aoki, T.Higashiyama, K.Koike, S.Sasa, M.Yano, S.Gonda, R.Ishigami, K.Kume
    • Journal Title

      Proc.of International Meeting for Future of Electron Devices

      Pages: 90-91

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Irradiation effect of 8MeV protons on single-crystalline zinc oxide2011

    • Author(s)
      T.Aoki, R.Fujimoto, K.Koike, S.Sasa, M.Yano, S.Gonda, R.Ishigami, K.Kume
    • Journal Title

      Proc.of International Meeting for Future of Electron Devices

      Pages: 88-89

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of N and P ion-implantation and post-annealing on single-crystalline ZnO films2011

    • Author(s)
      T.Aoki, R.Fujimoto, K.Koike, S.Sasa, M.Yano, S.Nagamachi, K.Yoshida
    • Journal Title

      30th Electronic Materials Sympo

      Pages: 287-288

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 水溶液プロセスによる酸化亜鉛ナノロッドの製作とバイオセンサへの応用2011

    • Author(s)
      尾形, 土橋, 小池, 佐々, 井上, 矢野
    • Journal Title

      材料

      Volume: 60 Pages: 976-982

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 単結晶酸化亜鉛薄膜に対する8MeVプロトンの照射効果2011

    • Author(s)
      小池, 天野, 青木, 藤本, 佐々, 矢野, 權田, 石神, 久米
    • Journal Title

      材料

      Volume: 60 Pages: 988-993

    • NAID

      130001396966

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microwave performance of ZnO/ZnMgO heterostructure field effect transistors2011

    • Author(s)
      佐々誠彦
    • Journal Title

      Physica Status Solidi A

      Volume: 208 Pages: 449-452

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] フレキシブル酸化亜鉛透明薄膜トランジスタの開発2012

    • Author(s)
      孫屹,木村祐太,前元利彦,佐々誠彦
    • Organizer
      電気材料技術懇談会
    • Place of Presentation
      大阪
    • Year and Date
      2012-07-12
    • Related Report
      2012 Final Research Report
  • [Presentation] Microwave Performance ofZnO/ZnMgO HFETs2012

    • Author(s)
      S. Sasa
    • Organizer
      Int. Symp. onCompound Semiconductors
    • Place of Presentation
      Takamatsu
    • Year and Date
      2012-06-02
    • Related Report
      2012 Final Research Report
  • [Presentation] Effects of post annealing on IZO thin-film transistor characteristics2012

    • Author(s)
      R. Morita, T. Maemoto, and S. Sasa
    • Organizer
      2012 Int. Mtg. for Future of Electron Devices, Kansai (IMFEDK)
    • Place of Presentation
      Osaka
    • Year and Date
      2012-05-10
    • Related Report
      2012 Final Research Report
  • [Presentation] Zinc oxide-based biosensors2011

    • Author(s)
      M. Yano, K. Koike, K. Ogata, T. Nogami, S.Tanabe, S.
    • Organizer
      16th Semiconducting and Insulating Materials Conference
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2011-06-22
    • Related Report
      2012 Final Research Report
  • [Presentation] Zinc oxide-based biosensors2011

    • Author(s)
      M.Yano, K.Koike, K.Ogata, T.Nogami, S.Tanabe, S.Sasa
    • Organizer
      16^<th> Semiconducting and insulating Materials Conference (SIMC)
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2011-06-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] Microwave Performance of ZnO/ZnMgO HFETs2010

    • Author(s)
      佐々誠彦
    • Organizer
      Int.Symp.on Compound Semiconductors
    • Place of Presentation
      高松シンボルタワー(高松市)(招待講演)
    • Year and Date
      2010-06-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] フレキシブル酸化亜鉛透明薄膜トランジスタの開発

    • Author(s)
      孫屹,木村祐太,前元利彦,佐々誠彦
    • Organizer
      電気材料技術懇談会
    • Place of Presentation
      大阪市中央電気倶楽部(大阪)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Effects of post annealing on IZO thin-film transistor characteristics

    • Author(s)
      R. Morita, T. Maemoto, and S. Sasa
    • Organizer
      2012 International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      関西大学100周年記念会館(大阪)
    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.oit.ac.jp/www-ee/server/semicon/01_People.shtml

    • Related Report
      2012 Final Research Report

URL: 

Published: 2010-08-23   Modified: 2019-07-29  

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