Direct patterningof oxide films by coplanar type surface discharge
| Project/Area Number |
22560719
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Material processing/treatments
|
|---|
| Research Institution | Shizuoka University |
|---|
Principal Investigator |
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
MURAKAMI Kenji 静岡大学, 電子工学研究所, 准教授 (30182091)
|
|---|
| Project Period (FY) |
2010 – 2012
|
| Project Status |
Completed (Fiscal Year 2012)
|
| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2010: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
|
|---|
| Keywords | 沿面放電 / プラズマ / 薄膜 / 酸化亜鉛 / 製膜 / 酸化スズ / 平面プラズマ / ダイレクトパターニング |
|---|
| Research Abstract |
Various techniques to prepare thin films have been reported during the decades. However, most of them basically require a high substrate temperature and/or a vacuum process. A novel thin film synthesis technique at low substrate temperature under ambient pressure should be developed. We focused on a coplanar surface discharge technique to meet the demand. Coplanar surface discharge is categorized to a dielectric barrier discharge in which high-energy plasma runs on the surface of an insulating substrate. In this study, we developed a coplanar surface discharge technique to prepare zinc oxide films.
|
Report
(4 results)
Research Products
(67 results)
