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Fabrication of oxide nanostructures using electron beaminduced deposition and their physical properties

Research Project

Project/Area Number 22560727
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionShibaura Institute of Technology (2011-2012)
Saitama Institute of Technology (2010)

Principal Investigator

SHIMOJO Masayuki  芝浦工業大学, 工学部, 教授 (00242313)

Co-Investigator(Renkei-kenkyūsha) MITSUISHI Kazutaka  物質材料研究機構, 量子ドットセンター, 主幹研究員 (40354328)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2010: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Keywordsナノプロセス / ナノワイヤー / ナノセンサー / 材料加工・処理 / ナノ材料 / 電子顕微鏡 / センサー
Research Abstract

Electron beam induced deposition (EBID) is one of the promising techniques to produce position-controlled nanometer-sized structures with high flexibility in their shape. In this process, an organometallic compound gas or vapor is decomposed by electron beam and the non-volatile part of the decomposed gas is deposited on substrates. In this research, oxide and gold nanostructures were fabricated using EBID and the photoconductive properties were studied on molybdenum oxide nanostructures.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (21 results)

All 2012 2011 2010

All Journal Article (9 results) (of which Peer Reviewed: 9 results) Presentation (10 results) Book (2 results)

  • [Journal Article] Optical and electrical Kerr effects in polydiacetylene nanoparticle submonolayer probed by surface plasmon resonance spectroscopy2012

    • Author(s)
      O. Kuraishi, D. Tanaka, M. Shimojo and K. Kajikawa
    • Journal Title

      J. Phys. D

      Volume: 45 Issue: 23 Pages: 235105-235105

    • DOI

      10.1088/0022-3727/45/23/235105

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Three-dimensional observation of SiO2 hollow spheres with a double-shell structure using aberration-corrected scanning confocal electron microscopy2012

    • Author(s)
      X. Zhang, M. Takeguchi, A. Hashimoto, K. Mitsuishi, P. Wang, P. D. Nellist, A. I. Kirkland, M. Tezuka and M. Shimojo
    • Journal Title

      J. Electron Microsc

      Volume: 61, 3 Issue: 3 Pages: 159-169

    • DOI

      10.1093/jmicro/dfs039

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Three-dimensional analysis of nanoparticles on carbon support using aberration-corrected scanning confocal electron microscopy2012

    • Author(s)
      A. Hashimoto
    • Journal Title

      Appl. Phys. Lett.

      Volume: 101 Issue: 25

    • DOI

      10.1063/1.4772514

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Phase of the electric field localized at surface-immobilized gold nanospheres determined by second-harmonic interferometry2011

    • Author(s)
      T. Yamaguchi, H. Okawa, K. Hashimoto, M. Shimojo and K. Kajikawa
    • Journal Title

      Phys. Rev. B

      Volume: 83 Issue: 8 Pages: 85425-85425

    • DOI

      10.1103/physrevb.83.085425

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing2011

    • Author(s)
      X. Zhang, M. Takeguchi, A. Hashimoto, K. Mitsuishi and M. Shimojo
    • Journal Title

      Mater. Sci. Forum

      Volume: 675-677 Pages: 259-262

    • DOI

      10.4028/www.scientific.net/msf.675-677.259

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Micropatterning of polydiacetylene nanoparticle monolayer based on ultraviolet or electron beam polymerization2011

    • Author(s)
      D. Tanaka, H. Karube, M. Shimojo and K. Kajikawa
    • Journal Title

      Appl. Phys. Express

      Volume: 4 Issue: 12 Pages: 121604-121604

    • DOI

      10.1143/apex.4.121604

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical response of gold-nanoparticle-amplified surface plasmon resonance spectroscopy2010

    • Author(s)
      Y. Uchiho, M. Shimojo, K. Furuya and K. Kajikawa
    • Journal Title

      J. Phys. Chem. C

      Volume: 114 Issue: 11 Pages: 4816-4824

    • DOI

      10.1021/jp910438q

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electro-optic effect and optical rectification in gold nanoparticles immobilized above a gold surface2010

    • Author(s)
      Y. Uchiho, M. Shimojo and K. Kajikawa
    • Journal Title

      J. Phys. D

      Volume: 43 Issue: 49 Pages: 495101-495101

    • DOI

      10.1088/0022-3727/43/49/495101

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electro-optic effect and optical rectification in gold nanoparticles immobilized above a gold surface2010

    • Author(s)
      Y.Uchiho, M.Shimojo, K.Kajikawa
    • Journal Title

      J.Phys.D

      Volume: 43 Pages: 495101-495101

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] 電子顕微鏡を利用したナノ構造作製2012

    • Author(s)
      下条雅幸、三石和貴、竹口雅樹
    • Organizer
      表面技術協会ナノテク部会第46回研究会
    • Place of Presentation
      東京
    • Year and Date
      2012-08-07
    • Related Report
      2012 Final Research Report
  • [Presentation] Deposition of magnetic and photoconductive nanostructures2012

    • Author(s)
      M. Shimojo, K. Mitsuishi and M. Takeguchi
    • Organizer
      4th Focused Electron Beam Induced Processing Workshop (FEBIP 2012)
    • Place of Presentation
      Zaragoza, Spain
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Optical rectification and electro-optic effect of plasmonic metamolecule2012

    • Author(s)
      Y. Uchiho, M. Shimojo and K. Kajikawa
    • Organizer
      5th International Conference on Surface Plasmon Photonics (SPP5)
    • Place of Presentation
      Busan, Korea
    • Related Report
      2012 Final Research Report
  • [Presentation] Selected immobilization of gold and silver nanoparticles by electron beam induced deposition2012

    • Author(s)
      S. Abe
    • Organizer
      4th Focused Electron Beam Induced Processing Workshop (FEBIP 2012)
    • Place of Presentation
      Zaragoza, Spain
    • Related Report
      2012 Annual Research Report
  • [Presentation] 電子顕微鏡を利用したナノ構造作製2012

    • Author(s)
      下条雅幸
    • Organizer
      表面技術協会 ナノテク部会 第46回研究会
    • Place of Presentation
      東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] PDAナノ結晶の光・電子線リソグラフィー2011

    • Author(s)
      田中大輔、倉石央騎、下条雅幸、梶川浩太郎
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Final Research Report
  • [Presentation] Optical rectification and electro-optic effect of plasmonic metamolecule2011

    • Author(s)
      Y.Uchiho, M.Shimojo, K.Kajikawa
    • Organizer
      5th International Conference on Surface Plasmon Photonics
    • Place of Presentation
      Korea
    • Related Report
      2011 Annual Research Report
  • [Presentation] Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing2010

    • Author(s)
      X. B. Zhang, M. Takeguchi, A. Hashimoto, K. Mitsuishi and M. Shimojo
    • Organizer
      7th International Forum on Advanced Material Science and Technology (IFAMST-7)
    • Place of Presentation
      Dalian, China
    • Related Report
      2012 Final Research Report 2010 Annual Research Report
  • [Presentation] 表面プラズモン共鳴を利用したPDAナノ結晶のKerr効果の測定2010

    • Author(s)
      倉石央騎、田中大輔、下条雅幸、梶川浩太郎
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎
    • Related Report
      2012 Final Research Report
  • [Presentation] 電子線誘起蒸着により作製した酸化モリブデンナノワイヤーの光伝導特性2010

    • Author(s)
      下条雅幸、牧瀬圭正、三石和貴、竹口雅樹
    • Organizer
      日本顕微鏡学会 第66回学術講演会
    • Place of Presentation
      名古屋
    • Related Report
      2012 Final Research Report
  • [Book] Nanofabrication using electron beam induced deposition technique; Encyclopedia of Nanoscience and Nanotechnology2011

    • Author(s)
      M. Shimojo, K. Mitsuishi, M. Takeguchi, M. Tanaka and K. Furuya
    • Publisher
      H. S. Nalwa ed., American Scienctific Publishers, USA
    • Related Report
      2012 Final Research Report
  • [Book] Encyclopedia of Nanoscience and Nanotechnologyのvolume 172011

    • Author(s)
      M.Shimojo, K.Mitsuishi, M.Takeguchi, M.Tanaka, K.Furuya
    • Total Pages
      22
    • Publisher
      American Scientific Publishers, USA
    • Related Report
      2011 Annual Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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