The study of treatment method of hydrophilic polyurea thin film for medical and biotechnologies.

• Project/Area Number: 22560730
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Waseda University
• Principal Investigator: MIZUNO Jun 早稲田大学, ナノ理工学研究機構, 准教授 (60386737)
• Co-Investigator(Kenkyū-buntansha): 篠原 秀敏 早稲田大学, 理工学術院, 助手 (20533095)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
• Keywords: 表面 / 界面制御 / マイクロ流路 / 接合 / 低温処理 / 薄膜 / 界面

Research Abstract

In this study, we developed hydrophilic polyurea thin film using vacuum evaporate polymerization and vacuum ultraviolet irradiation method and we used it for low temperature bonding layer of bio devices.
Then, we succeed in keeping hydrophilic surface for 2 month in atmosphere and getting 1.0 Mpa bonding strength.

Research Products

• [Journal Article] Fabrication and Surface Modification of Flat Lignocellulosic Carbon Materials (2013)
  • Author(s): T. Funabashi, M. Sato, M. Kitajima, S. Shoji, J. Mizuno
  • Journal Title: Japanese Journal of Applied Physics Rapd Communication Volume: 52 Pages: 1203-1203
  • NAID: 210000141714
  • Peer Reviewed
• [Journal Article] Integrated Channel Selector for Directing Fluid Flow Using Thermoreversible Gelation Controlled by a Digital Mirror Device (2013)
  • Author(s): Y. Shirasaki, M. Goto, M. Yamagishi, H. Sugino, T. Arakawa, J. Mizuno, S. Shoji, T. Funatsu, O. Ohara
  • Journal Title: Journal of Sensorsvol. Volume: 2013 Pages: 61-61
  • DOI: 10.1155/2013/436492
  • Peer Reviewed
• [Journal Article] Fabrication and Surface Modification of Flat Lignocellulosic Cabon Materials (2013)
  • Author(s): T. Funabashi, M. Sato, M. Kitajima, S. Shoji, J. Mizuno
  • Journal Title: Japanese Jounal of Applied Physics Rapd Communication Volume: 52 Issue: 1R Pages: 010203-010203
  • DOI: 10.7567/jjap.52.010203
  • Peer Reviewed
• [Journal Article] Nano Pattern Stiching Process using Two Step Nanoimprint Lithography (2012)
  • Author(s): K. Ishibashi, H. Goto, S. Shoji, J. Mizuno
  • Journal Title: Journal of Photopolymer Science and Technology Volume: 2012 Pages: 235-238
  • Peer Reviewed
• [Journal Article] Large Area Nano Pattern Fabrication Using Improved Step and Repeat UV Nanoimprint (2012)
  • Author(s): K. Ishibashi, H. Goto, T. Kasahara, J. Mizuno, S. Shoji
  • Journal Title: Journal of Photopolymer Science and Technology Volume: 25 Issue: 2 Pages: 235-238
  • DOI: 10.2494/photopolymer.25.235
  • NAID: 130004833444
  • ISSN: 0914-9244, 1349-6336
  • Peer Reviewed
• [Journal Article] Development of a Roll Press UV Imprint Process for Replication of Microstructures on a Large and Thin Quartz Substrate (2012)
  • Author(s): M. Okubo, Y. Tsutsui, K. Ishibashi, L. Li, S. Shoji, J. Mizuno, Y. Yanagisawa
  • Journal Title: Journal of Photopolymer Science and Technology Volume: 25 Issue: 2 Pages: 229-234
  • DOI: 10.2494/photopolymer.25.229
  • NAID: 130004833443
  • ISSN: 0914-9244, 1349-6336
  • Peer Reviewed
• [Journal Article] Integration of pillar array columns into a gradient elution system for pressure-driven liquid chromatography (2012)
  • Author(s): Y. Song, M. Noguchi, K. Takatsuki, T. Sekiguchi, J. Mizuno, T. Funatsu, S. Shoji, M. Tsunoda
  • Journal Title: Anal Chem. Volume: 84( Issue: 11 Pages: 4739-4745
  • DOI: 10.1021/ac3001836
  • Peer Reviewed
• [Journal Article] Biochip Applications of DLC Films on a Resin Material (2012)
  • Author(s): S. Murata, S. Ito, J. Mizuno, K. Hirakuri, H. Sakamoto, S. Masuko, K. Sato, N. Fukata, F. Shizuku, S. Shoji
  • Journal Title: Physica Status Solid Volume: C9 Issue: 6 Pages: 1439-1442
  • DOI: 10.1002/pssc.201100655
  • Peer Reviewed
• [Journal Article] シリコンチップの新接合技術 (2012)
  • Author(s): 水野潤，佐久間克幸，宇波奈保子，仁村将次，庄子習一
  • Journal Title: スマートプロセス学会誌 Volume: 1 Pages: 120-125
  • NAID: 10030922143
  • Peer Reviewed
• [Journal Article] Surface modification of polyethylene terephthalate (PET) by VUV and VUV/O3 treatments (2012)
  • Author(s): T. Kasahara, S. Shoji, J. Mizuno
  • Journal Title: Transactions of The Japan Institute of Electronics Packaging Volume: 5 Pages: 47-54
  • Peer Reviewed
• [Journal Article] Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting (2012)
  • Author(s): K. Ishibashi, H. Goto, J. Mizuno, S. Shoji
  • Journal Title: Journal of Nanotechnology Volume: 2012 Pages: 9-9
  • DOI: 10.1155/2012/103439
  • Peer Reviewed
• [Journal Article] 三次元ＬＳＩに向けたはんだと接着のハイブリッド接合技術と表面処理技術 (2012)
  • Author(s): 仁村将次、佐久間克幸、庄子習一、水野潤
  • Journal Title: 電子情報通信学会論文誌 Volume: 95 Pages: 296-303
  • Peer Reviewed
• [Journal Article] XPS and NEXAFS Studies of VUV/03-Treated Aromatic Polyurea and its Application to Microchip Electrophoresis (2011)
  • Author(s): H.Shinohara, A.Nakahara, F.Kitagawa, Y.Takahashi, K.Otsuka, 他3名
  • Journal Title: IET Volume: 5 Issue: 4 Pages: 136-142
  • DOI: 10.1049/iet-nbt.2011.0006
  • Peer Reviewed
• [Journal Article] Studies on Low-Temperature Direct Bonding of VUV/03-, VUV- and 02 Plasma-Pre-Treated Poly-Methylmethacrylate (2011)
  • Author(s): H.Shinohara, T.Kasahara, S.Shoji, J.Mizuno
  • Journal Title: Journal of Micromechanics and Microengineering Volume: 21
  • Peer Reviewed
• [Journal Article] Studies on low-temperature direct bonding of VUV, VUV/03 and 02 plasma pretreated cycloolefin polymer (2011)
  • Author(s): H.Shinohara, J.Mizuno, S.Shoji
  • Journal Title: Sensors and Actuators A Volume: 165 Issue: 1 Pages: 124-131
  • DOI: 10.1016/j.sna.2010.04.006
  • Peer Reviewed
• [Journal Article] Fabrication of high-aspect-ratio amorphous perfluorinated polymer structure for total in ternal reflection fluorescence microscopy (2011)
  • Author(s): A.Nakahara, Y.Shirasaki, K.Kawai, O.Ohara, J.Mizuno
  • Journal Title: Microelectronic Engineering Volume: 88 Issue: 8 Pages: 1817-1820
  • DOI: 10.1016/j.mee.2011.02.117
  • Peer Reviewed
• [Journal Article] Integrated Hydrophilic Surface Treatment System of Vapor Deposition Polymerization and Vacuum Ultraviolet Irradiation for Chemical/Biochemical Microchips (2011)
  • Author(s): H.Shinohara, T.Hori, S.Umeda, Y.Takahashi, S.Shoji, 他2名
  • Journal Title: Microelectronic Engineering 88 Volume: 88 Issue: 8 Pages: 2751-2754
  • DOI: 10.1016/j.mee.2011.01.060
  • Peer Reviewed
• [Journal Article] Anti-Sticking Curing of Fluorinated Polymers for Improvement of Mold Releasability (2011)
  • Author(s): J.Mizuno, L.Li, Y.Kawaguchi, K.Tsunozaki, H.Shinohara, S.Shoji
  • Journal Title: Journal of Photopolymer Science and Technology Volume: 24 Issue: 1 Pages: 89-93
  • DOI: 10.2494/photopolymer.24.89
  • NAID: 130004464877
  • ISSN: 0914-9244, 1349-6336
  • Peer Reviewed
• [Journal Article] Compound Nanoimprint Processes and Their Applications for Devices (2010)
  • Author(s): J.Mizuno, H.Shinohara
  • Journal Title: IEEJ Transactions on Sensors and Micromachines Volume: 130 Issue: 8 Pages: 343-346
  • DOI: 10.1541/ieejsmas.130.343
  • NAID: 10026498086
  • ISSN: 1341-8939, 1347-5525
  • Peer Reviewed
• [Journal Article] Au-Electrode-Embededd Cyclo-Olefin Polymer Microchip Using Low-Temperature Direct Bonding (2010)
  • Author(s): Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji
  • Journal Title: 2010 The Institute of Electrical Engineers of Japan Volume: Vol.130, No.8 Pages: 347-350
  • Peer Reviewed
• [Presentation] Multi-color microfluidic organic light emitting device using electroluminescence and electrochemiluminescence (2013)
  • Author(s): T. Kasahara, J. Mizuno, S. Hirata, T. Edura, S. Matsunami, C. Adachi , and S. Shoji
  • Organizer: the 26th International Conference on Micro Electro Mechanical Systems (MEMS) 2013
  • Place of Presentation: Taiwan
• [Presentation] Simple and High-Throughput Fabrication of Large-Area and Multilayer Flexible Polymer Film Structures For Microfluidic Organic Light Emitting Diode (2013)
  • Author(s): M. Tsuwaki, J. Mizuno, T. Kasahara, T. Edura, S. Matsunami, J. Oshima, C. Adachi, and S. Shoji
  • Organizer: the 26th International Conference on Micro Electro Mechanical Systems (MEMS) 2013
  • Place of Presentation: Taiwan
• [Presentation] Simple Through Silicon Interconnect via Fabrication Using Dry Filling of Sub-Micron Au Particles for 3D MEMS (2013)
  • Author(s): K. Shih, M. Nimura, Y. Kanehira, T. Ogashiwa, J. Mizuno, S. Shoji
  • Organizer: the 26th International Conference on Micro Electro Mechanical Systems (MEMS) 2013
  • Place of Presentation: Taiwan
• [Presentation] MEMS LC Microchip with Low Dispersion and Low Pressure Drop Turn Structure Using Distribution Controlled Micro Pillar Array (2013)
  • Author(s): K. Takatsuki, M. Isokawa, Y. Song, A. Nakahara, D.H. Yoon, T. Sekiguchi, J. Mizuno, T. Funatsu, M. Tsunoda, S. Shoji
  • Organizer: the 26th International Conference on Micro Electro Mechanical Systems (MEMS) 2013
  • Place of Presentation: Taiwan
• [Presentation] Study of Surface Treatment Process Using VUV/O3 Treatment for Au0Au Flip Chip Bonding (2012)
  • Author(s): J. Mizuno, A. Okada, M. Nimura, N. Unami, A. Shigetou, H. Noma, K. Sakuma, S. Shoji
  • Organizer: The 5th International Symposium on Designing, Processing and Properties of Advanced Engineering Materials ISAEM-2012 and The 3rd Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials AMDI-3
  • Place of Presentation: Toyohashi
  • Year and Date: 2012-11-06
• [Presentation] Surface Modification of Poly ethylene terephthalate (PET) by VUV and VUV/O3 Treatments for Flexible Capacitive Tactile Sensors (2012)
  • Author(s): T. Kasahara, S. Shoji, J. Mizuno
  • Organizer: International Conference on Electronics Packaging and IMAPS All Asia Conference (ICEP-IAAC 2012)
  • Place of Presentation: Tokyo
  • Year and Date: 2012-04-19
• [Presentation] Using Nano-Porous Au-Ag Sheets for Low-Temperature Au-Au Bonding (2012)
  • Author(s): H. Mimatsu, T. Kasahara, S. Shoji, H. Nishikawa, and J. Mizuno
  • Organizer: IEEE CPMT Symposium Japan 2012
  • Place of Presentation: 京都
• [Presentation] Low Temperature Bonding Using Sub-micron Au Particles for Wafer-level MEMS Packaging (2012)
  • Author(s): S. Ito, J. Mizuno, H. Ishida, T. Ogashiwa, Y. Kanehira, H. Murai, F. Wakai, S. Shoji
  • Organizer: IEEE CPMT Symposium Japan 2012
  • Place of Presentation: 京都
• [Presentation] Fabrication and Basic Investigation of Flat Lignocellulosic Carbon Material for Self-Supporting Electrodes in Electric Double-Layer Capacitors (2012)
  • Author(s): T. Funabashi, M. Sato, M. Kitajima, J. Mizuno, S. Shoji
  • Organizer: 2012 MRS (Materials Research Society) Fall Meeting
  • Place of Presentation: Boston, Massachusetts, USA
• [Presentation] Development of Planar Type Fabrication Process with Ni-Nb-Zr-H Amorphous Alloy Thin Films and Measurement od Its Electric Capacity (2012)
  • Author(s): T. Sasaki, T. Sekiguchi, M. Saito, J. Mizuno, T. Takeuchi, I. Yuito, Y. Nozaki, K. Kato, S. Yamaura, R. Umetsu, H. Kawarada
  • Organizer: TISAEM-2012 and AMDI-3
  • Place of Presentation: 豊橋
• [Presentation] Low Dispersion and Low Pressure Drop Turn Structure Using Distribution Controlled Micro Pillar Array (2012)
  • Author(s): T. Sekiguchi, K. Takatsuki, M. Noguchi, D.H. Yoon, J. Mizuno, S. Shoji
  • Organizer: TISAEM-2012 and AMDI-3
  • Place of Presentation: 豊橋
• [Presentation] Study of Surface Treatment Process Using VUV/O3 Treatment for Au0Au Flip Chip Bonding (2012)
  • Author(s): J. Mizuno, A. Okada, M. Nimura, N. Unami, A. Shigetou, H. Noma, K. Sakuma, S. Shoji
  • Organizer: TISAEM-2012 and AMDI-3
  • Place of Presentation: 豊橋
• [Presentation] Study of Hybrid Solder-Adhesive Binding Using Resin Planarization Technique for 3DIC (2012)
  • Author(s): J. Mizuno, M. Nimura, K. Sakuma, H. Ogino, T. Enomoto, A. Shigetou, S. Shoji
  • Organizer: TISAEM-2012 and AMDI-3
  • Place of Presentation: 豊橋
• [Presentation] Effect of the Hydrogen Absorption on the Electrical Transport Properties for Ni36Nb24Zr40 Amorphous Ribbon (2012)
  • Author(s): R. Umetsu, H. Yoshida, M. Fukuhara, S. Yamaura, M. Matsuura, T. Sasaki, T. Sekiguchi, M. Saito, J. Mizuno, K. Kawarada
  • Organizer: TISAEM-2012 and AMDI-3
  • Place of Presentation: 豊橋
• [Presentation] Effect of Surface Conditions on Wetting Behavior of Sn-30.Ag-0.5Cu Solder on Cu-Baseda Bulk Metallic Glass (2012)
  • Author(s): H. Nishikawa, T. Naoi, M. Saito, J. Mizuno, M. Fukuhara
  • Organizer: TISAEM-2012 and AMDI-3
  • Place of Presentation: 豊橋
• [Presentation] Direct Observation of Sintering of Au Sub-Micron Particles at Low-Temperatures (2012)
  • Author(s): H. Suzuki, Y. Shinoda, T. Akatsu, F. Wakai, J. Mizuno, T. Ogashiwa
  • Organizer: TISAEM-2012 and AMDI-3
  • Place of Presentation: 豊橋
• [Presentation] Bonding properties of low-temperature wafer bonding sub-micron gold particles with different particle sizes (2012)
  • Author(s): H. Ishida, T. Ogashiwa, Y. Kanehira, T. Yazaki, S. Shoji, J. Mizuno
  • Organizer: IMPACT2012
  • Place of Presentation: Taipei,Taiwan
• [Presentation] GaN lateral overgrowth by HVPE through nanometer-size channels fabricated with nanoimprint lithograph (2012)
  • Author(s): A. Usui, H. Goto, Y. Fujiyama, T. Matsueda, H. Sunakawa, Y. Ishihara, A. Okada, A. A.Yamaguchi, H. Nishihara, H. Shinohara, H. Goto, J. Mizuno
  • Organizer: IWN2012
  • Place of Presentation: 札幌
• [Presentation] Large Area Flatness Measurement and Optimization for Step and Repeat UV Nanoimprinting (2012)
  • Author(s): K. Ishibashi, H. Goto, J. Mizuno, S. Shoji
  • Organizer: The 11th International Conference on Nanoimprint & Nanoprint Technology (NNT 2012), 2012.10.25, Napa, California, USA (2012)
  • Place of Presentation: Napa, California, USA
• [Presentation] Fabrication of High Quality GaN Template by Nano-channel FIELO Using UV Nanoimprint Lithography for high Efficiency LED (2012)
  • Author(s): A. Okada, H. Shinohara, H. Nishihara, H. Goto, A. Usui, T. Matsueda, H. Goto, Y. Fujiyama, H. Sunakawa, Y. Ishihara, A. Yamaguchi, S. Shoji, J. Mizuno
  • Organizer: The 11th International Conference on Nanoimprint & Nanoprint Technology (NNT 2012), 2012.10.25, Napa, California, USA (2012)
  • Place of Presentation: Napa, California, USA
• [Presentation] Anti-Reflection Structures Fabricated by Angled Two Step UV Nanoimprint Lithography Using Line and Space (2012)
  • Author(s): K. Ishibashi, H. Nishihara, M. Kokubo, H. Goto, J. Mizuno, S. Shoji
  • Organizer: The 11th International Conference on Nanoimprint & Nanoprint Technology (NNT 2012), 2012.10.25, Napa, California, USA (2012)
  • Place of Presentation: Napa, California, USA
• [Presentation] Area-Extended Wire-Grid Polarizer via Step and Repeat Nanoimprint Lithography (2012)
  • Author(s): K. Takayama, H. Sakamoto, Y. Kaida, K. Ishibashi, H. Goto, S. Shoji, J. Mizuno
  • Organizer: The 11th International Conference on Nanoimprint & Nanoprint Technology (NNT 2012)
  • Place of Presentation: Napa, California, USA
• [Presentation] Fast Analysis of Biological Compounds by Gradient Liquid Chromatography Using Pillar Array Column (2012)
  • Author(s): Y. Song, M. Noguchi, K. Takatsuki, T. Sekiguchi, J. Mizuno, T. Funatsu, S. Shoji, M. Tsunota
  • Organizer: The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2012)
  • Place of Presentation: 沖縄
• [Presentation] Measurement of Inflammatory Cytokine Secretion from Human Monocytes after Inflammasome Activation (2012)
  • Author(s): Y. Shirasaki, A. Nakahara, N. Shimura, K. Izawa, N. Suzuki, M. Yamagishi, J. Mizuno, T. Sekiguchi, R. Nishikomori, S. Shoji, O. Ohara
  • Organizer: 9 th International Conference on Electroluminescence & Organic Optoelectronics (ICEL) 2012
  • Place of Presentation: 福岡
• [Presentation] Fabrication of Microfluidic Organic Light Emitting Diodes (2012)
  • Author(s): T. Kasahara, S. Matsunami, T. Edura, M. Tsuwaki, S. Hirata, S. Shoji, C. Adachi, J. Mizuno
  • Organizer: 9 th International Conference on Electroluminescence & Organic Optoelectronics (ICEL) 2012
  • Place of Presentation: 福岡
• [Presentation] Flow Electrochemiluminescence of Ru(bpy)3 and Iridium Complexes as a Light Source for Flow Injection Spectrophotometric Analysis (2012)
  • Author(s): R. Ishimatsu, K. Sugimori, K. Nakano, S. Matsunami, T. Edura, T. Kasahara, J. Mizuno, C. Adachi, T. Imato
  • Organizer: The 4th International Symposium on Microchemistry and Microsystems (ISMM 2012)
  • Place of Presentation: Jubei, Taiwan
• [Presentation] Low Dispersion and Low Pressure Drop Turn Structure Using Distribution Controlled Micro Pillar Array for Efficient LC Microchip (2012)
  • Author(s): K. Takatsuki, M. Noguchi, Y. Song, D.H. Yoon, T. Sekiguchi, J. Mizuno, T. Funatsu, M. Tsunoda, S. Shoji
  • Organizer: The 4th International Symposium on Microchemistry and Microsystems (ISMM 2012)
  • Place of Presentation: Hsinchu, Taiwan
• [Presentation] Low-Temperature, Surface-Compliant Wafer Bonding using Sub-Micron Gold Particles for Wafer-Level MEMS Packaging (2012)
  • Author(s): H. Ishida, T. Ogashiwa, Y. Kanehira, S. Ito, T. Yazaki, J. Mizuno
  • Organizer: The 62nd Electronic Components and Technology Conference 2012
  • Place of Presentation: Sandiego, California, USA
• [Presentation] Hybrid Au-Underfill Resin Bonding with Lock-and-Key Structure (2012)
  • Author(s): M. Nimura, A. Shigetou, K. Sakuma, H. Ogino, T. Enomoto, J. Mizuno, S. Shoji
  • Organizer: The 62nd Electronic Components and Technology Conference 2012
  • Place of Presentation: Sandiego, California, USA
• [Presentation] Hybrid Solder-Adhesive Bonding Using Simple Resin Planarization Technique for 3D LSI (2012)
  • Author(s): M. Nimura, K. Sakuma, H. Ogino, T. Enomoto, A. Shigetou, S. Shoji, J. Mizuno
  • Organizer: 3rd International IEEE Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012),
  • Place of Presentation: 東京
• [Presentation] Low Temperature Au-Au Flip Chip Bonding with VUV/O3 Treatment for 3D Integration (2012)
  • Author(s): A. Okada, M. Nimura, N. Unami, A. Shigetou, H. Noma, K. Sakuma, S. Shoji, J. Mizuno
  • Organizer: 3rd International IEEE Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012),
  • Place of Presentation: 東京
• [Presentation] Low-Temperature Wafer Bonding using Sub-Micron Gold Particles for Wafer-Level MEMS Packaging (2012)
  • Author(s): H. Ishida, T. Ogashiwa, Y. Kanehira, S. Ito, T. Yazaki, J. Mizuno
  • Organizer: 3rd International IEEE Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012),
  • Place of Presentation: 東京
• [Presentation] Surface Modification of Poly ethylene terephthalate (PET) by VUV and VUV/O3 Treatments for Flexible Capacitive Tactile Sensors (2012)
  • Author(s): T. Kasahara, S. Shoji, J. Mizuno
  • Organizer: International Conference on Electronics Packaging and IMAPS All Asia Conference (ICEP-IAAC 2012),
  • Place of Presentation: 東京
• [Presentation] Compound Nanoimprint Lithography and its Application for Device (2011)
  • Author(s): J.Mizuno
  • Organizer: BIT'S 1st Annual World Congress of Nano-S&T-2011
  • Place of Presentation: Dailian(招待講演)
  • Year and Date: 2011-10-25
• [Presentation] Optimized Step and Repeat UV Nanoimprint Process for Large Scale Nano Pattern Fabrication (2011)
  • Author(s): K.Ishibashi, U.Shirasaka, J.Mizuno, S.Shoji
  • Organizer: The 10th International Conference on Nanoimprint and Nanoprint Technology (NNT2011)
  • Place of Presentation: Jeju
  • Year and Date: 2011-10-20
• [Presentation] Compound MEMS/NEMS and Their Applications for Functional Device (2011)
  • Author(s): J.Mizuno
  • Organizer: CMP Seminor2011
  • Place of Presentation: Taipei(招待講演)
  • Year and Date: 2011-07-05
• [Presentation] Large Area Nanoimprinting with UV Nanoimprint under Atmoshperic Pressure for Silicon and Polymer Substrate (2011)
  • Author(s): K.Ishibashi, H.Goto, S.Shoji, J.Mizuno
  • Organizer: 4th Asian Nanoimprint Lithography Symposium (ASNIL)
  • Place of Presentation: Sigapore
  • Year and Date: 2011-06-27
• [Presentation] Fabrication of Three Dimensional Micro/Nano Structures and Its Application for Chsmistry and Biochemistry (2011)
  • Author(s): S.Shoji, D.Yoon, T.Sekiguchi, J.Mizuno, et.al.
  • Organizer: Joint Conference of 5th International Conference on Science and Technology for Adanced Ceramics(STAC5)
  • Place of Presentation: Mielparque-Yokohama(招待講演)
  • Year and Date: 2011-06-23
• [Presentation] Optimization of Cyclo-Olefin Polymer-Polydimethylsiloxane Direct Bonding Conditions for Biochemical Microchips (2011)
  • Author(s): A.Nakahara, H.Shinohara, T.Kasahara, S.Umeda, S.Shoji, J.Mizuno
  • Organizer: International Conference on Electronics Packaging : ICEP2011
  • Place of Presentation: Nara
  • Year and Date: 2011-04-15
• [Presentation] Surface Modification of Polyimide by 172nm Excirmer Lamp Irradiation (2011)
  • Author(s): T.Kasahara, H.Shinohara, S.Shoji, J.Mizuno
  • Organizer: International Conference on Electronics Packaging : ICEP2011
  • Place of Presentation: Nara
  • Year and Date: 2011-04-15
• [Presentation] 表面活性化技術を用いたマイクロ流路チップの作製 (2011)
  • Author(s): 水野潤
  • Organizer: 表面技術協会第123回講演大会
  • Place of Presentation: 関東学院大学(招待講演)
  • Year and Date: 2011-03-17
• [Presentation] 複合3D-MEMS/NEMSと応用デバイス (2011)
  • Author(s): 水野潤
  • Organizer: 2011年度精密工学会春季大会
  • Place of Presentation: 東洋大学(招待講演)
  • Year and Date: 2011-03-16
• [Presentation] NEXAFS and XPS studies of VUV/03 Treated Aromatic Polyurea for High-Speed Electrophoresis Microchips (2011)
  • Author(s): Hidetoshi Shinohara
  • Organizer: The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (6th IEEE-NEMS)
  • Place of Presentation: TAIPEI
  • Year and Date: 2011-02-20
• [Presentation] Improvement of replica mold releasability due to by Anti-sticking Cure Process (ACP) (2010)
  • Author(s): Jun Mizuno
  • Organizer: 9th International Nanoimprint and Nanoprint Technology NNT2010
  • Place of Presentation: COPENHAGEN
  • Year and Date: 2010-10-13
• [Patent(Industrial Property Rights)] マイクロ流路デバイス及びその製造方法 (2012)
  • Inventor(s): 笠原崇史、水野潤, その他4名
  • Industrial Property Rights Holder: 学校法人早稲田大学
  • Industrial Property Number: 2012-004992
  • Filing Date: 2012-01-13