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Resonant Grazing-Incidence Small-angle soft X-ray scattering method and its application to three-dimensional structure analysis of multylayer thin films

Research Project

Project/Area Number 22651034
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Nanostructural science
Research InstitutionKyoto University

Principal Investigator

OKUDA Hiroshi  京都大学, 大学院・工学研究科, 准教授 (50214060)

Co-Investigator(Kenkyū-buntansha) OCHIAI Shojiro  京都大学, 大学院・工学研究科, 教授 (30111925)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥3,580,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥480,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2010: ¥1,500,000 (Direct Cost: ¥1,500,000)
Keywords表面界面ナノ構造 / 共鳴軟X線散乱法 / GISAS / コントラスト変調 / GISAXS / GISANS / 共鳴散乱 / 軟X線共鳴散乱 / コントラスト変化 / 高分子薄膜 / ナノ粒子 / 軟X線小角散乱 / DWBA
Research Abstract

Resonant and nonresonant Grazing-incidence small-angle Soft X-ray scattering (SX-GISAS) has been developed to investigate three dimensional structures and their dependence on the distance from the surface. It has been demonstrated that GISAXS analysis with hard X-rays and that with soft X-rays agree each other, with apparent difference arising just from the curvature of the Ewald sphare. As a typical application of resonant GISAXS, contrast matching between the substrate an d the multilayers has been demonstrated.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (33 results)

All 2013 2012 2011 2010 Other

All Journal Article (8 results) (of which Peer Reviewed: 7 results) Presentation (23 results) (of which Invited: 3 results) Remarks (2 results)

  • [Journal Article] 軟X線を利用したGISAXS測定2013

    • Author(s)
      奥田浩司,山本崇善,竹下浩樹,平井光博,櫻井伸一,北島義典
    • Journal Title

      PFニュース

      Volume: 30 Pages: 21-25

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Contrast matching of an Si substrate with polymer films by anomalous 図 5 硬X線による Fe3O4 ナノ粒子分散PS膜のGISAXSパターン予備評価の結果図 6 JPARC BL17(写楽)における図5の試料のGISANSデータ。波長帯ごとの積算でqz方向については積分されている。 dispersion at the Si K absorption edge2012

    • Author(s)
      H.Okuda,K.Takeshita,S.Ochiai,S.Sakurai,Y. Kitajima,H.Ogawa
    • Journal Title

      J. Appl. Cryst

      Volume: 45 Pages: 119-121

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Near-surface relaxation structure of annealed block copolymer film on Si substrates examined by grazing-incidence small-angle scattering utilizing soft X-rays2011

    • Author(s)
      H.Okuda, K.Takshita, S.Ochiai, S.Sakurai, Y.Kitajima
    • Journal Title

      J.Appl.Cryst

      Volume: 44 Issue: 2 Pages: 380-384

    • DOI

      10.1107/s0021889811003578

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Ewald sphere curvature on the GISAXS analysis of capped Germanium nanodot samples in the soft X-ray region2011

    • Author(s)
      H.Okuda, K.Takeshita, M.Kato, S.Ochiai and K.Kitajima
    • Journal Title

      J. Phys. Conf. Ser. Mater. Sci. Eng

      Volume: 24 Pages: 12015-12015

    • DOI

      10.1088/1757-899x/24/1/012015

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Near-surface relaxation structure of annealed block copolymer film on Si substrates examined by grazing-incidence small-angle scattering utilizing soft X-rays2011

    • Author(s)
      H.Okuda, K.Takeshita, S.Ochiai, Y.Kitajima, S.Sakurai
    • Journal Title

      J.Appl.Crystall.

      Volume: 44 Pages: 380-384

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Ewald sphere curvature on the GISAXS analysis of capped Germanium nanodot samples in the soft X-ray region2011

    • Author(s)
      H.Okuda, K.Takeshita, M.Kato, S.Ochiai, K.Kitajima
    • Journal Title

      J.Phys.Conf.Ser.Mater.

      Volume: (Accepted)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Agrazing-incidence small-angle scatteringon capped Ge nanodots in layerstructures2010

    • Author(s)
      H.Okuda, M.Kato, K.Kuno, S.Ochiai, N.Usami, K.Nakajima and O.Sakata
    • Journal Title

      J.Phys. Condens. Matter

      Volume: 22 Issue: 47 Pages: 474003-474003

    • DOI

      10.1088/0953-8984/22/47/474003

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] A grazing-incidence small-angle scattering on capped Ge nanodots in layer structures2010

    • Author(s)
      H.Okuda, M.Kato, K.Kuno, S.Ochiai, N.Usami, K.Nakajima, O.Sakata
    • Journal Title

      J.Phys.Condens.Matter

      Volume: 22

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] 薄膜評価のための GISAS 法の利用-X 線の現状と中性子への期待2013

    • Author(s)
      奥田浩司
    • Organizer
      CROSS研究会
    • Place of Presentation
      研究社本社ビル
    • Year and Date
      2013-01-10
    • Related Report
      2012 Final Research Report
  • [Presentation] P 吸収端でのリン脂質膜の共鳴 GISAXS 測定2013

    • Author(s)
      奥田浩司、山本崇善、竹下浩樹、落合庄治郎、北島義典、小川紘樹、平井光博
    • Organizer
      第26回日本放射光学会年会
    • Place of Presentation
      名古屋大学
    • Related Report
      2012 Final Research Report
  • [Presentation] P吸収端でのリン脂質膜の共鳴GISAXS測定2013

    • Author(s)
      奥田浩司, 山本崇善,竹下浩樹,落合庄治郎, 北島義典,小川紘樹, 平井光博
    • Organizer
      放射光学会
    • Place of Presentation
      名古屋大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 薄膜評価のためのGISAS法の利用ーX線の現状と中性子への期待2013

    • Author(s)
      奥田浩司
    • Organizer
      CROSS研究会
    • Place of Presentation
      東京
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Si 基板上の高分子薄膜に対する コントラストマッチング GISAXS 法の試み2012

    • Author(s)
      奥田浩司、竹下浩樹、落合庄治郎、櫻井伸一、北島義典
    • Organizer
      第25回日本放射光学会年会
    • Place of Presentation
      鳥栖市民文化会館・中央公民館
    • Year and Date
      2012-01-08
    • Related Report
      2012 Final Research Report
  • [Presentation] Si基板上の高分子薄膜に対するコントラストマッチングGISAXS法の試み2012

    • Author(s)
      奥田浩司、竹下浩樹、落合庄治郎、櫻井伸一、北島義典
    • Organizer
      放射光学会年会
    • Place of Presentation
      佐賀県鳥栖市
    • Year and Date
      2012-01-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] Resonant GISAXS in 1.8-2.1 keV Region2012

    • Author(s)
      H. Okuda, T. Yamamoto, S. Ochiai, S. Sakurai, M. Hirai, Y. Kitajima and H. Ogawa
    • Organizer
      GISAS2012
    • Place of Presentation
      京都工芸繊維大学
    • Related Report
      2012 Final Research Report
  • [Presentation] 軟 X 線領域でのコントラストマッチング GISAXS 法2012

    • Author(s)
      奥田浩司、竹下浩樹、北島義典、櫻井伸一、小川紘樹、平井光博
    • Organizer
      PF 研究会
    • Place of Presentation
      高エネルギー加速器研究機構
    • Related Report
      2012 Final Research Report
  • [Presentation] 軟X線領域でのコントラストマッチングGISAXS法2012

    • Author(s)
      奥田浩司, 竹下浩樹, 北島義典,櫻井伸一, 小川紘樹 ,平井光博
    • Organizer
      PF研究会
    • Place of Presentation
      筑波
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] 異方的Geナノドットの軟X線GI-SAS法によるEwald球の曲率の影響の検討2012

    • Author(s)
      山本崇善 奥田浩司  落合庄治郎 竹下浩樹 北島義典 小川紘樹 宇佐美徳隆
    • Organizer
      日本金属学会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Resonant GISAXS in 1.8-2.1 keV Region2012

    • Author(s)
      H.Okuda, T. Yamamoto, S.Ochiai,S. Sakurai, M. Hirai, Y. Kitajima and H. Ogawa
    • Organizer
      GISAS2012 Kyoto
    • Place of Presentation
      京都
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] GI-SAXS法とAFMを用いた表面観察によるSEBS薄膜の表面構造についての考察2011

    • Author(s)
      竹下浩樹、奥田浩司、落合庄治郎、櫻井伸一、北島義典
    • Organizer
      日本金属学会秋季大会
    • Place of Presentation
      沖縄コンベンションセンター
    • Year and Date
      2011-11-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] GISAXS with soft X-rays around 2 keV at Photon Factory2011

    • Author(s)
      H. Okuda, K. Takeshita, S. Ochiai, Y.Kitajima
    • Organizer
      GISAS2011
    • Place of Presentation
      GISAS2011
    • Year and Date
      2011-10-11
    • Related Report
      2012 Final Research Report
  • [Presentation] GISAXS with soft X-rays around 2 keV at Photon Factory2011

    • Author(s)
      H.Okuda, K.Takeshita, S.Ochiai, Y.Kitajima
    • Organizer
      GISAS2011
    • Place of Presentation
      DESY, Hamburg
    • Year and Date
      2011-10-11
    • Related Report
      2011 Annual Research Report
  • [Presentation] 共鳴 SWAXS法の展開と 無機材料評価への応用2011

    • Author(s)
      奥田浩司、竹下浩樹、落合庄治郎、北島義典、横山嘉彦、才田淳治、太田昇
    • Organizer
      PF 研究会 SAS/XAFS
    • Place of Presentation
      高エネルギー加速器研究機構
    • Year and Date
      2011-09-08
    • Related Report
      2012 Final Research Report
  • [Presentation] 共鳴SWAXS法の展開と無機材料評価への応用2011

    • Author(s)
      奥田浩司、竹下浩樹、落合庄治郎、北島義典、横山嘉彦、才田淳治、太
    • Organizer
      PF研究会SAS/XAFS
    • Place of Presentation
      つくば市
    • Year and Date
      2011-09-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] 軟X線領域におけるGISAXS法2011

    • Author(s)
      奥田浩司、竹下浩樹、落合庄治郎、北島義典
    • Organizer
      PF研究会GISAS法の展開
    • Place of Presentation
      つくば市
    • Year and Date
      2011-09-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] 軟X線GISAS法による深さ分解構造解析の試み2011

    • Author(s)
      奥田、竹下、落合、北島
    • Organizer
      放射光学会
    • Place of Presentation
      筑波
    • Year and Date
      2011-01-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] Nondestructive nanostructure analysis of block copolymer film utilizing sob X-rays2010

    • Author(s)
      竹下、奥田、落合、櫻井、北島
    • Organizer
      MRS-J
    • Place of Presentation
      横浜
    • Year and Date
      2010-12-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] 軟X線領域でのGISAS解析における表界面効果の検討2010

    • Author(s)
      奥田、竹下、落合、北島
    • Organizer
      日本金属学会 秋季大会
    • Place of Presentation
      札幌
    • Year and Date
      2010-09-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] 軟X線GISAS法による高分子薄膜の構造評価2010

    • Author(s)
      竹下、加藤、奥田、落合、櫻井、藤原、北島
    • Organizer
      日本金属学会 秋季大会
    • Place of Presentation
      札幌
    • Year and Date
      2010-09-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] 軟X線共鳴 GISAXS 測定の現状(PF)2010

    • Author(s)
      奥田浩司、加藤真行、竹下浩樹、落合庄治郎、北島義典
    • Organizer
      反射率研究会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2010-07-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 軟X線共鳴GISAXS測定の現状(PF)2010

    • Author(s)
      奥田、加藤、竹下、落合、北島
    • Organizer
      反射率研究会
    • Place of Presentation
      名古屋(招待講演)
    • Year and Date
      2010-07-27
    • Related Report
      2010 Annual Research Report
  • [Remarks] 奥田浩司、山本崇善、竹下浩樹、 平井光博、桜井伸一、北島義典 :軟 X 線を利用したGISAXS 測定 PF ニュース 30 (2013) 21-25

    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://mcmd.mtl.kyoto-u.ac.jp/

    • Related Report
      2012 Final Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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