Resonant Grazing-Incidence Small-angle soft X-ray scattering method and its application to three-dimensional structure analysis of multylayer thin films
| Project/Area Number |
22651034
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Single-year Grants |
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| Research Field |
Nanostructural science
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| Research Institution | Kyoto University |
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Principal Investigator |
OKUDA Hiroshi 京都大学, 大学院・工学研究科, 准教授 (50214060)
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| Co-Investigator(Kenkyū-buntansha) |
OCHIAI Shojiro 京都大学, 大学院・工学研究科, 教授 (30111925)
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥3,580,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥480,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2010: ¥1,500,000 (Direct Cost: ¥1,500,000)
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| Keywords | 表面界面ナノ構造 / 共鳴軟X線散乱法 / GISAS / コントラスト変調 / GISAXS / GISANS / 共鳴散乱 / 軟X線共鳴散乱 / コントラスト変化 / 高分子薄膜 / ナノ粒子 / 軟X線小角散乱 / DWBA |
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| Research Abstract |
Resonant and nonresonant Grazing-incidence small-angle Soft X-ray scattering (SX-GISAS) has been developed to investigate three dimensional structures and their dependence on the distance from the surface. It has been demonstrated that GISAXS analysis with hard X-rays and that with soft X-rays agree each other, with apparent difference arising just from the curvature of the Ewald sphare. As a typical application of resonant GISAXS, contrast matching between the substrate an d the multilayers has been demonstrated.
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Report
(4 results)
Research Products
(33 results)
