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CONTROL OF STRUCTURAL AND ELECTRICAL PROPERTIES OF NANOGAPS USING FIELD-EMISSION-INDUCED ELECTROMIGRATION

Research Project

Project/Area Number 22651039
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Nanomaterials/Nanobioscience
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

SHIRAKASHI Jun-ichi  東京農工大学, 大学院・工学研究院, 准教授 (00315657)

Co-Investigator(Renkei-kenkyūsha) TAKEMURA Yasushi  横浜国立大学, 大学院・工学研究院, 教授 (30251763)
Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥3,580,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥480,000)
Fiscal Year 2011: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2010: ¥1,500,000 (Direct Cost: ¥1,500,000)
Keywordsナノ構造形成・制御 / ナノギャップ / エレクトロマイグレーション / マイクロ・ナノデバイス / 少数電子素子 / 強磁性単電子トランジスタ / 電界放射電流 / 原子移動制御
Research Abstract

We report a simple and easy method for the simultaneous control of electrical properties of multiple, integrated Ni nanogaps. This method is based on electromigration induced by a field emission current, which is the so-called "activation." The tuning of tunnel resistance of nanogaps was simultaneously achieved by passing Fowler-Nordheim(F-N) field emission current through three initial Ni nanogaps connected in series. Furthermore, the integration of single-electron transistors(SETs) was also achieved by simultaneously performing the activation for the series-connected nanogaps. Two simultaneously activated devices displayed Coulomb blockade properties, and Coulomb blockade voltage of each device was clearly modulated by the gate voltage. Hence, two SETs with similar electrical properties were successfully integrated by the activation procedure. These results indicate that the activation procedure is suitable for the simultaneous control of structural and electrical properties of multiple nanogaps and allows us to integrate planar-type nanogap-based SETs.
(2)複数のナノギャップを直列に接続した集積型ナノギャップでのSET構造の一括作製・特性制御・集積化技術の開発:アクティベーションにより2つのSET構造の一括作製および集積化を達成した。集積した2つのSETはほぼ同一の特性を有し、アクティベーション条件によりナノギャップ系SETの素子特性を同時に制御・調節しながら、SETを集積化することが可能であることが明らかとなった。さらに、本手法において得られたラテラル型Ni/真空障壁/Ni系磁性トンネル接合単体でのトンネル磁気抵抗効果(TMR)から、室温にて10%程度のTMRの観測に成功した。

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (23 results)

All 2011 2010 Other

All Journal Article (13 results) (of which Peer Reviewed: 10 results) Presentation (7 results) Remarks (3 results)

  • [Journal Article] Integration of Single-Electron Transistors Using Field-Emission-Induced Electromigration2011

    • Author(s)
      S. Ueno, Y. Tomoda, W. Kume, M. Hanada, K. Takiya and J. Shirakashi
    • Journal Title

      J. Nanosci. Nanotechnol

      Volume: 11 Pages: 6258-6261

    • NAID

      110008001136

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Scratch Direction and Threshold Force in Nanoscale Scratching Using Atomic Force Microscopes2011

    • Author(s)
      A. A. Tseng, C. J. Kuo, S. Jou, S. Nishimura and J. Shirakashi
    • Journal Title

      Appl. Surf. Sci

      Volume: 257 Pages: 9243-9250

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] 分割型電圧フィードバックエレクトロマイグレーション法を用いた室温動作可能なプレナー型強磁性トンネル接合素子の作製2011

    • Author(s)
      安武龍太朗、渡邉敬登、上野俊介、北川潤、白樫淳一
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol.110, no.423 Pages: 19-23

    • NAID

      110008688779

    • Related Report
      2011 Final Research Report
  • [Journal Article] Fabrication of Planar-Type Ni/Vacuum/Ni Tunnel Junctions Based on Ferromagnetic Nanogaps Using Field-Emission-Induced Electromigration2011

    • Author(s)
      T.Watanabe, K.Takiya, J.Shirakashi
    • Journal Title

      J.Appl.Phys.

      Volume: 109 Issue: 7

    • DOI

      10.1063/1.3565198

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Tuning of Tunnel Resistance of Nanogaps by Field-Emission-Induced Electromigration Using Current Source Mode2011

    • Author(s)
      K.Takiya, Y.Tomoda, W.Kume, S.Ueno, T. Watanabe, J.Shirakashi
    • Journal Title

      J.Nanosci.Nanotechnol.

      Volume: 11 Issue: 7 Pages: 6266-6270

    • DOI

      10.1166/jnn.2011.4336

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Integration of Single-Electron Transistors Using Field-Emission-Induced Electromigration2011

    • Author(s)
      S.Ueno, Y.Tomoda, W.Kume, M.Hanada, K.Takiya, J.Shirakashi
    • Journal Title

      J.Nanosci.Nanotechnol.

      Volume: 11 Issue: 7 Pages: 6258-6261

    • DOI

      10.1166/jnn.2011.4328

    • NAID

      110008001136

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Scratch Properties of Nickel Thin Films Using Atomic Force Microscopy2010

    • Author(s)
      A. A. Tseng, J. Shirakashi, S. Jou, J. C. Huang and T. P. Chen
    • Journal Title

      J. Vac. Sci. Technol

      Volume: B28 Pages: 202-210

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanomachining of Permalloy for Fabricating Nanoscale Ferromagnetic Structures Using Atomic Force Microscopy2010

    • Author(s)
      A. A. Tseng, J. Shirakashi, S. Nishimura, K. Miyashita and Z. Li
    • Journal Title

      J. Nanosci. Nanotechnol

      Volume: 10 Pages: 456-466

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] 電界放射電流誘起型エレクトロマイグレーションによる単電子トランジスタの集積化2010

    • Author(s)
      上野俊介、友田悠介、久米彌、花田道庸、滝谷和聡、白樫淳一
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: 422 Pages: 35-39

    • NAID

      110008001136

    • Related Report
      2011 Final Research Report
  • [Journal Article] 電界放射電流誘起型エレクトロマイグレーション法によるプレナー型強磁性トンネル接合の作製2010

    • Author(s)
      滝谷和聡、友田悠介、渡邉敬登、久米彌、上野俊介、白樫淳一
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: 422 Pages: 41-45

    • NAID

      110008001137

    • Related Report
      2011 Final Research Report
  • [Journal Article] 10 Micrometer-Scale SPM Local Oxidation Lithography2010

    • Author(s)
      T.Toyofuku, S.Nishimura, K.Miyashita, J.Shirakashi.
    • Journal Title

      J.Nanosci.Nanotechnol.

      Volume: 10 Pages: 4543-4547

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of Feedback Parameters on Resistance Control of Metal Nanowires by Stepwise Feedback-Controlled Electromigration2010

    • Author(s)
      S.Itami, Y.Tomoda, R.Yasutake, J.Shirakashi
    • Journal Title

      J.Nanosci.Nanotechnol.

      Volume: 10 Pages: 7464-7468

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Single-Electron Transistors Using Field-Emission-Induced Electromigration2010

    • Author(s)
      W.Kume, Y.Tomoda, M.Hanada, J.Shirakashi
    • Journal Title

      J.Nanosci.Nanotechnol.

      Volume: 10 Pages: 7239-7243

    • NAID

      110007131563

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] Fabrication of Nanogaps Using Field-Emission-Induced Electromigration with Alternating Current Bias2011

    • Author(s)
      M. Yagi, R. Suda, T. Watanabe and J. Shirakashi
    • Organizer
      International Conference on Nanoscience and Technology, China 2011(ChinaNANO 2011)
    • Place of Presentation
      Beijing, China
    • Related Report
      2011 Final Research Report
  • [Presentation] Simultaneous Tuning of Tunnel Resistance of Integrated Nanogaps by Field-Emission-Induced Electromigration2011

    • Author(s)
      M.Ito, S.Ueno, T.Watanabe, S.Akimoto, J.Shirakashi
    • Organizer
      The IEEE NANO 2011 Conference (11th International Conference on Nanotechnology)
    • Place of Presentation
      Portland, OR, USA(招待講演)
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of Planar-Type Ni/Vacuum/Ni Tunnel Junctions Based on Ferromagnetic Nanogaps Using Field-Emission-Induced Electromigration2010

    • Author(s)
      K. Takiya, T. Watanabe and J. Shirakashi
    • Organizer
      55th Annual Conference on Magnetism and Magnetic Materials(MMM-2010)
    • Place of Presentation
      Atlanta, GA, USA
    • Related Report
      2011 Final Research Report
  • [Presentation] A Newly Investigated Approach for the Control of Tunnel Resistance of Nanogaps Using Field-Emission-Induced Electromigration2010

    • Author(s)
      K. Takiya, Y. Tomoda, W. Kume, S. Ueno, T. Watanabe and J. Shirakashi
    • Organizer
      International Conference on Nanoscience and Technology(ICN-T 2010)
    • Place of Presentation
      Beijing, China
    • Related Report
      2011 Final Research Report
  • [Presentation] Integration of Single-Electron Transistors Using Field-Emission-Induced Electromigration2010

    • Author(s)
      S. Ueno, Y. Tomoda, W. Kume, M. Hanada, K. Takiya and J. Shirakashi
    • Organizer
      10th International Conference on Nanotechnology(IEEE NANO 2010)-Joint Symposium with NANO KOREA 2010
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2011 Final Research Report
  • [Presentation] Tuning of Tunnel Resistance of Nanogaps by Field-Emission-Induced Electromigration Using Current Source Mode2010

    • Author(s)
      K. Takiya, Y. Tomoda, W. Kume, S. Ueno, T. Watanabe and J. Shirakashi
    • Organizer
      10th International Conference on Nanotechnology(IEEE NANO 2010)-Joint Symposium with NANO KOREA 2010
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2011 Final Research Report
  • [Presentation] Fabrication of Planar-Type Ni/Vacuum/Ni Tunnel Junctions Based on Ferromagnetic Nanogaps Using Field-Emission-Induced Electromigration2010

    • Author(s)
      K.Takiya, T.Watanabe, J.Shirakashi
    • Organizer
      55th Annual Conference on Magnetism and Magnetic Materials (MMM-2010)
    • Place of Presentation
      Atlanta, GA, USA
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.tuat.ac.jp/~nanotech/index.htm

    • Related Report
      2011 Final Research Report
  • [Remarks]

    • URL

      http://www.tuat.ac.jp/~nanotech/index.htm

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.tuat.ae.jp/~nanotech/index.htm

    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2016-04-21  

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