Study of the applicability of fast ions from laser induced plasma to shallow junction doping
| Project/Area Number |
22656023
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Single-year Grants |
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| Research Field |
Applied physics, general
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| Research Institution | University of Hyogo |
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Principal Investigator |
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥3,550,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥450,000)
Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2011: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2010: ¥1,600,000 (Direct Cost: ¥1,600,000)
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| Keywords | 高性能レーザー / 放射線,X線,粒子線 / 半導体物性 / 放射線,Ｘ線,粒子線 |
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| Research Abstract |
The characteristics of fast ions generated from laser-induced plasma on a boron solid target have been studied for an application to shallow junction doping. The peak position in theproduced B ion energy spectra can be controlled in a 150-550 eV range by changing the laser intensity. From the measurement of B ion energy spectrum whichwas resolved into charge states at several laser intensities, most part of the energy spectra aroundthe peak position was found to be composed of B+ions at the laser intensity less than 3.0×1010W/cm2. The number of produced ions around the peak of the energy spectrum was about 2×1012ions/(eV・Sr) or higher within the emission angle smaller than 45° . These results indicate that the produced B+ions are applicable to shallow doping in a sub-10 nm range.
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Report
(4 results)
Research Products
(5 results)
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[Presentation]2010
Author(s)
Sekioka T, Amano S, Inoue T, and Mochizuki T
Organizer
8th International Symposium on Swift Heavy Ions in Matter
Place of Presentation
Kyoto, Japan
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