Study of the applicability of fast ions from laser induced plasma to shallow junction doping

• Project/Area Number: 22656023
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Single-year Grants
• Research Field: Applied physics, general
• Research Institution: University of Hyogo
• Principal Investigator: SEKIOKA Tsuguhisa 兵庫県立大学, 大学院・工学研究科, 准教授 (40118013)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥3,550,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥450,000); Fiscal Year 2012: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2011: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2010: ¥1,600,000 (Direct Cost: ¥1,600,000)
• Keywords: 高性能レーザー / 放射線,X線,粒子線 / 半導体物性 / 放射線,Ｘ線,粒子線

Research Abstract

The characteristics of fast ions generated from laser-induced plasma on a boron solid target have been studied for an application to shallow junction doping. The peak position in theproduced B ion energy spectra can be controlled in a 150-550 eV range by changing the laser intensity. From the measurement of B ion energy spectrum whichwas resolved into charge states at several laser intensities, most part of the energy spectra aroundthe peak position was found to be composed of B+ions at the laser intensity less than 3.0×1010W/cm2. The number of produced ions around the peak of the energy spectrum was about 2×1012ions/(eV・Sr) or higher within the emission angle smaller than 45° . These results indicate that the produced B+ions are applicable to shallow doping in a sub-10 nm range.

Research Products

• [Journal Article] Nuclear Instruments and Methods in Physics Research Section B
  • Author(s): Sekioka T, Amano S, Inoue T, and Mochizuki T
  • Journal Title: Beam Interactions with Materials and Atoms
  • Peer Reviewed
• [Presentation] CharChacteristics of Fast Ions from Laser-Induced Plasma and their Applicability to Shallow Junction Doping (2012)
  • Author(s): Tsuguhisa Sekioka
  • Organizer: International Symposium on Swift Heavy Ions in Matter、SHIM2012
  • Place of Presentation: 京都大学
• [Presentation] 低エネルギーイオン注入のためのレーザープラズマからの高速イオンの特性 (2010)
  • Author(s): 関岡嗣久
  • Organizer: 応用物理学会
  • Place of Presentation: 長崎大学 文教キャンパス
  • Year and Date: 2010-09-16
• [Presentation] (2010)
  • Author(s): 関岡嗣久、天野 壯、井上智章、望月孝晏
  • Organizer: 秋季第71回応用物理学会学術講演会
• [Presentation] (2010)
  • Author(s): Sekioka T, Amano S, Inoue T, and Mochizuki T
  • Organizer: 8th International Symposium on Swift Heavy Ions in Matter
  • Place of Presentation: Kyoto, Japan