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Research on quantum behavior of a nanomechanical resonator

Research Project

Project/Area Number 22656035
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

WARISAWA Shin'ichi  東京大学, 大学院・新領域創成科学研究科, 准教授 (20262321)

Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥540,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,300,000)
Keywordsナノメカニクス / 量子的挙動 / 振動子 / グラフェン / 集束イオンビーム化学気相 成長法 / 超伝導ナノデバイス / 集束イオンビーム化学気相成長法 / FIB-CVD / Q値 / 歪印加 / SQUID
Research Abstract

This research focused on a graphene as a material of nano mechanical resonators. In order to improve the quality factor of the graphene resonator, the research proposed a new fabrication method of a graphene resonator. The method uses SU-8 as a material of supporting structure and can apply a tensile stress to the resonator by annealing to induce shrinkage of the supporting structure. The fabricated graphene resonator based on the proposed method showed more than 7000 of the quality factor at a room temperature, the value of which is the largest in the world as reported. The drastic improvement of the quality factor was discussed from supporting conditions, thermal elastic damping effects and quantum viewpoints as well.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (23 results)

All 2012 2011 2010

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (19 results)

  • [Journal Article] High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain2012

    • Author(s)
      Y. Oshidari, T. Hatakeyama, R. Kometani, S.Warisawa, S. Ishihara
    • Journal Title

      Appl. Phys. Express

      Volume: 5 Issue: 11 Pages: 117201-117201

    • DOI

      10.1143/apex.5.117201

    • NAID

      10031126464

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012

    • Author(s)
      S. Warisawa, K. Kuroda, S. Chen, R. Kometani, S. Ishihara
    • Journal Title

      Journal of Photopolymer Science and Technology

      Volume: 25 Issue: 1 Pages: 37-42

    • DOI

      10.2494/photopolymer.25.37

    • NAID

      130004464942

    • ISSN
      0914-9244, 1349-6336
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Selective graphene growth from DLC thin film patterned by focused-ion-beam chemical vapor deposition2011

    • Author(s)
      T. Hatakeyama, R. Kometani, S. Warisawa, and S. Ishihara
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 29 Issue: 6 Pages: 06FG04-06FG04

    • DOI

      10.1116/1.3655581

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Piezoresistive effect in the three-dimensional diamondlike carbon nanost ructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani
    • Journal Title

      Journal of Vacuum Science & Technology B : Microelectronics and Nanometer Structures

      Volume: 28 Pages: 1071-1023

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] Direct Fabrication of WxCy SNS Josephson Junction by Using Focused-ion-beam Chemical Vapor Deposition2012

    • Author(s)
      J. Dai, K. Onomitsu, R. Kometani, Y. Krockenberger, H. Yamaguchi, S. Ishihara and S. Warisawa
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Oriental Hotel, Kobe, Japan
    • Year and Date
      2012-10-31
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] Quality factor improvement of grapheme resonator by SU-8shrinkage-induced strain2012

    • Author(s)
      Y. Oshidari, T. Hatakeyama, R.Kometani, S. Warisawa and S. Ishihara
    • Organizer
      The 56th EIPBN Conference, 09C-04
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Year and Date
      2012-06-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Superconductivityof tungsten-containing carbon nanowires fabricated focused-ion-beam chemical vapor deposition2012

    • Author(s)
      Jun Dai, R. Kometani, S.Warisawa, S. Ishihara, K. Onomitsu, Y. Krockenberger and H. Yamaguchi
    • Organizer
      The 56th EIPBN Conference, 04A-05
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Year and Date
      2012-05-31
    • Related Report
      2012 Final Research Report
  • [Presentation] Superconductivity of tungsten-containing carbon nanowires fabricated focused-ion-beam chemical vapor deposition2012

    • Author(s)
      Jun Dai
    • Organizer
      The 56th EIPBN Conference
    • Place of Presentation
      Hilton Waikoloa Village, Hawaii, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Quality factor improvement of grapheme resonator by SU-8 shrinkage-induced strain2012

    • Author(s)
      Yuta Oshidari
    • Organizer
      The 56th EIPBN Conference
    • Place of Presentation
      Hilton Waikoloa Village, Hawaii, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-beam Lithography and Annealing Treatment2011

    • Author(s)
      R. Kometani
    • Organizer
      24th International Microprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-10-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-heam Lithogeranhv and Annealine Treatment2011

    • Author(s)
      R. Kometani
    • Organizer
      24th International Microprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-10-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] A wide-range frequency tunable nanomechanical resoator with parametricresonance characteristics2011

    • Author(s)
      S. Warisawa
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2011-09-19
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of Nanowire SQUID by means of FIB-CVD2011

    • Author(s)
      J. Dai, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      5th TU-SNU-UT Joint Symposium
    • Place of Presentation
      Beijing, China
    • Year and Date
      2011-06-07
    • Related Report
      2012 Final Research Report
  • [Presentation] Selective Graphene Growth from DLC Thin Film Patterned by Focused-ion-beam Chemical Vapor Deposition2011

    • Author(s)
      T. Hatakeyama, R. Kometani, S.Warisawa and S. Ishihara
    • Organizer
      The 55thInternational Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Year and Date
      2011-06-07
    • Related Report
      2012 Final Research Report
  • [Presentation] Fabrication of Nanowire SQUID by means of FIB-CVD2011

    • Author(s)
      J. Dai
    • Organizer
      5th TU-SNU-UT Joint Symposium
    • Place of Presentation
      Beijin, China
    • Year and Date
      2011-06-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] What is Nanomechanics Research?2011

    • Author(s)
      S. Warisawa
    • Organizer
      5th TU-SNU-UT Joint Symposium
    • Place of Presentation
      Beijin, China(招待講演)
    • Year and Date
      2011-06-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] Selective Graphene Growth from DLC Thin Film Patterned by Focused-ion-bean Chemical Vapor Deposition2011

    • Author(s)
      T. Hatakeyama
    • Organizer
      The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
    • Place of Presentation
      Las Vegas, USA
    • Year and Date
      2011-06-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] 集束イオンビーム励起表面反応による超薄膜DLC機械振動子の作製とその特性2010

    • Author(s)
      米谷玲皇
    • Organizer
      2010年度精密工学会秋季大会学術講演会
    • Place of Presentation
      愛知県名古屋市
    • Year and Date
      2010-09-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ultra thin diamond-like carbon film mechanical resonator fabrication byacombined process of FIB-CVD and wet-etching2010

    • Author(s)
      R.Kometani
    • Organizer
      The 36th International Conference on Micro andNano Engineering (MNE2010)
    • Place of Presentation
      Genoa, Italy
    • Year and Date
      2010-09-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] 集束イオンビーム化学気相成長法による超薄膜DLC機械振動子の作製2010

    • Author(s)
      米谷玲皇
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎県長崎市
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] Vibration Characteristics of Monolayer Graphene Resonator2010

    • Author(s)
      T.Hatakeyama
    • Organizer
      The 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010)
    • Place of Presentation
      Anchorage, Alaska, U.S.A
    • Year and Date
      2010-06-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] 架橋グラフェンの振動特性評価2010

    • Author(s)
      畠山大輝
    • Organizer
      ナノ学会第8回大会
    • Place of Presentation
      愛知県岡崎市
    • Year and Date
      2010-05-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] Vibration Characteristics of Monolayer Graphene Resonator2010

    • Author(s)
      T. Hatakeyama, R. Kometani, M.Nagase, S. Warisawa, S. Ishihara
    • Organizer
      The 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010)
    • Place of Presentation
      Anchorage, Alaska, USA
    • Year and Date
      2010-01-02
    • Related Report
      2012 Final Research Report

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Published: 2010-08-23   Modified: 2019-07-29  

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