Investigation of the formation process of transparent conductive film by using superheated steam and/or water plasma jet

• Project/Area Number: 22656139
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Single-year Grants
• Research Field: Physical properties of metals
• Research Institution: Tokyo University of Science
• Principal Investigator: ISHIGURO Takashi 東京理科大学, 基礎工学部, 教授 (10183162)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥3,660,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥660,000); Fiscal Year 2012: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2011: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000); Fiscal Year 2010: ¥800,000 (Direct Cost: ¥800,000)
• Keywords: 過熱蒸気 / 水熱反応 / 水プラズマ / 大気圧プラズマ / 透明導電膜 / 膜改質 / 水酸化物膜 / 酸化物膜

Research Abstract

Reforming processes from metal film to hydroxide or oxide films by using superheated steam and/or atmospheric pressure water-plasma were investigated. The process of superheated steam was effective to promote dehydration or oxidation reaction. Homogeneous reforming on the surface was induced by scanning of a water-plasma plume. Transparent conductive film was successfully formed by hydrothermal reaction of Zn-Mg alloy film. As the conclusion, the hydrothermal treatment in the pure liquid water and subsequent reforming under the gaseous phases such as the superheated steam or the water-plasma were useful process for making the functional films.

Research Products

• [Journal Article] Formation of Anti-Reflection Coating by Hydrothermal Treatment of Aluminum Films and Their Stabilization by Dehydration (2013)
  • Author(s): Aki Egashira, Takuji Ube, Yusuke Hosoki, Takashi Harumoto and Takashi Ishiguro
  • Journal Title: MATERIALS TRANSACTIONS Volume: 54 Issue: 6 Pages: 1025-1028
  • DOI: 10.2320/matertrans.M2013026
  • NAID: 10031176428
  • ISSN: 1345-9678, 1347-5320
  • Peer Reviewed
• [Presentation] 水中FT-IR 測定と第一原理計算による水中分子の振動状態可視化技術 (2013)
  • Author(s): 宇部卓司, 石塚徹, 渡邊雅之, 春本高志, 石黒孝
  • Organizer: 2013 Biomedical Interface Workshop
  • Place of Presentation: 沖縄県宮古島マリンターミナル
• [Presentation] Fe, Co, Ni遷移金属膜の高温高圧水熱反応 (2013)
  • Author(s): 冨永知宏、石塚徹、春本高志、石黒孝
  • Organizer: 2013年日本金属学会春期大会
  • Place of Presentation: 東京理科大学(神楽坂キャンパス)
• [Presentation] メゾスコピック凹凸アルミナ表面形成によるガラスの高透過率化 (2013)
  • Author(s): 阿曽亮介、春本高志、石黒孝
  • Organizer: 2013年日本金属学会春期大会
  • Place of Presentation: 東京理科大学(神楽坂キャンパス)
• [Presentation] Fe, Co, Ni遷移金属膜の高温高圧水熱反応 (2013)
  • Author(s): 冨永知宏、石塚徹、春本高志、石黒孝
  • Organizer: 2013年日本金属学会春期大会
  • Place of Presentation: 東京理科大学（神楽坂キャンパス）
• [Presentation] メゾスコピック凹凸アルミナ表面形成によるガラスの高透過率化 (2013)
  • Author(s): 阿曽亮介、春本高志、石黒孝
  • Organizer: 2013年日本金属学会春期大会
  • Place of Presentation: 東京理科大学（神楽坂キャンパス）
• [Presentation] In-situ Infrared Spectroscopic Study of Hydrogen Bonds in Supercritical Water and Methanol (2012)
  • Author(s): Takuji Ube, Takashi Harumoto, and Takashi Ishiguro
  • Organizer: 2012 TAIWAN-JAPAN SYMPOSIUM ON POLYSCALE TECHNOLOGIES FOR BIOMEDICAL ENGINEERING AND ENVIRONMENTAL SCIENCES (PT-BMES 2012)
  • Place of Presentation: National Tsing Hua University, Hsinchu, Taiwan
  • Year and Date: 2012-09-05
• [Presentation] Transmission FT-IR Spectroscopy of ATP-Mg Complex in Aqueous Solution (2012)
  • Author(s): Masayuki Watanabe, Takuji Ube, Koji Tamura, Shin Aoki, Takashi Harumoto, and Takashi Ishiguro
  • Organizer: 2012 TAIWAN-JAPAN SYMPOSIUM ON POLYSCALE TECHNOLOGIES FOR BIOMEDICAL ENGINEERING AND ENVIRONMENTAL SCIENCES (PT-BMES 2012)
  • Place of Presentation: National Tsing Hua University, Hsinchu, Taiwan
  • Year and Date: 2012-09-05
• [Presentation] 水中における赤外分光のためのシリコンスペーサーの開発 (2012)
  • Author(s): 坂本良介、宇部卓司、石黒孝、早瀬仁則
  • Organizer: 東京理科大学 総合研究機構 がん医療基盤科学技術研究センター 第二回CTCワークショップ
  • Place of Presentation: 東京理科大学
  • Year and Date: 2012-04-28
• [Presentation] 水・酸素 大気圧プラズマによる金属膜改質 (2012)
  • Author(s): 江頭亜紀, 北野勝久, 宇部卓司, 佐藤和裕, 春本高志, 石黒孝
  • Organizer: 2012年日本金属学会秋期(第151回)大会
  • Place of Presentation: 愛媛大学
• [Presentation] 過冷却水中Mg水和反応その場・透過赤外吸収スペクトル測定 (2012)
  • Author(s): 宇部卓司, 佐藤和裕, 春本高志, 石黒孝
  • Organizer: 2012年日本金属学会秋期(第151回)大会
  • Place of Presentation: 愛媛大学
• [Presentation] Mg膜の低温水による膜改質 (2012)
  • Author(s): 佐藤和裕, 宇部卓司, 春本高志, 石黒孝
  • Organizer: 2012年日本金属学会秋期(第151回)大会
  • Place of Presentation: 愛媛大学
• [Presentation] 水・酸素 大気圧プラズマによる金属膜改質 (2012)
  • Author(s): 江頭亜紀, 北野勝久, 宇部卓司, 佐藤和裕, 春本高志, 石黒孝
  • Organizer: 2012年日本金属学会秋期（第151回）大会
  • Place of Presentation: 愛媛大学
• [Presentation] 過冷却水中Mg水和反応その場･透過赤外吸収スペクトル測定 (2012)
  • Author(s): 宇部卓司, 佐藤和裕, 春本高志, 石黒孝
  • Organizer: 2012年日本金属学会秋期（第151回）大会
  • Place of Presentation: 愛媛大学
• [Presentation] Antireflection Coating of γ-alumina with Gradient-refractive Index Structure (2011)
  • Author(s): Yusyke Hosoki, Takuji Ube, and Takashi Ishiguro
  • Organizer: ISES Solar World Congress 2011
  • Place of Presentation: Congress Palais in Kassel, Germany
• [Presentation] In-situ Infrared Spectroscopy of Reaction between Aluminum Thin Film and Ultrapure Water (2011)
  • Author(s): Takuji Ube and Takashi Ishiguro
  • Organizer: 12th International Union of Materials Reserch Societies International Conference in Asia 2011
  • Place of Presentation: Taipei World TradeCenter Nangang Exhibition Hall, Taiwan
• [Presentation] Formation of Antireflection Coating by Hydrothermal Treatment of Al Films (2011)
  • Author(s): Aki Egashira, Takuji Ube, and Takashi Ishiguro
  • Organizer: 12th International Union of Materials Reserch Societies International Conference in Asia 2011
  • Place of Presentation: Taipei World TradeCenter Nangang Exhibition Hall, Taiwan
• [Presentation] In-situ Infrared Spectroscopy of Reaction between Aluminum Thin Film and Ultrapure Water (2011)
  • Author(s): Takuji Ube, Takashi Ishiguro
  • Organizer: 12^<th> International Union of Materials Reserch Societies International Conference in Asia 2011
  • Place of Presentation: Taipei World Trade Center Nangang Exhibition Hall, Taiwan
• [Presentation] Formation of Antireflection Coating by Hydrothermal Treatment of Al Films (2011)
  • Author(s): Aki Egashira, Takuji Ube, Takashi Ishiguro
  • Organizer: 12^<th> International Union of Materials Reserch Societies International Conference in Asia 2011
  • Place of Presentation: Taipei World Trade Center Nangang Exhibition Hall, Taiwan
• [Presentation] DLC-coated Substrate for Infrared Absorption Spectroscopy in Supercritical Water (2010)
  • Author(s): Takuji Ube and Takashi Ishiguro
  • Organizer: Materials Research Society Fall Meeting 2010
  • Place of Presentation: Boston, MA USA
• [Presentation] 超臨界水の赤外吸収スペクトル測定及び可視光・その場観察. (2010)
  • Author(s): 宇部卓司、石黒 孝
  • Organizer: 2010年日本金属学会秋期大会
  • Place of Presentation: 北海道大学
• [Presentation] In-situ FT-IR Spectroscopy of Water and Adenosine Triphosphate Solution (2010)
  • Author(s): Takuji Ube, Marina Kamogawa, and Takashi Ishiguro
  • Organizer: 2010 Taiwan-Japan Symposium on Polyscale Technologies for Biomedical Engineering and Environmental Science
  • Place of Presentation: National Tsing University(Hsinchu・Taiwan)
• [Presentation] 超臨界水の赤外吸収スペクトル測定及び可視光・その場観察 (2010)
  • Author(s): 宇部卓司、石黒孝
  • Organizer: 2010年日本金属学会秋期大会
  • Place of Presentation: 北海道大学
• [Presentation] In-situ FT-IR Spectroscopy of Water and Adenosine Triphosphate Solution (2010)
  • Author(s): Takuji Ube, Marina Kamogawa, Takashi Ishiguro
  • Organizer: 2010 Taiwan-Japan Symposium on Polyscale Technologies for Biomedical Engineering and Environmental Science
  • Place of Presentation: National Tsing University (Hsinchu・Taiwan)
• [Presentation] 水中における赤外分光のためのシリコンスペーサーの開発
  • Author(s): 坂本良介、宇部卓司、石黒孝、早瀬仁則
  • Organizer: 東京理科大学 総合研究機構 がん医療基盤科学技術研究センター 第二回CTCワークショップ
  • Place of Presentation: 東京理科大学
• [Presentation] Transmission FT-IR Spectroscopy of ATP-Mg Complex in Aqueous Solution
  • Author(s): Masayuki Watanabe, Takuji Ube, Koji Tamura, Shin Aoki, Takashi Harumoto, and Takashi Ishiguro
  • Organizer: 2012 TAIWAN-JAPAN SYMPOSIUM ON POLYSCALE TECHNOLOGIES FOR BIOMEDICAL ENGINEERING AND ENVIRONMENTAL SCIENCES (PT-BMES 2012)
  • Place of Presentation: 2012 TAIWAN-JAPAN SYMPOSIUM ON POLYSCALE TECHNOLOGIES FOR BIOMEDICAL ENGINEERING AND ENVIRONMENTAL SCIENCES (PT-BMES 2012)