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Development of nitride semiconductor substrate by using the reaction in high density medium

Research Project

Project/Area Number 22656170
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Metal making engineering
Research InstitutionTohoku University

Principal Investigator

SATO Yuzuru  東北大学, 大学院・工学研究科, 教授 (80108464)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥3,520,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥420,000)
Fiscal Year 2011: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2010: ¥1,700,000 (Direct Cost: ¥1,700,000)
Keywords結晶育成 / 窒化物 / 化合物半導体 / 溶融塩 / 窒化物半導体 / 窒化アルミニウム / 反応媒体 / 半導体基板 / 熱化学反応
Research Abstract

Although AlN semi-conductor is promising for UV emitting device, power, significant power semi-conductors etc., it is not yet practically realized because the substrate made of AlN is not yet produced. In this work, it was tried to synthesize AlN by reacting Al metal with N_2 or NH_3 in the fluoride molten salts which was expected to remove the stable oxide film formed on the Al metal to promote the nitriding reaction. As the results, it was confirmed that the nitriding reaction was successfully brought forward even if the temperature was under the melting point of Al.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (4 results)

All 2012 2011 2010 Other

All Presentation (4 results)

  • [Presentation] 溶融弗化物を共存させた窒化アルミニウム合成法の検討2012

    • Author(s)
      高木幸之輔、竹田修、佐藤讓
    • Organizer
      第43回溶融塩化学討論会
    • Place of Presentation
      横浜国立大学
    • Year and Date
      2012-03-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] 溶融弗化物を共存させた窒化アルミニウム合成法の検討2011

    • Author(s)
      高木幸之輔、竹田修、佐藤讓
    • Organizer
      第43回溶融塩化学討論会
    • Place of Presentation
      大阪大学中之島センター
    • Year and Date
      2011-11-21
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] Ta-Zn系化合物の生成に関する研究2010

    • Author(s)
      小野寺清孝、竹田修、佐藤譲
    • Organizer
      第42回溶融塩化学討論会
    • Place of Presentation
      ロジワールホテル(函館)
    • Year and Date
      2010-09-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] 溶融弗化物を用いた窒化アルミニウムの合成

    • Author(s)
      高木幸之輔、竹田修、佐藤讓
    • Organizer
      日本金属学会2012年春期(第150回)大会
    • Place of Presentation
      横浜国立大学
    • Related Report
      2011 Final Research Report

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Published: 2010-08-23   Modified: 2016-04-21  

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