In-situ surface figure correction system for soft X-ray mirrors
| Project/Area Number |
22686017
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
MIMURA Hidekazu 東京大学, 大学院・工学系研究科, 准教授 (30362651)
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
|
| Budget Amount *help |
¥26,130,000 (Direct Cost: ¥20,100,000、Indirect Cost: ¥6,030,000)
Fiscal Year 2012: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2011: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
Fiscal Year 2010: ¥14,560,000 (Direct Cost: ¥11,200,000、Indirect Cost: ¥3,360,000)
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| Keywords | X 線ミラー / 軟 X 線 / 超精密加工 / 計測 / X線ミラー / 軟X線 / ナノ精度 / 形状修正 / 成膜 |
|---|
| Research Abstract |
Ellipsoidal mirror is the most promising optical devise to realize soft X-ray nanobeam. In this project, a method for designing the shape was constructed. Then, fabrication process consisting on machining, measurement and replication were completed. From these results, highly accurate ellipsoidal mirrors could be fabricated.
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Report
(4 results)
Research Products
(47 results)
