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Development of deep ultraviolet LED and LD on nitride semiconductor

Research Project

Project/Area Number 22760017
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Applied materials science/Crystal engineering
Research InstitutionThe Institute of Physical and Chemical Research

Principal Investigator

FUJIKAWA Sachie  独立行政法人理化学研究所, テラヘルツ量子素子研究チーム, 基礎科学特別研究員 (90550327)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2010: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
KeywordsDUV-LED / AlN / AlGaN / sapphire / MOCVD / LED / サファイア / Si基板
Research Abstract

I demonstrated high-efficiency 270nm band AlGaN based deep-ultraviolet(DUV) LEDs grown by low-pressure metal-organic chemical-vapor deposition(LP-MOCVD). The high efficiency DUV-LEDs were achieved by using a-axis oriented c-plane sapphire substrates in order to obtain a high quality AlN, introducing the light-doping of Si to AlGaN quantum well emitting region, using the multi quantum barriers layer, optimizing the band lineup and so on. As a result, I made found growing the easily good AlN surface. Additionally, the maximum light output power and maximum external quantum efficiency of DUV-LEDs were 33mW and about 4%, respectively.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (45 results)

All 2012 2011 2010

All Journal Article (6 results) (of which Peer Reviewed: 5 results) Presentation (37 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] High-Efficiency AlGaN Deep-UV LEDs fabricated on a-and m-axis oriented c-plane sapphire substrates2012

    • Author(s)
      S. Fujikawa, H. Hirayama and N. Maeda
    • Journal Title

      physica status solidi(c)

      Volume: Vol.9, Issue 3-4 Pages: 790-793

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] High-efficiency AlGaN deep-UV LEDs fabricated on a- and m-axis oriented c-plane sapphire substrates2012

    • Author(s)
      Sachie Fujikawa, Hideki Hirayama, Noritoshi Maeda
    • Journal Title

      physica status solidi (c)

      Volume: 9 Issue: 3-4 Pages: 790-793

    • DOI

      10.1002/pssc.201100453

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 284-300nm Quaternary InAlGaN based Deep Ultraviolet Light-Emitting Diodes on Si(111) Substrates2011

    • Author(s)
      S. Fujikawa, H. Hirayama
    • Journal Title

      Applied Physics Express

      Volume: 4 Pages: 61002-61002

    • NAID

      10028999982

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] m軸およびa軸オフ角C面サファイア基板上のAlN結晶成長の特徴と高出力AlGaN深紫外LEDの作製2011

    • Author(s)
      前田哲利,藤川紗千恵,平山秀樹
    • Journal Title

      信学技報

      Volume: vol.111, no.292 Pages: 107-112

    • NAID

      10031103582

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] 応用物理2011

    • Author(s)
      平山秀樹、藤川紗千恵、塚田悠介、鎌田憲彦
    • Journal Title

      AlGaN系深紫外LEDの進展と展望

      Volume: 4月号

    • Related Report
      2011 Final Research Report
  • [Journal Article] 284-300nm Quaternary InAlGaN based Deep Ultraviolet Light-Emitting Diodes on Si (111) Substrates2011

    • Author(s)
      S.Fujikawa, H.Hirayama
    • Journal Title

      Applied Physics Express

      Volume: 4 Issue: 6 Pages: 061002-061002

    • DOI

      10.1143/apex.4.061002

    • NAID

      10028999982

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] マイクロステップ制御による深紫外LEDの作製2011

    • Author(s)
      藤川紗千恵,平山秀樹,前田哲利
    • Organizer
      公益社団法人応用物理学会結晶工学分科会主催2011年・年末講演会
    • Place of Presentation
      学習院,東京
    • Year and Date
      2011-12-15
    • Related Report
      2011 Final Research Report
  • [Presentation] マイクロステップ制御による深紫外LEDの作製2011

    • Author(s)
      藤川紗千恵
    • Organizer
      2011年応用物理結晶工学分科会
    • Place of Presentation
      学習院大(東京都)
    • Year and Date
      2011-12-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] a軸およびm軸傾斜サファイア基板上に作製した高効率AlGaN深紫外LED2011

    • Author(s)
      藤川紗千恵,前田哲利,平山秀樹
    • Organizer
      CREST「新機能創成に向けた光・光量子科学技術」研究領域第4回公開シンポジウム「光・光量子科学技術の新展開」
    • Place of Presentation
      日本科学未来館
    • Year and Date
      2011-12-02
    • Related Report
      2011 Final Research Report
  • [Presentation] Si基板上InAlGaN系深紫外LEDの進展2011

    • Author(s)
      藤川紗千恵,平山秀樹
    • Organizer
      CREST「新機能創成に向けた光・光量子科学技術」研究領域第4回公開シンポジウム「光・光量子科学技術の新展開」
    • Place of Presentation
      日本科学未来館
    • Year and Date
      2011-12-02
    • Related Report
      2011 Final Research Report
  • [Presentation] Si基板上InAlGaN系深紫外LEDの進展2011

    • Author(s)
      藤川紗千恵
    • Organizer
      CREST「新機能創成に向けた光・光量子科学技術」研究領域第4回公開シンポジウム光・光量子科学技術の新展開」
    • Place of Presentation
      日本科学未来館(東京都)
    • Year and Date
      2011-12-02
    • Related Report
      2011 Annual Research Report
  • [Presentation] a軸およびm軸傾斜サファイア基板上に作製した高効率AlGaN深紫外LED2011

    • Author(s)
      藤川紗千恵
    • Organizer
      CREST「新機能創成に向けた光・光量子科学技術」研究領域第4回公開シンポジウム光・光量子科学技術の新展開」
    • Place of Presentation
      日本科学未来館(東京都)
    • Year and Date
      2011-12-02
    • Related Report
      2011 Annual Research Report
  • [Presentation] Enhancement of Light Extraction Efficiency of Deep UV-LEDs using Photonic Nano-structures2011

    • Author(s)
      S. Fujikawa, H. Hirayama, Y. Kajima
    • Organizer
      The 2011 Nano Science Joint Laboratory Form
    • Place of Presentation
      RIKEN
    • Year and Date
      2011-11-25
    • Related Report
      2011 Final Research Report
  • [Presentation] Enhancement of Light Extraction Efficiency of Deep UV-LEDs using Photonic Nano-structures2011

    • Author(s)
      Sachie Fujikawa
    • Organizer
      The 2011 Nano Science Joint Laboratory Form
    • Place of Presentation
      理研(埼玉県和光市)
    • Year and Date
      2011-11-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] AlGaN系高効率深紫外LEDの開発2011

    • Author(s)
      藤川紗千恵
    • Organizer
      日本学術会議主催公開シンポジウム第2回先端フォトニクスの展望
    • Place of Presentation
      東京
    • Year and Date
      2011-10-07
    • Related Report
      2011 Final Research Report
  • [Presentation] AlGaN系高効率深紫外LEDの開発2011

    • Author(s)
      藤川紗千恵
    • Organizer
      日本学術会議主催公開シンポジウム第2回先端フォトニクスの展望
    • Place of Presentation
      日本学術会議講(東京都)
    • Year and Date
      2011-10-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] InAlGaN4元混晶からの深紫外高IQEの観測と殺菌波長帯高出力LEDの実現2011

    • Author(s)
      藤川紗千恵,平山秀樹
    • Organizer
      文部科学省科学研究費補助金特定領域研究「窒化物光半導体のフロンティア-材料潜在能力の極限発現-」
    • Place of Presentation
      東京
    • Year and Date
      2011-08-03
    • Related Report
      2011 Final Research Report
  • [Presentation] InAlGaN4元混晶からの深紫外高IQEの観測と殺菌波長帯高出力LEDの実現2011

    • Author(s)
      藤川紗千恵
    • Organizer
      文部科学省科学研究費補助金特定領域研究「窒化物光半導体のフロンティア-材料潜在能力の極限発現-」
    • Place of Presentation
      東京ガーデンパレス(東京都)
    • Year and Date
      2011-08-03
    • Related Report
      2011 Annual Research Report
  • [Presentation] High-Efficiency AlGaN Deep-UV LEDs fabricated on a-and m-axis oriented c-plane sapphire substrates2011

    • Author(s)
      S. Fujikawa, H. Hirayama, N. Maeda
    • Organizer
      9th International Conference on Nitride Semiconductors(ICNS-9)
    • Place of Presentation
      Glasgow UK
    • Year and Date
      2011-07-13
    • Related Report
      2011 Final Research Report
  • [Presentation] High-Efficiency AlGaN Deep-UV LEDs fabricated on a- and m-axis oriented c-plane sapphire substrates2011

    • Author(s)
      Sachie Fujikawa
    • Organizer
      9th International Conference on Nitride Semicond uctors (ICNS-9)
    • Place of Presentation
      Glasgow, UK
    • Year and Date
      2011-07-13
    • Related Report
      2011 Annual Research Report
  • [Presentation] 殺菌への実用を目指したSi基板上深紫外LEDの実現2011

    • Author(s)
      藤川紗千恵、平山秀樹
    • Organizer
      第12回理研・分子研合同シンポジウムエクストリームフォトニクス研究
    • Place of Presentation
      理研
    • Year and Date
      2011-06-30
    • Related Report
      2011 Final Research Report
  • [Presentation] 殺菌への実用を目指したSi基板上深紫外LEDの実現2011

    • Author(s)
      藤川紗千恵
    • Organizer
      第12回理研・分子研合同シンポジウム エクストリームフォトニクス研究
    • Place of Presentation
      理研(埼玉県和光市)
    • Year and Date
      2011-06-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] 窒化物半導体を用いた深紫外LEDの開発2011

    • Author(s)
      藤川紗千恵,平山秀樹
    • Organizer
      第3回窒化物半導体結晶成長講演会
    • Place of Presentation
      九州大
    • Year and Date
      2011-06-18
    • Related Report
      2011 Final Research Report
  • [Presentation] 窒化物半導体を用いた深紫外LEDの開発2011

    • Author(s)
      藤川紗千恵
    • Organizer
      第3回窒化物半導体結晶成長講演会
    • Place of Presentation
      九州大学(福岡県春日市)(奨励賞受賞講演)
    • Year and Date
      2011-06-18
    • Related Report
      2011 Annual Research Report
  • [Presentation] High-Efficiency AlGaN Deep-UV LEDs fabricated on a-and m-axis oriented c-plane sapphire substrates2011

    • Author(s)
      S. Fujikawa, H. Hirayama and N. Maeda
    • Organizer
      5th Asia-Pacific Workshop on Widegap Semiconductors(APWS-2011)
    • Place of Presentation
      Toba, Mie
    • Year and Date
      2011-05-25
    • Related Report
      2011 Final Research Report
  • [Presentation] High-Efficiency AlGaN Deep-UV LEDs fabricated on a- and m-axis oriented c-plane sapphire substrates2011

    • Author(s)
      Sachie Fujikawa
    • Organizer
      5th Asia-Pacific Workshop on Widegap Semiconductors (APWS-2011)
    • Place of Presentation
      Ise-Shima National Park(三重県鳥羽市)
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] a軸方向傾斜c面サファイア上に作製した高効率深紫外LED2011

    • Author(s)
      藤川紗千恵,平山秀樹,前田哲利
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大
    • Year and Date
      2011-03-24
    • Related Report
      2011 Final Research Report
  • [Presentation] a軸方向傾斜c面サファイア上に作製した高効率深紫外LED2011

    • Author(s)
      藤川紗千恵
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川県厚木市(神奈川工科大)
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] InAlGaN4元混晶を用いた280nm帯殺菌用途深紫外LEDの進展2010

    • Author(s)
      藤川紗千恵,平山秀樹
    • Organizer
      新機能創成に向けた光・光量子科学技術,研究領域光・光量子科学技術の進展開第3回公開シンポジウム
    • Place of Presentation
      日本科学未来館
    • Year and Date
      2010-11-26
    • Related Report
      2011 Final Research Report
  • [Presentation] InAlGaN4元混晶を用いた280nm帯殺菌用途深紫外LEDの進展2010

    • Author(s)
      藤川紗千恵
    • Organizer
      「新機能創成に向けた光・光量子科学技術」研究領域光・光量子科学技術の進展開 第3回公開シンポジウム
    • Place of Presentation
      東京(日本科学未来館)
    • Year and Date
      2010-11-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si基板上280nm帯InAlGaN深紫外LED2010

    • Author(s)
      藤川紗千恵,平山秀樹
    • Organizer
      窒化物ナノ・エレクトロニクス材料研究センター講演会
    • Place of Presentation
      東北大
    • Year and Date
      2010-11-04
    • Related Report
      2011 Final Research Report
  • [Presentation] Si基板上280nm帯InAlGaN深紫外LED2010

    • Author(s)
      藤川紗千恵
    • Organizer
      窒化物ナノ・エレクトロニクス材料研究センター講演会
    • Place of Presentation
      宮城県仙台市(東北大)
    • Year and Date
      2010-11-04
    • Related Report
      2010 Annual Research Report
  • [Presentation] First Achievement of Deep-UV LED on Si substrate2010

    • Author(s)
      S. Fujikawa, H. Hirayama
    • Organizer
      2010 IEEE International Semiconductor Laser Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      2010-09-27
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Presentation] Realization of InAlGaN-based deep UV LEDs on Si(111) substrates2010

    • Author(s)
      S. Fujikawa, H. Hirayama
    • Organizer
      International Workshop on Nitride semiconductors(IWN2010)
    • Place of Presentation
      Tampa, Florida, U. S. A.
    • Year and Date
      2010-09-21
    • Related Report
      2011 Final Research Report
  • [Presentation] Realization of InAlGaN-based deep UV LEDs on Si (111) substrates2010

    • Author(s)
      Sachie Fujikawa
    • Organizer
      International Workshop on Nitride semiconductors (IWN2010)
    • Place of Presentation
      Tampa, Florida, U.S.A.
    • Year and Date
      2010-09-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si基板上280nm帯InAlGaN深紫外LED2010

    • Author(s)
      藤川紗千恵,平山秀樹
    • Organizer
      2010年秋季第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大
    • Year and Date
      2010-09-16
    • Related Report
      2011 Final Research Report
  • [Presentation] Si基板上280nm帯InAlGaN深紫外LED2010

    • Author(s)
      藤川紗千恵
    • Organizer
      2010年秋季第71回応用物理学会学術講演会
    • Place of Presentation
      長崎県長崎市(長崎大)
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] 280nm-band InAlGaN deep-UV LED on Silicon(111) substrate2010

    • Author(s)
      S. Fujikawa, H. Hirayama
    • Organizer
      Third International Symposium on Growth ofIII-Nitrides(ISGN-3)
    • Place of Presentation
      Montpellier, France
    • Year and Date
      2010-07-05
    • Related Report
      2011 Final Research Report
  • [Presentation] 280nm-band InAlGaN deep-UV LED on Silicon (111) substrate2010

    • Author(s)
      Sachie Fujikawa
    • Organizer
      Third International Symposium on Growth of III-Nitrides (ISGN-3)
    • Place of Presentation
      Montpellier, France
    • Year and Date
      2010-07-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si基板上280nm帯InAlGaN深紫外LEDの実現2010

    • Author(s)
      藤川紗千恵,平山秀樹
    • Organizer
      第2回窒化物半導体結晶成長講演会「窒化物半導体結晶成長の新しい流れ」
    • Place of Presentation
      三重大
    • Year and Date
      2010-05-14
    • Related Report
      2011 Final Research Report
  • [Presentation] Si基板上280nm帯InAlGaN深紫外LEDの実現2010

    • Author(s)
      藤川紗千恵
    • Organizer
      第2回 窒化物半導体結晶成長講演会「窒化物半導体結晶成長の新しい流れ」
    • Place of Presentation
      三重県津市(三重大)
    • Year and Date
      2010-05-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] InAlGaN4元混晶を用いた高出力深紫外LEDの実現2010

    • Author(s)
      藤川紗千恵
    • Organizer
      日本学術会議主催公開シンポジウム先端フォトニクスの展望
    • Place of Presentation
      東京
    • Year and Date
      2010-04-09
    • Related Report
      2011 Final Research Report
  • [Presentation] InAlGaN4元混晶を用いた高出力深紫外LEDの実現2010

    • Author(s)
      藤川紗千恵
    • Organizer
      日本学術会議主催 公開シンポジウム 先端フォトニクスの展望
    • Place of Presentation
      東京
    • Year and Date
      2010-04-09
    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] 発光素子及びその製造方法2011

    • Inventor(s)
      平山秀樹、藤川紗千恵、鹿嶋行雄、松浦恵里子、西原浩巳、田代貴晴、大川貴史、尹成圓
    • Industrial Property Rights Holder
      平山秀樹、藤川紗千恵、鹿嶋行雄、松浦恵里子、西原浩巳、田代貴晴、大川貴史、尹成圓
    • Filing Date
      2011-07-12
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] 発光素子及びその製造方法2011

    • Inventor(s)
      藤川紗千恵、平山秀樹、鹿嶋行雄、松浦恵里子、西原浩巳、田代貴晴、大川貴史、尹成圓
    • Industrial Property Rights Holder
      藤川紗千恵、平山秀樹、鹿嶋行雄、松浦恵里子、西原浩巳、田代貴晴、大川貴史、尹成圓
    • Industrial Property Number
      2011-154276
    • Filing Date
      2011-07-12
    • Related Report
      2011 Annual Research Report

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Published: 2010-08-23   Modified: 2016-04-21  

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