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Novel high magnification imaging objective for soft X-ray video microscopy with sub-100nm spatial resolution

Research Project

Project/Area Number 22760020
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionTohoku University

Principal Investigator

TOYODA Mitsunori  東北大学, 多元物質科学研究所, 助教 (40375168)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2011: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2010: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords軟X線 / 顕微鏡 / 対物鏡 / 非球面 / 多層膜 / 光学設計 / 収差論 / 多層膜ミラー / 反射光学系
Research Abstract

A soft-X-ray microscope is expected as a novel tool to observe a high definition image of a living tissue with a spatial resolution better than 100 nm. In this study, we propose innovative solutions for high magnification soft X-ray microscopy, based on two-stage imaging optics for focal length reduction. Novel optics consisted of aspherical mirrors allow one to enhance a magnification of a laboratory based soft X-ray microscope over 1000x, where movies with diffraction limited resolution can be observed with an X-ray CCD. The design example having a numerical aperture of 0. 25 was successfully demonstrated both a high magnification and a large misalignment tolerance.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (17 results)

All 2011 2010 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results) Presentation (8 results) Remarks (1 results)

  • [Journal Article] Closed-Form Representations for Third-Order Aberrations of Two-Aspherical Mirror Aplanats with the Mirror Tilt and Decenter2011

    • Author(s)
      M. Toyoda
    • Journal Title

      Opt. Rev

      Volume: 18 Pages: 441-447

    • NAID

      10030156546

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Aplanatic Three-Mirror Objective for High-Magnification Soft X-Ray Microscopy2011

    • Author(s)
      M. Toyoda, T. Jinno, and M. Yanagihara
    • Journal Title

      AIP Conf. Proc

      Volume: 1365 Pages: 176-179

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Aplanatic Three-Mirror Objective for High-Magnification Soft X-Ray Microscopy2011

    • Author(s)
      M.Toyoda, T.Jinno, M.Yanagihara
    • Journal Title

      AIP Conference Proceedings

      Volume: 1365 Pages: 176-179

    • DOI

      10.1063/1.3625333

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Closed-Form Representations for Third-Order Aberrations of Two-Aspherical Mirror Aplanats with the Mirror Tilt and Decenter2011

    • Author(s)
      M.Toyoda
    • Journal Title

      Optical Review

      Volume: 18 Pages: 441-447

    • NAID

      10030156546

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms2010

    • Author(s)
      T. Ejima, F. Ishida, H. Murata, M. Toyoda, T. Harada, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto, H. Mizutani
    • Journal Title

      Opt. Express

      Volume: 18 Pages: 7203-7209

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical investigation of the meaning of odd-order aspherical surface and numerical confirmation of effectiveness in rotational-symmetric but off-axis optics2010

    • Author(s)
      Masato Shibuya, Kazuhisa Maehara, Yoshihito Ishikawa, Akira Takada, Kei Kobayashi, Mitsunori Toyoda, Masanori Tanikawa, Suezou Nakadate
    • Journal Title

      Opt. Eng

      Volume: 49(7) Pages: 73003-73003

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical investigation of the meaning of odd-order aspherical surface and numerical confirmation of effectiveness in rotational-symmetric but off-axis optics2010

    • Author(s)
      M.Shibuya, M.Toyoda, et.al.
    • Journal Title

      Opt.Eng.

      Volume: 49 Pages: 73003-73003

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms2010

    • Author(s)
      T.Ejima, M.Toyoda, et.al.
    • Journal Title

      Opt.Express

      Volume: 18 Pages: 7203-7209

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] 軟X線多層膜による高倍率対物鏡の開発と生体試料観察への展開2011

    • Author(s)
      豊田光紀
    • Organizer
      先端計測シンポジウム
    • Place of Presentation
      仙台
    • Year and Date
      2011-03-03
    • Related Report
      2011 Final Research Report
  • [Presentation] 軟X線多層膜光学系による顕微鏡開発の現状とコヒーレント軟X線集光への展開2010

    • Author(s)
      豊田光紀
    • Organizer
      第11回エクストリームフォトニクス研究
    • Place of Presentation
      理化学研究所
    • Year and Date
      2010-10-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] 軟X線多層膜光学系による顕微鏡開発の現状とコヒーレント軟X線集光への展開2010

    • Author(s)
      豊田光紀
    • Organizer
      第11回エクストリームフォトニクス研究
    • Place of Presentation
      和光市
    • Related Report
      2011 Final Research Report
  • [Presentation] フレネル数の小さい軟X線用顕微光学系の結像特性2010

    • Author(s)
      豊田光紀, 倉光康太, 柳原美廣
    • Organizer
      第35回光学シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2011 Final Research Report
  • [Presentation] 軟X線用高倍率対物鏡の結像特性2010

    • Author(s)
      豊田光紀, 倉光康太, 柳原美広
    • Organizer
      応用物理学会学術講演会
    • Place of Presentation
      長崎市
    • Related Report
      2011 Final Research Report
  • [Presentation] Development of Wide Field of View EUV Microscope Using Normal-Incident Multilayer Optics with LPP Light Source2010

    • Author(s)
      F. Ishida, T. Ejima, M. Toyoda, T. Tsuru, T. Hatano, M. Yanagihara, H. Mizutani
    • Organizer
      The 10th international conference on x-ray microscopy
    • Place of Presentation
      USA, Chicago
    • Related Report
      2011 Final Research Report
  • [Presentation] Novel multilayer-mirror optics for a whole tissue imaging2010

    • Author(s)
      M. Toyoda, T. Jinno, T. Harada, T. Hatano, M. Yanagihara
    • Organizer
      The 10th international conference on x-ray microscopy
    • Place of Presentation
      Chicago
    • Related Report
      2011 Final Research Report
  • [Presentation] Super-Hierarchical Microscope in EUV Region2010

    • Author(s)
      T. Ejima, M. Toyoda, T. Tsuru, T. Hatano, M. Yanagihara
    • Organizer
      The 10th international conference on x-ray microscopy
    • Place of Presentation
      USA, Chicago
    • Related Report
      2011 Final Research Report
  • [Remarks]

    • URL

      http://www.tagen.tohoku.ac.jp/modules/laboratory/index.php?laboid=43

    • Related Report
      2011 Final Research Report

URL: 

Published: 2010-08-23   Modified: 2016-04-21  

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