Development of coherence diffraction imaging for high-harmonic-generation EUV source
| Project/Area Number |
22760029
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | University of Hyogo |
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Principal Investigator |
HARADA Tetsuo 兵庫県立大学, 高度産業科学技術研究所, 助教 (30451636)
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| Project Period (FY) |
2010 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2010: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | 応用光学 / EUV / 高次高調波 / コヒーレンス / コヒーレント回折イメージング |
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| Research Abstract |
Image reconstruction method for a lensless microscope was developed to observe EUV-mask patterns. The microscope equipped with standalone EUV source of high harmonic generation, which temporal coherence was not enough to reconstruct the pattern image. To improve the coherence, we fabricated a grating for a monochromator.
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Report
(3 results)
Research Products
(21 results)
