Development of EUV imaging device using ZnO crystal

• Project/Area Number: 22760039
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Applied optics/Quantum optical engineering
• Research Institution: Osaka University
• Principal Investigator: NAKAZATO Tomoharu 大阪大学, レーザーエネルギー学研究センター, 特任研究員 (10467508)
• Project Period (FY): 2010 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000); Fiscal Year 2011: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2010: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
• Keywords: 光学素子 / 装置 / 材料 / EUVイメージング / EUV / シンチレーター / イメージング / ZnO / ワイドバンドギャップ半導体 / EUV光

Research Abstract

Ni-like Ag ion plasma laser was focused to 1μm on ZnO crystal. Emission pattern were successfully recorded by a magnifier which consists of Schwarzschild objective lens, camera lens EB-CCD and two lenses for telescope. The waist radii of emission pattern were 5. 0μm and 4. 7μm in the horizontal and vertical axis, respectively. Spatial resolution is limited by the magnifier. These results show that spatial resolution of this system could reach to sub-micron with selecting two lenses for telescope.

Research Products

• [Journal Article] Evaluation of Soft X-ray Laser with In situ Imaging Device of High Spatial Resolution ZnO Scintillator (2011)
  • Author(s): T.Nakazato, et al
  • Journal Title: Japanese Journal of Applied Physics Volume: 50 Issue: 12R Pages: 122202-122202
  • DOI: 10.1143/jjap.50.122202
  • NAID: 40019140903
  • Peer Reviewed
• [Journal Article] (2010)
  • Author(s): T. Nakazato et al.
  • Journal Title: Jpn. J. Appl. Phys. Volume: 50 Pages: 122202-122202
  • Peer Reviewed
• [Journal Article] (2010)
  • Author(s): K. Yamanoi et al.
  • Journal Title: Opt. Mater Volume: 32 Pages: 1305-1305
  • Peer Reviewed
• [Journal Article] (2010)
  • Author(s): T. Shimizu et al.
  • Journal Title: Rev. Sci. Instrm Volume: 81 Pages: 3102-3102
  • Peer Reviewed
• [Journal Article] Response-time improved hydrothermal-method-grown ZnO scintillator for soft, x-ray free-electron laser timing-observation (2010)
  • Author(s): T.Shimizu, et al.
  • Journal Title: REVIEW OF SCIENTIFIC INSTRUMENTS Volume: 81 Pages: 33102-33102
  • Peer Reviewed
• [Journal Article] Response-time improved hydrothermal-method-grown ZnO scintillator for XFEL timing-observation (2010)
  • Author(s): K.Yamanoi, et al.
  • Journal Title: Optical Materials Volume: 32 Pages: 1305-1308
  • Peer Reviewed
• [Presentation] Potential high-spatial resolution in-situimaging of soft X-ray laser pulseswith ZnO crystal (2011)
  • Author(s): T. Nakazato et al
  • Organizer: 11th International Conference on Inorganic Scintillators and their Applications
  • Place of Presentation: Germany
• [Presentation] Potential high-spatial resolution in-situ imaging of soft X-ray laser pulseswith ZnO crystal (2011)
  • Author(s): T.Nakazato, et al
  • Organizer: 11th International Conference on Inorganic Scintil lators and their Applications
  • Place of Presentation: Giessen, Germany