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Accurate shape and deformation measurement by spatiotemporal phase-shifting method using high dimensional intensity information

Research Project

Project/Area Number 22760071
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Materials/Mechanics of materials
Research InstitutionNational Institute of Advanced Industrial Science and Technology (2011)
Tohoku University (2010)

Principal Investigator

RI Shien  独立行政法人産業技術総合研究所, 計測フロンティア研究部門, 研究員 (70509710)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2010: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords形状変形計測 / 時空間位相シフト法 / 位相解析 / 格子投影法 / FLCOS素子 / 時空位相シフト法 / 高次元輝度情報 / ダウンサンプリング / 位相解析技術 / モアレ縞画像 / 半導体パッケージ / 反り分布計測 / 高次元情報 / 離散フーリエ変換 / サンプリングモアレ法
Research Abstract

A novel phase analysis technique for three-dimensional shape and deformation measurement was proposed, namely, the spatiotemporal phase-shifting method(ST-PSM), which determines phase information of fringe pattern by using high dimensional intensity information in the spatial and temporal domain simultaneously. Simulation and experimental results showed that the phase error caused by random noise of the camera and vibration of the measurement system can be dramatically decreased by the proposed method. As the result, three-dimensional shape and deformation measurement can be performed with the order of micrometer accuracy.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Products Report
  • Research Products

    (23 results)

All 2012 2011 2010 Other

All Journal Article (9 results) (of which Peer Reviewed: 8 results) Presentation (11 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Accurate Measurement of Temperature-Dependent Warpage Distribution of Electronic Packaging Using FLCOS-based Fringe Projection Profilometry2012

    • Author(s)
      S. Ri, T. Muramatsu, M. Saka, H. Tanaka, Y. Okabe, H. Suzuki
    • Journal Title

      Journal of Solid Mechanics and Materilas Engineering

      Volume: 6-6(in press)

    • NAID

      130002072530

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fast and Accurate Shape Measurement System Utilizing the Fringe Projection Method with a Ferroelectric Liquid-Crystal-on-Silicon Microdisplay2012

    • Author(s)
      S. Ri, T. Muramatsu, M. Sakam H. Tanaka
    • Journal Title

      Optical Engineering

      Volume: 51-8 Issue: 8 Pages: 081506-081506

    • DOI

      10.1117/1.oe.51.8.081506

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical Error Analysis of the Sampling Moire Method and Phase Compensation Methodology for Single-shot Phase Analysis2012

    • Author(s)
      S. Ri, T. Muramatsu
    • Journal Title

      Applied Optics

      Volume: 51-16 Issue: 16 Pages: 3214-3223

    • DOI

      10.1364/ao.51.003214

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Accuracy of the Sampling Moire Method and its Application to Deflection Measurements of Large-Scale Structures2012

    • Author(s)
      S. Ri, T. Muramatsu, M. Saka, K. Nanbara, D. Kobayashi
    • Journal Title

      Experimental Mechanics

      Volume: 52-4 Issue: 4 Pages: 331-340

    • DOI

      10.1007/s11340-011-9491-2

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Accurate Measurement of Temperature-Dependent Warpage Distribution of Electronic Packaging Using FLCOS-based Fringe Projection Profilometry2012

    • Author(s)
      S.Ri, T.Muramatsu, M.Saka, H.Tanaka, Y.Okabe, H.Suzuki
    • Journal Title

      Journal of Solid Mechanics and Materials Engineering

      Volume: Vol.6, No.6(印刷中)

    • NAID

      130002072530

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Phase Compensation Technique of Sampling Moire Method for Accurate Single-shot Phase Analysis2011

    • Author(s)
      S. Ri, T. Muramatsu, M. Saka
    • Journal Title

      Applied Mechanics and Materials

      Volume: 70 Pages: 243-248

    • DOI

      10.4028/www.scientific.net/amm.70.243

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Accuracy of the Sampling Moire Method and its Application to Deflection Measurements of Large-Scale Structures2011

    • Author(s)
      S.Ri, T.Muramatsu, M.Saka, K.Nanbara, D.Kobayashi
    • Journal Title

      Experimental Mechanics

      Volume: (掲載決定)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] サンプリングモアレ法による微小変位分布計測技術とその応用2010

    • Author(s)
      李志遠,藤垣元治
    • Journal Title

      実験力学

      Volume: 10-4 Pages: 455-458

    • NAID

      10027693089

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] サンプリングモアレ法による微小変位分布計測技術とその応用2010

    • Author(s)
      李志遠, 藤垣元治
    • Journal Title

      実験力学

      Volume: 10-4 Pages: 71-74

    • NAID

      10027693089

    • Related Report
      2010 Annual Research Report
  • [Presentation] Spatio-Temporal Phase Shifting Method for Accurate Phase Analysis using 2-D Discrete Fourier Transform2012

    • Author(s)
      S. Ri
    • Organizer
      5th Int. Conf. on Optical Measurement Techniques(OPTIMESS2012)
    • Place of Presentation
      ベルギー・アントワープ
    • Year and Date
      2012-04-04
    • Related Report
      2011 Final Research Report
  • [Presentation] Accurate Measurement of Temperature-Dependent Warpage Distribution of Electronic Packaging Using FLCOS-based Fringe Projection Profilometry2011

    • Author(s)
      S. Ri, T. Muramatsu, M. Saka, H. Tanaka, Y. Okabe, H. Suzuki
    • Organizer
      Int. Conf. on Advanced Technology in Experimental Mechanics 2011
    • Place of Presentation
      神戸
    • Year and Date
      2011-09-22
    • Related Report
      2011 Final Research Report
  • [Presentation] Accurate Measurement of Temperature-Dependent Warpage of Electronic Packaging Using FLCOS-based Fringe Projection Profilometry2011

    • Author(s)
      S.Ri, T.Muramatsu, M.Saka, H.Tanaka, Y.Okabe, H.Suzuki
    • Organizer
      International Conference on Advanced Technology in Experimental Mechanics 2011
    • Place of Presentation
      神戸国際会議場
    • Year and Date
      2011-09-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] A Phase Compensation Technique of Sampling Moire Method for Accurate Single-shot Phase Analysis2011

    • Author(s)
      S. Ri, T. Muramatsu, M. Saka
    • Organizer
      BSSM Int. Conf. on Advances in Experimental Mechanics
    • Place of Presentation
      イギリス・エディンバラ
    • Year and Date
      2011-09-08
    • Related Report
      2011 Final Research Report
  • [Presentation] A Phase Compensation Technique of Sampling Moire Method for Accurate Single-shot Phase Analysis2011

    • Author(s)
      S.Ri, T.Muramatsu, M.Saka
    • Organizer
      BSSM International Conference on Advances in Experimental Mechanics
    • Place of Presentation
      イギリス・エディンバラ
    • Year and Date
      2011-09-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] 位相シフト法における誤差伝播の理論解析2011

    • Author(s)
      李志遠,村松尚
    • Organizer
      日本実験力学会2011年度年次講演会
    • Place of Presentation
      奈良
    • Year and Date
      2011-09-01
    • Related Report
      2011 Final Research Report
  • [Presentation] 位相シフト法における誤差伝播の理論解析2011

    • Author(s)
      李志遠, 村松尚
    • Organizer
      日本実験力学会2011年度年次講演会
    • Place of Presentation
      奈良県文化会館
    • Year and Date
      2011-09-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] LCoSマイクロディスプレイを用いた格子投影法による高精度反り分布測定装置の開発2011

    • Author(s)
      村松尚,李志遠,坂真澄
    • Organizer
      日本機械学会東北支部第46期総会・講演会
    • Place of Presentation
      仙台
    • Year and Date
      2011-03-15
    • Related Report
      2011 Final Research Report
  • [Presentation] モアレ法による最新の微小変位分布測定技術と大型構造物への応用2011

    • Author(s)
      李志遠
    • Organizer
      日本非破壊検査協会東北支部・産学官連携研究会
    • Place of Presentation
      仙台
    • Year and Date
      2011-02-17
    • Related Report
      2011 Final Research Report
  • [Presentation] モアレ法による最新の微小変位分布測定技術と大型構造物への応用2011

    • Author(s)
      李志遠
    • Organizer
      日本非破壊検査協会東北支部 産学官連携研究会
    • Place of Presentation
      仙台(特別講演)
    • Year and Date
      2011-02-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高精度な位相解析を実現するサンプリングモアレ法における位相補正手法の開発2010

    • Author(s)
      村松尚,李志遠,坂真澄
    • Organizer
      日本実験力学会2010年度年次講演会
    • Place of Presentation
      長崎
    • Year and Date
      2010-08-18
    • Related Report
      2011 Final Research Report 2010 Annual Research Report
  • [Remarks]

    • URL

      http://unit.aist.go.jp/riif/shmrg/index.html

    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] 高次元輝度情報を用いた縞画像の位相分布解析方法、装置およびそのプログラム2012

    • Inventor(s)
      李志遠
    • Industrial Property Rights Holder
      独立行政法人産業技術総合研究所
    • Industrial Property Number
      2012-057436
    • Filing Date
      2012-03-14
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Patent(Industrial Property Rights)] 高次元輝度情報を用いた縞画像の位相分布解析方法、装置およびそのプログラム2012

    • Inventor(s)
      李志遠
    • Industrial Property Rights Holder
      国立研究開発法人産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-504638
    • Filing Date
      2012-12-20
    • Related Report
      Products Report

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Published: 2010-08-23   Modified: 2016-09-09  

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