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Study about 3D shape evalution method with zero Abbe error for micro parts

Research Project

Project/Area Number 22760091
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Production engineering/Processing studies
Research InstitutionTokyo Institute of Technology

Principal Investigator

EMO Sangin  東京工業大学, 精密工学研究所, 助教 (20551576)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2011: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2010: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Keywords精密位置決め / 加工計測 / 座標測定器 / 光ピンセット
Research Abstract

A novel probing technique for nano-CMM(Coordinate Measuring Machine) is suggested. In this technique, a micro sphere is trapped optically at the tip of the tapered shape of a single optical fiber and used for a touch probe for the nano-CMM. In order to use the trapped micro sphere for the touch probe, intensity changes of the reentered light that is reflected from the surface of the micro sphere and object are used for the probe signal. When the probe is in contact with the surface of the object, the probe position is decentered from the tip of the optical fiber and the intensity of reentered light is changed and used for probe signals. In experiments, the intensity changes are detected by a power meter and applied to be used as the probe signal. Mechanisms of intensity changes are discussed briefly.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (4 results)

All 2011 2010

All Presentation (4 results)

  • [Presentation] 光ファイバトラッピングプローブの感度に関する研究2011

    • Author(s)
      嚴祥仁
    • Organizer
      砥粒加工学会学術講演会(ABTEC2011)
    • Place of Presentation
      芝浦工業大学
    • Year and Date
      2011-09-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] 光ファイバトラッピングプローブのプローブ感度に関する研究2011

    • Author(s)
      高谷裕浩,林照剛
    • Organizer
      2011年度砥粒加工学会学術講演会
    • Place of Presentation
      中部大学
    • Related Report
      2011 Final Research Report
  • [Presentation] Study on the Probe signal of Single Fiber Optical Trapping Probe2010

    • Author(s)
      Eom, Sang In
    • Organizer
      ICMT 2010 Osaka
    • Place of Presentation
      Osaka University
    • Year and Date
      2010-11-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] Study on the probe signal of single fiber optical trapping probe2010

    • Author(s)
      Sang In EOM, Yasuhiro TAKAYA, Terutake HAYASHI
    • Organizer
      The 14th International Conference on Mechatronics Technology
    • Place of Presentation
      大阪大学
    • Related Report
      2011 Final Research Report

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Published: 2010-08-23   Modified: 2016-04-21  

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