| Project/Area Number |
22760183
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Yokohama National University |
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Principal Investigator |
FUCHIWAKI Ohmi 横浜国立大学, 学際プロジェクト研究センター, 特任教員(助教) (20377021)
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| Project Period (FY) |
2010 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2011: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2010: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | 精密機械システム / コンパクト生産システム / 独立三自由度 / 圧電アクチュエーター / 電磁石 / 表面実装技術 / FF/FB制御 / 過渡特性 / 液架橋力 / チップ部品 / 動作補正 / チップ実装 / 微小液滴塗布 / 圧電リニアモータ |
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| Research Abstract |
Purpose of this research is to develop surface mounting technology used by precise 3 DOF omidirectional inchworm mobile mechanism. Achievements of this study are summarized as below,(1) Demonstration of pick & place method used by liquid briding force.(2) We have achieved improvement of the electromagnetic force to increase both of maximum velocity and positioning accuracy.(3) We have studied transient response of the mechanism and calculated optimal shape of the displacement of the piezoelectric actuators. We have also developed FF/FB control to get 0. 05μm positioning resolution for the mechanism in 1 axis. In experiments, we get the settling time down to 0. 05s when the target position is less than 30μm. We have also checked that the mechanism has good positioning repeatability, i. e. 3σof final position is 0. 09μm and average CV is 0. 5%.(4) We show our method has good feasiblity to decrease vibration, energy, size down to 1/1000 of conventional methods.
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