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Planar nanowire field-effect transistors using selective-area epitaxy on(110)

Research Project

Project/Area Number 22760228
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionJapan Advanced Institute of Science and Technology

Principal Investigator

AKABORI Masashi  北陸先端科学技術大学院大学, ナノマテリアルテクノロジーセンター, 助教 (50345667)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2011: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2010: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords選択成長 / (110) / InAs / ナノワイヤ / 電界効果トランジスタ / -110 / トランジスタ
Research Abstract

We formed in-plane InAs nanowires using selective-area molecular beam epitaxy on GaAs(110) masked substrates with a certain condition. Moreover, we fabricated planar nanowire field-effect transistors by conventional lithography. We measured their output and transfer characteristics at room temperature, and magneto-conductivity at low temperatures. Maximum current and trans-conductance are 2. 3A/mm and 4. 9mS/mm, respectively, and spin-orbit coupling is observed.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (7 results)

All 2012 2011

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (5 results)

  • [Journal Article] Selective area molecular beam epitaxy of InAs on GaAs(110) masked substrates for direct fabrication of planar nanowire field-effect transistors2012

    • Author(s)
      M. Akabori, T. Murakami, and S. Yamada
    • Journal Title

      J. Crystal Growth

      Volume: Vol.345 Pages: 22-26

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Selective area molecular beam epitaxy of InAs on GaAs (110) masked substrates for direct fabrication of planar nanowire field-effect transistors2012

    • Author(s)
      M.Akabori, T.Murakami, S.Yamada
    • Journal Title

      J.Crystal Growth

      Volume: 345 Issue: 1 Pages: 22-26

    • DOI

      10.1016/j.jcrysgro.2012.02.009

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Magneto-transport properties of InAs nanowires laterally-grown by selective area molecular beam epitaxy on GaAs(110) masked substrates2012

    • Author(s)
      M. Akabori, and S. Yamada
    • Organizer
      31st International Conference on Semiconductor Physics
    • Place of Presentation
      Zulich, Switzerland
    • Related Report
      2011 Final Research Report
  • [Presentation] 領域選択分子線エピタキシーによるGaAs(001),(111) Bおよび(110)マスク基板上へのInAsナノワイヤ形成2011

    • Author(s)
      赤堀誠志、村上達也、山田省二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形県山形市
    • Related Report
      2011 Final Research Report
  • [Presentation] Selective Area Molecular Beam Epitaxy of InAs Nanowires on Various Oriented GaAs Substrates2011

    • Author(s)
      M. Akabori, T. Murakami, and S. Yamada
    • Organizer
      The 15th International Conference on Modulated Semiconductor Structures
    • Place of Presentation
      Tallahassee, FL, US
    • Related Report
      2011 Final Research Report
  • [Presentation] Selective Area Molecular Beam Epitaxy of InAs Nanowires on Various Oriented GaAs Substrates2011

    • Author(s)
      M.Akabori, T.Murakami, S.Yamada
    • Organizer
      The 15th International Conference on Modulated Semiconductor Structures
    • Place of Presentation
      Tallahassee, FL, USA
    • Related Report
      2011 Annual Research Report
  • [Presentation] 領域選択分子線エピタキシーによるGaAs(001),(111)Bおよび(110)マスク基板上へのInAsナノワイヤ形成2011

    • Author(s)
      赤堀誠志、村上達也、山田省二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形市・山形大学小白川キャンパス
    • Related Report
      2011 Annual Research Report

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Published: 2010-08-23   Modified: 2016-04-21  

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