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Self-organic growth of electric ceramics thin films and reconfigurable rf device applications

Research Project

Project/Area Number 22760230
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionNara Institute of Science and Technology

Principal Investigator

NISHIDA Takashi  奈良先端科学技術大学院大学, 物質創成研究科, 助教 (80314540)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2011: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2010: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywords自己組織化 / ナノテクノロジ / 強誘電体 / 薄膜 / スパッタ法 / 原子平坦基板 / PbTiO3 / セラミックス / ナノテクノロジー
Research Abstract

The fabrication of ferroelectric nanocrystal and high quality thin films has been widely interesting because of new ferroelectric devices such as rf-reconfigurable devices. The fabrication of nanocrystal array, that is, position control of nanocrystal growth on atomically flat sapphire substrates was developed. In order to measure the electric and rf properties of nanocrystal and thin films, nano-sized pattering and analysis for the obtained materials were performed. The low voltage operation and new frequency conversion devices were successfully obtained.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (33 results)

All 2012 2011 2010 Other

All Journal Article (15 results) (of which Peer Reviewed: 7 results) Presentation (17 results) Remarks (1 results)

  • [Journal Article] Crystallization using biomineralized nickel nanodots of amorphous silicon thick films deposited by chemical vapor deposition, sputtering and electron beam evaporation2012

    • Author(s)
      T. Nishida, K. Fuse, M. Furuta, Y. Ishikawa, Y. Uraoka
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol.51 No.3

    • NAID

      210000140373

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Low-operating-voltage solution-processed InZnO thin-film transistors using high-k SrTa2O62012

    • Author(s)
      L. Lu, Y. Miura, T. Nishida, M. Echizen, Y. Ishikawa, K. Uchiyama, Y. Uraoka
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol.51 No.3

    • NAID

      210000140384

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Capacitance-voltage and leakage-current characteristics of sol-gel-derived crystalline and amorphous SrTa2O6 thin films2012

    • Author(s)
      L. Lu, T. Nishida, M. Echizen, K. Uchiyama, Y. Uraoka
    • Journal Title

      Thin Solid Films

      Volume: Vol.520 No.9 Pages: 3620-3623

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Interface effect of high-k SrTa2O6/gate electrode on the characteristics of solution processed InZn4Ox thin-film transistors2011

    • Author(s)
      L. Lu, T. Nishida, M. Echizen, Y. Ishikawa, K. Uchiyama, Y. Uraoka
    • Journal Title

      The proceedings of AM-FPD

      Volume: 11 Pages: 145-147

    • Related Report
      2011 Final Research Report
  • [Journal Article] Crystallizationusing biominerallized Ni nanodots of amorphous Si thick films prepared by CVD and sputtering deposition2011

    • Author(s)
      T. Nishida, K. Fuse, M. Furuta, Y. Ishikawa, Y. Uraoka
    • Journal Title

      The proceedings of AM-FPD

      Volume: 11 Pages: 129-132

    • Related Report
      2011 Final Research Report
  • [Journal Article] Characteristics of solution-processed TFTs with In4ZnOx/SrTa206 thin films2011

    • Author(s)
      L. Lu, T. Nishida, M. Echizen, Y. Ishikawa, K. Uchiyama, Y. Uraoka
    • Journal Title

      Proceeding of the 2011 International Meeting for Future of Electron Devices, Kansai

      Pages: 120-121

    • Related Report
      2011 Final Research Report
  • [Journal Article] Fabrication of PbTiO3 and Pt self-organized nanocrystal array structure on atomically flat sapphire2011

    • Author(s)
      T. Nishida, K. Asahi, Y. Miura, L. Lu, M. Echizen, Y. Yoneda, H. Kimura, Y. Ishikawa, Y. Uraoka
    • Journal Title

      Proceeding of the 2011 International Meeting for Future of Electron Devices, Kansai

      Pages: 106-107

    • Related Report
      2011 Final Research Report
  • [Journal Article] Fabrication of atomically flat Pt layer on sapphire substrate by low angle incidence sputtering method2011

    • Author(s)
      T. Nishida, K. Asahi, Y. Yoneda, K. Tamura, D. Matsumura, H. Kimura, Y. Ishikawa, Y. Uraoka
    • Journal Title

      Trans. Mater. Res. Soc. of Japan

      Volume: Vol.36 Pages: 11-13

    • NAID

      130004676369

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Interface effect of high-k SrTa2O6 gate electrode on the characteristics of solution processed InZn4Ox thin-film transistors2011

    • Author(s)
      Li Lu, T.Nishida, et al
    • Journal Title

      The proceedings of AM-FPD 11

      Pages: 145-147

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Crystallizationusing biominerallized Ni nanodots of amorphous Si thick films prepared by CVD and sputtering deposition2011

    • Author(s)
      T.Nishida
    • Journal Title

      The proceedings of AM-FPD 11

      Pages: 129-132

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Fabrication of PbTiO3 and Pt self-organized nanocrystal array structure on atomically flat sapphire2011

    • Author(s)
      T.Nishida
    • Journal Title

      Proceeding of the 2011 International Meeting for Future of Electron Devices, Kansai

      Pages: 106-107

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Thickness Dependence of Electrical Properties for High-k SrTa2O6 Thin Films Fabricated by Sol-Gel Method2011

    • Author(s)
      Li Lu, T.Nishida
    • Journal Title

      JJAP

      Volume: 50 Issue: 3S Pages: 03CA05-03CA05

    • DOI

      10.1143/jjap.50.03ca05

    • NAID

      210000070165

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of atomically flat Pt layer on sapphire substrate by low angle incidence sputtering method2011

    • Author(s)
      Takashi Nishida
    • Journal Title

      Trans.Material Research Society of Japan

      Volume: (In press)

    • NAID

      130004676369

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical properties of Ba0. 5Sr0. 5Ta2O6 thin film fabricated by Sol-Gel method2010

    • Author(s)
      L. Lu, M. Echizen, T. Nishida, K. Uchiyama, Y. Uraoka
    • Journal Title

      IEICE Transactions on Electronics

      Volume: Vol.E93-C Pages: 1511-1515

    • Related Report
      2011 Final Research Report
  • [Journal Article] Annealing and composition effects of(BaxSr1-x) Ta2O6 thin films fabricated by sol-gel method2010

    • Author(s)
      L. Lu, T. Nishida, M. Echizen, K. Uchiyama, Y. Uraoka
    • Journal Title

      JJAP

      Volume: Vol.49

    • NAID

      210000069221

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Presentation] 鉛圧電体の欠陥と非鉛圧電体の展望2012

    • Author(s)
      西田貴司
    • Organizer
      日本電子材料技術協会第90回金属材料研究会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-14
    • Related Report
      2011 Final Research Report
  • [Presentation] (Ba, Sr) TaxOyおよび(Ba, Sr) TixOy薄膜の電圧線形性2011

    • Author(s)
      西田貴司, 呂莉, 越前正洋, 内山潔, 木村秀夫, 石河泰明, 浦岡行治
    • Organizer
      第21回日本MRS学術シンポジウム
    • Place of Presentation
      横浜
    • Year and Date
      2011-12-20
    • Related Report
      2011 Final Research Report
  • [Presentation] (Ba,Sr)TaxOyおよび(Ba,Sr)TixOy薄膜の電圧線形性2011

    • Author(s)
      T.Nishida
    • Organizer
      第21回日本MRS学術シンポジウム
    • Place of Presentation
      横浜市開港記念会館
    • Year and Date
      2011-12-20
    • Related Report
      2011 Annual Research Report
  • [Presentation] 強誘電体ナノ結晶評価のためのサファイア上へのPt原子レベル平坦層の形成(II)2011

    • Author(s)
      西田貴司, 旭健史郎, 米田安宏, 田村和久, 松村大樹, 木村秀夫, 石河泰明, 浦岡行治
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-09-01
    • Related Report
      2011 Final Research Report
  • [Presentation] (BaxSr1-xTa2O6)高誘電薄膜の低温作製と電気的特性2011

    • Author(s)
      Li Lu, T.Nishida
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学小白川キャンパス
    • Year and Date
      2011-09-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] 強誘電体ナノ結晶評価のためのサファイア上へのPt原子レベル平坦層の形成(II)2011

    • Author(s)
      西田貴司
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学小白川キャンパス
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of PbTiO3 and Pt self-organized nanocrystal array structure for high density ferroelectric memories2011

    • Author(s)
      T. Nishida, M. Echizen, L. Lu, K. Asahi, Y. Yoneda, H. Kimura, Y. Ishikawa, Y. Uraoka
    • Organizer
      International Symposium on Integrated Functionalities(ISIF 2011)
    • Place of Presentation
      England
    • Year and Date
      2011-08-02
    • Related Report
      2011 Final Research Report
  • [Presentation] Interface effect of high-K SrTa2O6 gate electrode on the characteristics of solution processed thin film transistors2011

    • Author(s)
      Li Lu, T.Nishida
    • Organizer
      The 20th IEEE International Symposium on Applications of Ferroelectrics
    • Place of Presentation
      Vancouver, Canada
    • Year and Date
      2011-07-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] 溶液法で作製したIn_4ZnO_x/SrTa_2O_6薄膜トランジスタの特性2011

    • Author(s)
      Li Lu, T.Nishida
    • Organizer
      第28回強誘電体応用会議(FMA28)
    • Place of Presentation
      コープイン京都,京都
    • Year and Date
      2011-05-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of PbTiO3 and Pt self-organized nanocrystal array structure on atomically flat sapphire2011

    • Author(s)
      T. Nishida, K. Asahi, Y. Miura, L. Lu, M. Echizen, Y. Yoneda, H. Kimura, Y. Ishikawa, Y. Uraoka
    • Organizer
      The 2011 International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      大阪
    • Year and Date
      2011-05-19
    • Related Report
      2011 Final Research Report
  • [Presentation] 強誘電体薄膜での原子レベル平坦基板の有効性2011

    • Author(s)
      T.Nishida
    • Organizer
      日本学術振興会結晶成長の科学と技術第161委員会第69回研究会
    • Place of Presentation
      東京大学生産技術研究所An棟401会議室(招待講演)
    • Year and Date
      2011-04-22
    • Related Report
      2011 Annual Research Report
  • [Presentation] 強誘電体ナノ結晶評価のためのサファイア上へのPt原子レベル平坦層の形成2011

    • Author(s)
      西田貴司
    • Organizer
      2011年春季 第58回 応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県厚木市)
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] PbTiO3ナノ結晶形成のための原子平坦基板上への平坦Pt成膜(II)2011

    • Author(s)
      西田貴司
    • Organizer
      日本セラミックス協会2011年年会
    • Place of Presentation
      静岡大学(静岡県浜松市)
    • Year and Date
      2011-03-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] 原子平坦面上へのPbTiO3およびPtナノ結晶アレイの作製2010

    • Author(s)
      西田貴司
    • Organizer
      第20回日本MRS学術シンポジウム
    • Place of Presentation
      横浜市開港記念会館(神奈川県横浜市)
    • Year and Date
      2010-12-20
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication and Evaluation of PbTiO3 Nanocrystal Array on Atomically Flat Sapphire2010

    • Author(s)
      Takashi Nishida
    • Organizer
      3rd international congress on ceramics
    • Place of Presentation
      Grand Cube Osaka(大阪府大阪市)
    • Year and Date
      2010-11-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] アモルファス(BaxSr1-xTa2O6)薄膜の低温作製と評価2010

    • Author(s)
      Li Lu
    • Organizer
      2010年秋季 第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス(長崎県長崎市)
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] サファイア基板上のPbTiO3自己組織化ナノ結晶の放射光X線回折による評価2010

    • Author(s)
      西田貴司
    • Organizer
      2010年秋季 第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス(長崎県長崎市)
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Remarks] ホームページアドレス

    • URL

      http://e-m.skr.jp/

    • Related Report
      2011 Final Research Report

URL: 

Published: 2010-08-23   Modified: 2016-04-21  

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