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Intra/extracellular nanoprobe arrays for electrical and chemical nanoscale measurements of neurons

Research Project

Project/Area Number 22760251
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionToyohashi University of Technology

Principal Investigator

KAWANO Takeshi  豊橋技術科学大学, 大学院・工学研究科, 准教授 (70452216)

Research Collaborator NUMANO Rika  豊橋技術科学大学, エレクトロニクス先端融合研究所, 特任准教授 (30462716)
Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2011: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2010: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Keywordsナノプローブ / 細胞内電極 / 細胞内プローブ / ドラッグデリバリーシステム / 集積回路 / MEMS / vapor-liquid-solid 成長法 / 脳・神経科学 / Vapor-Liquid-Solid成長法
Research Abstract

We developed out-of-plane, high aspect ratio, nanoscale electrode tipped microwire arrays for applications to penetrating, multisite, nanoscale biological sensors. A nanoscale tipped wire is formed with isotropic silicon etching to the tip of a vapor-liquid-solid grown silicon microwire. After coating the wire with a metal, only the nanotip section can be exposed from the surrounding outer shell(e. g., silicon dioxide and parylene) by three-dimensional integration processes. As a device application, we demonstrate the trapping of polystyrene nanoparticles in a solution using a fabricated gold-nanotip wire array. Moreover, these trapped nanoparticles can be injected into a soft material(gelatin), demonstrating a multi-site wide-area batch depth injection of nanoparticles. Also, we demonstrated multipoint/batch and localized DNA transfers into individual human embryonic kidney cells(HEK293) with plasmid containing yellow fluorescent protein(YFP) gene. Deep area electrical nanoscale measurements for thick samples such as brain slices as well as cortices would also be possible by using the nanotip microwire arrays, promising a powerful device for the future of neuroscience.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (51 results)

All 2012 2011 2010 Other

All Journal Article (14 results) (of which Peer Reviewed: 8 results) Presentation (32 results) Remarks (5 results)

  • [Journal Article] Heterogeneously Integrated Vapor-liquid-solid Grown Silicon Probes/(111) and Silicon MOSFETs/(100)2011

    • Author(s)
      Akihiro Okugawa, Kotaro Mayumi, Akihito Ikedo, Makoto Ishida and Takeshi Kawano
    • Journal Title

      IEEE Electron Device Letters

      Volume: Vol.32 No.5 Pages: 683-685

    • Related Report
      2011 Final Research Report
  • [Journal Article] Out-of-plane High-density Piezoresistive Silicon Microwire/p-n Diode Array for Force-and Temperature-Sensitive Artificial Whisker Sensors2011

    • Author(s)
      Akihito Ikedo, Makoto Ishida and Takeshi Kawano
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: Vol.21, No.3 Pages: 35007-35007

    • Related Report
      2011 Final Research Report
  • [Journal Article] Enlarged Gold-tipped Silicon Microprobe Arrays and Signal Compensation for Multi-site Electroretinogram Recordings in the Isolated Carp Retina2011

    • Author(s)
      Tetsuhiro Harimoto, Kuniharu Takei, Takeshi Kawano, Akito Ishihara, Takahiro Kawashima, Hidekazu Kaneko, Makoto Ishida and Shiro Usui
    • Journal Title

      Biosensors and Bioelectronics

      Volume: Vol.26, No.5 Pages: 2368-2375

    • Related Report
      2011 Final Research Report
  • [Journal Article] Heterogeneously Integrated Vapor-liquid-solid Grown Silicon probes/(111) and Silicon MOSFETs/(100)2011

    • Author(s)
      A. Okugawa, K. Mayumi, A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      IEEE Electron DeviceLett.

      Volume: Vol. 32, No.5 Issue: 5 Pages: 683-685

    • DOI

      10.1109/led.2011.2120590

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Out-of-plane High-density Piezoresistive Silicon Microwire/p-n Diode Array for Force and Temperature Sensitive Artificial Whisker Sensors2011

    • Author(s)
      A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      J. Micromech. & Microeng.

      Volume: Vol. 21, No. 3 Issue: 3 Pages: 35007-35007

    • DOI

      10.1088/0960-1317/21/3/035007

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enlarged Gold-tipped Silicon Microprobe Arrays and Signal Compensation for Multi-site Electroretinogram Recordings in the Isolated Carp Retina2011

    • Author(s)
      T. Harimoto, K. Takei, T. Kawano, A. Ishihara, T. Kawashima, H. Kaneko, M. Ishidaand S. Usui
    • Journal Title

      Biosensors & Bioelectron.

      Volume: Vol.26,No.5 Issue: 5 Pages: 2368-2375

    • DOI

      10.1016/j.bios.2010.10.014

    • Related Report
      2011 Annual Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Heterogeneously Integrated Vapor-liquid-solid Grown Silicon probes/(111) and Silicon MOSFETs/(100)2011

    • Author(s)
      A.Okugawa, K.Mayumi, A.Ikedo, M.Ishida, T.Kawano
    • Journal Title

      IEEE Electron Device Letters

      Volume: (Accepted)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Out-of-plane High-density Piezoresistive Silicon Microwire/p-n Diode Array for Force and Temperature Sensitive Artificial Whisker Sensors2011

    • Author(s)
      A.Ikedo, M.Ishida, T.Kawano
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: Vol.21 Pages: 35007-35007

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale Sharpening Tips of Vapor-liquid-solid Grown Silicon Microwire Arrays2010

    • Author(s)
      Akihiro Goryu, Akihito Ikedo, Makoto Ishida and Takeshi Kawano
    • Journal Title

      Nanotechnology

      Volume: Vol.21, No.12 Pages: 125302-125302

    • Related Report
      2011 Final Research Report
  • [Journal Article] Electrical Interfacing between Neurons and Electronics via Vertically integrated Sub-4 Micron-diameter Silicon Probe Arrays Fabricated by Vapor Vapor-liquid-solid Growth2010

    • Author(s)
      Takeshi Kawano, Tetsuhiro Harimoto, Akito Ishihara, Kuniharu Takei, Takahiro Kawashima, Shiro Usui and Makoto Ishida
    • Journal Title

      Biosensors and Bioelectronics

      Volume: Vol.25, No.7 Pages: 1809-1815

    • Related Report
      2011 Final Research Report
  • [Journal Article] Microtube-based Electrode Arrays for Low Invasive Extracellular Recording with a High Signal-to-noise Ratio2010

    • Author(s)
      Kuniharu Takei, Takeshi Kawano, Takahiro Kawashima, Kazuaki Sawada, Hidekazu Kaneko and Makoto Ishida
    • Journal Title

      Biomedical Microdevices

      Volume: Vol.12, No.1 Pages: 41-48

    • Related Report
      2011 Final Research Report
  • [Journal Article] Microtube-based Electrode Arrays for Low Invasive Extracellular Recording with a High Signal-to-noise Ratio2010

    • Author(s)
      K.Takei, T.Kawano, T.Kawashima, K.Sawada, H.Kaneko, M.Ishida
    • Journal Title

      Biomedical Microdevices

      Volume: Vol.12 Pages: 41-48

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical Interfacing between Neurons and Electronics via Vertically-integrated Sub-4 Micron-diameter Silicon Probe Arrays Fabricated by Vapor-liquid-solid Growth2010

    • Author(s)
      T.Kawano, T.Harimoto, A.Ishihara, K.Takei, T.Kawashima, S.Usui, M.Ishida
    • Journal Title

      Biosensors and Bioelectronics

      Volume: Vol.25 Pages: 1809-1815

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale Sharpening Tips of Vapor-liquid-solid Grown Silicon Microwire Arrays2010

    • Author(s)
      A.Goryu, A.Ikedo, M.Ishida, T.Kawano
    • Journal Title

      Nanotechnology

      Volume: Vol.21 Pages: 125302-125302

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] Three Dimensional Micro/nanowire Arrays for Sensing Applications2012

    • Author(s)
      T.Kawano
    • Organizer
      Japan Institute of Electronics Packaging (JIEP)
    • Place of Presentation
      Tokyo, Japan(招待講演)
    • Year and Date
      2012-03-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] Nanoprobe Array for Gene Transfer into Individual Cells2012

    • Author(s)
      Akihiro Goryu, Rika Numano, Makoto Ishida and Takeshi Kawano
    • Organizer
      2012 MRS Spring Meeting
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2011 Final Research Report
  • [Presentation] Hybrid Penetrating-and Planer-Microelectrode Array for Simultaneous Recording of ECoG and Intracortical Neural Activity2012

    • Author(s)
      Tatsuya Imashioya, Akifumi Fujishiro, Hirohito Sawahata, Haruo Toda, Akihito Ikedo, Makoto Ishida, Isao Hasegawa and Takeshi Kawano
    • Organizer
      2012 MRS Spring Meeting
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2011 Final Research Report
  • [Presentation] Layer-by-layer Nanoassembly of Iridium Oxide/Platinum-black for Low Impedance, High Charge Injecting Microelectrode Applications2012

    • Author(s)
      Shota Yamagiwa, Akifumi Fujishiro, Akihito Ikedo, Makoto Ishida and Takeshi Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems(IEEE-MEMS) Conference 2012
    • Place of Presentation
      Paris, France
    • Related Report
      2011 Final Research Report
  • [Presentation] Fabrication of Force Sensitive Penetrating Electrical Neuroprobe Arrays2012

    • Author(s)
      Shogo Morita, Akifumi Fujishiro, Akihito Ikedo, Makoto Ishida and Takeshi Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems(IEEE-MEMS) Conference 2012
    • Place of Presentation
      Paris, France
    • Related Report
      2011 Final Research Report
  • [Presentation] Multifunctional Metal/silicon Dioxide Microtube Neuroprobes2012

    • Author(s)
      T.Nakamura, M.Sakata, A.Goryu, M.Ishida, T.Kawano
    • Organizer
      The Japan Society of Applied Physics (The 59th Spring Meeting)
    • Place of Presentation
      Trokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of Force sensitive Penetrating Electrical Neuroprobe Arrays2012

    • Author(s)
      S.Morita, A.Fujishiro, A.Ikedo, M.Ishida, T.Kawano
    • Organizer
      The Japan Society of Applied Physics (The 59th Spring Meeting)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Layerby-layer Nanoassembly of Iridium Oxide/Platinum -black for Low Impedance, High Charge Injecting Microelectrode Applications2012

    • Author(s)
      S.Yamagiwa, A.Fujishiro, A.Ikedo, M.Ishida, T, Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Paris, France
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of Force Sensitive Penetrating Electrical Neuroprobe Arrays2012

    • Author(s)
      S.Morita, A.Fujishiro, A.Ikedo, M.Ishida, T.Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Paris, France
    • Related Report
      2011 Annual Research Report
  • [Presentation] Neural Interface Microprobe/Tube Array Devices2011

    • Author(s)
      T.Kawano
    • Organizer
      Ritsumeikan University
    • Place of Presentation
      Kyoto, Japan(招待講演)
    • Year and Date
      2011-10-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] 集積化デバイスの切り拓くライフイノベーション2011

    • Author(s)
      石田誠, 澤田和明, 河野剛士, 赤井大輔
    • Organizer
      応用物理学会特別シンポジウム異種機能集積化と応用物理~最先端多様分野の融合によって拓かれる未来社会~
    • Place of Presentation
      神奈川工科大学、神奈川(招待講演)
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Vertically Integrated Silicon Wires for Neural Interface and Artificial Whisker Electronics2011

    • Author(s)
      T.Kawano
    • Organizer
      KAIST Seminar
    • Place of Presentation
      Daejeon, Republic of Korea(招待講演)
    • Year and Date
      2011-02-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] Electrical Catching and Transfer of Nanoparticles via Nanotip Silicon Probe Arrays2011

    • Author(s)
      Akihiro Goryu, Akihito Ikedo, Makoto Ishida and Takeshi Kawano
    • Organizer
      16th International Conference on Solid-State Sensors, Actuators and Microsystems(Transducers' 11)
    • Place of Presentation
      Beijing, China
    • Related Report
      2011 Final Research Report
  • [Presentation] Temperature Sensitive Microwire Arrays for Artificial Whisker Electronics2011

    • Author(s)
      Akihito Ikedo, Makoto Ishida and Takeshi Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems(IEEE-MEMS) Conference 2011
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2011 Final Research Report
  • [Presentation] A Penetrating Micro-scale Diameter Probe Array for in-vivo Neuron Spike Recordings2011

    • Author(s)
      Akifumi Fujishiro, Hidekazu Kaneko, Takahiro Kawashima, Makoto Ishida and Takeshi Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems(IEEE-MEMS) Conference 2011
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2011 Final Research Report
  • [Presentation] A Vertical Micro-scale Light Guiding Silicon Dioxide Tube Array for Optical Neurostimulator2011

    • Author(s)
      Masahiro Sakata, Akihiro Goryu, Akihito Ikedo, Tetsuhiro Harimoto, Makoto Ishida and Takeshi Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems(IEEE-MEMS) Conference 2011
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2011 Final Research Report
  • [Presentation] Simultaneous Recording of Surface and Intra-Retinal Electroretinograms using a Penetrating- and Planar-Electrode Array2011

    • Author(s)
      T.Harimoto, A.Ikedo, T.Kawano, A.Ishihara, A.Fujishiro, S.Yamagiwa, A.Goryu, S.Usui, M.Ishida
    • Organizer
      The Asia-Pacific Interdisciplinary Research Conference (APIRC)2011
    • Place of Presentation
      Toyohashi, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] A Vertical Micro-scale Light Guiding Silicon Dioxide Tube Array for Optical Neurostimulator2011

    • Author(s)
      M.Sakata, A.Goryu, A.Ikedo, T.Harimoto, M.Ishida, T.Kawano
    • Organizer
      The 28th SENSOE SYMPOSIUM on Sensors, Micromachines and Application Systems
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Electrical Caching and Transfer of Nanoparticles via Nanotip Silicon Probe Arrays2011

    • Author(s)
      A.Goryu, M.Ishidam, T.Kawano
    • Organizer
      The 28th SENSOR SYMPOSIUM on Sensors, Micro machines and Application Systems
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Penetrating Micro-scale Diameter Probe Arrays for in-vivo Neuron Spike Recordings2011

    • Author(s)
      T.Kawano, A.Fujishiro, H.Kaneko, T.Kawashima, M.Ishida
    • Organizer
      The 34th Annual Meeting of the Japan Neuroscienee Society-Neuroscience of the Mind-
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Electrical Catching and Transfer of Nanoparticles via Nanotip Silicon Probe Arrays2011

    • Author(s)
      A.Goryu, A.Ikedo, M.Ishida, T.Kawano
    • Organizer
      16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '11)
    • Place of Presentation
      Beijing, China
    • Related Report
      2011 Annual Research Report
  • [Presentation] A Vertical micro-scale light guiding silicon dioxide tube array for optical neurostimulator2011

    • Author(s)
      M.Sakata, A.Goryu, A.Ikedo, T.Harimoto, M.Ishida, T.Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2010 Annual Research Report
  • [Presentation] A penetrating micro-scale diameter probe array for in vivo neuron spike recordings2011

    • Author(s)
      A.Fujishiro, H.Kaneko, T.Kawashima, M.Ishida, T.Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2010 Annual Research Report
  • [Presentation] Temperature sensitive microwire array for artificial whisker electronics2011

    • Author(s)
      A.Ikedo, M.Ishida, T.Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノスケール先鋭化Siワイヤーアレイによるナノ粒子吸脱着デバイス2011

    • Author(s)
      牛流章弘, 池戸昭仁, 石田誠, 河野剛士
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] VLS-Siプローブを用いた皮質脳波、皮質内活動同時計測神経電極デバイス2011

    • Author(s)
      今塩屋竜也, 藤城彬史, 澤畑博人, 戸田春男, 池戸昭仁, 石田誠, 長谷川功, 河野剛士
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] 神経活動計測用高アスペクト比Siプローブの形成及び評価2011

    • Author(s)
      藤城彬史, 池戸昭仁, 石田誠, 河野剛士
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] Smart Microchips for Intelligent Sensing2010

    • Author(s)
      M.Ishida, T.Kawano, K.Sawada
    • Organizer
      2010 Seventh International Conference on IEEE Networked Sensing Systems (INSS)
    • Place of Presentation
      Kassel, Germany(招待講演)
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノスケール先鋭化マイクロプローブ神経電極の集積化技術2010

    • Author(s)
      牛流章弘、池戸昭仁、石田誠、河野剛士
    • Organizer
      応用物理学会集積化MEMS技術研究会主催第2回集積化MEMSシンポジウム
    • Place of Presentation
      くにびきメッセ、島根
    • Related Report
      2010 Annual Research Report
  • [Presentation] シリコンウィスカ神経電極アレイ/Si(111)とMOSFET/Si(100)の集積化技術2010

    • Author(s)
      奥川晃宏、真弓広太郎、池戸昭仁、石田誠、河野剛士
    • Organizer
      応用物理学会集積化MEMS技術研究会主催第2回集積化MEMSシンポジウム
    • Place of Presentation
      くにびきメッセ、島根
    • Related Report
      2010 Annual Research Report
  • [Presentation] pn接合を有する垂直配向Siマイクロワイヤを用いた突出型フォースセンサアレイ2010

    • Author(s)
      池戸昭仁、河野剛士、石田誠
    • Organizer
      応用物理学会集積化MEMS技術研究会主催第2回集積化MEMSシンポジウム
    • Place of Presentation
      くにびきメッセ、島根
    • Related Report
      2010 Annual Research Report
  • [Presentation] シリコンマイクロプローブ神経電極アレイを用いた網膜光応答の多チャンネル同時記録と信号補正2010

    • Author(s)
      針本哲宏, 竹井邦晴, 河野剛士, 石原彰人, 金子秀和, 川島貴弘, 石田誠, 臼井支朗
    • Organizer
      第25回生体・生理工学シンポジウム
    • Place of Presentation
      岡山大学
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.int.ee.tut.ac.jp/icg/member/~takekawano

    • Related Report
      2011 Final Research Report
  • [Remarks]

    • URL

      http://www.int.ee.tut.ac.jp/icg/member/~takekawano

    • Related Report
      2011 Annual Research Report
  • [Remarks] グループWebページ

    • URL

      http://int.ee.tut.ac.jp/icg/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.int.ee.tut.ac.jp/icg/member/~takekawano

    • Related Report
      2010 Annual Research Report
  • [Remarks] グループWebページ

    • URL

      http://int.ee.tut.ac.jp/icg/

    • Related Report
      2010 Annual Research Report

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Published: 2010-08-23   Modified: 2016-04-21  

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