Development of Polyatomic Ion Source for Organic Liquids toward Application of Shallow Ion Implantation

• Project/Area Number: 22760252
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Electron device/Electronic equipment
• Research Institution: Kyoto University
• Principal Investigator: TAKEUCHI Mitsuaki 京都大学, 大学院・工学研究科, 助教 (10552656)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2011: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2010: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
• Keywords: 微細プロセス技術 / イオン注入 / イオン液体 / イオン源 / イオンビーム

Research Abstract

Field emission type ionic liquid ion source with a high and stable current was developed and evaluated on its beam properties. Effects of the ionic liquid ion beams on silicon and glass substrates were also studied. The developed ion source produced single anions and anion with anion-cation pairs in positive ion beam, and yielded single cations and cation with anion-cation pairs in negative ion beam. Glass substrates irradiated with ionic liquid BMIM-PF6 ion beam showed decrease of surface roughness to 0.1 nm. This indicates that the ionic liquid ion beams can be used for surface modifications.

Research Products

• [Journal Article] Irradiation of Ionic Liquid Ion Beams on Silicon and Glass Substrates (2013)
  • Author(s): Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
  • Journal Title: Nucl. Instrum. Meth. Phys. B Volume: (in press)
  • Peer Reviewed
• [Journal Article] Development of Ionic Liquid Ion Source with Porous Emitter for Surface Modification (2013)
  • Author(s): Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
  • Journal Title: Nucl. Instrum. Meth. Phys. B Volume: (in press)
  • Peer Reviewed
• [Journal Article] Development of high-current ionic liquid ion source toward surface modification (2013)
  • Author(s): Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto and Gikan H Takaoka
  • Journal Title: MRS Online Proceedings Library Volume: 1575
  • DOI: 10.1557/opl.2013.583
  • Peer Reviewed
• [Journal Article] Production and irradiation of ionic liquid cluster ions (2013)
  • Author(s): Gikan H Takaoka, Mitsuaki Takeuchi,Hiromichi Ryuto
  • Journal Title: Nucl. Instrum. Meth. Phys. B Volume: (in press) Pages: 257-259
  • DOI: 10.1016/j.nimb.2012.11.072
  • NAID: 120005343926
  • Peer Reviewed
• [Journal Article] Irradiation of Ionic Liquid Ion Beams on Silicon and Glass Substrates (2013)
  • Author(s): Mitsuaki Takeuchi (代表者), Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
  • Journal Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Volume: in press
  • Peer Reviewed
• [Journal Article] Development of High-current Ionic Liquid Ion Source toward Surface Modification (2013)
  • Author(s): Mitsuaki Takeuchi (代表者), Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
  • Journal Title: MRS Online Proceedings Library Volume: in press
  • Peer Reviewed
• [Journal Article] イオン液体BMIM-PF6イオンビーム照射によるガラス基板の表面改質 (2012)
  • Author(s): 竹内 光明, 濱口 拓也, 龍頭 啓充, 高岡義寛
  • Journal Title: 信学技報 Volume: vol.112,no.337 Pages: 25-30
• [Journal Article] Surface irradiation and materials processing using polyatomic cluster ion beams (2012)
  • Author(s): G.H.Takaoka
  • Journal Title: J.Mater.Res. Volume: 27 Issue: 5 Pages: 806-821
  • DOI: 10.1557/jmr.2011.426
  • NAID: 120003988356
  • Peer Reviewed
• [Journal Article] Fabrication of Impregnated-Electrode-Type Polyatomic Ion Source with Ionic Liquid (2011)
  • Author(s): M.Takeuchi, H.Ryuto, G.H.Takaoka
  • Journal Title: AIP Conf.Proc Volume: 1,321 Pages: 456-459
  • DOI: 10.1063/1.3548449
  • Peer Reviewed
• [Journal Article] Surface Processing and Modification of Polymers by Water Cluster Ion Beam (2011)
  • Author(s): H.Ryuto, M.Takeuchi, G.Ichihashi, P.Sommani, G.H.Takaoka
  • Journal Title: AIP Conf.Proc Volume: 1,321 Pages: 310-313
  • DOI: 10.1063/1.3548389
  • Peer Reviewed
• [Journal Article] Suppression of divergence of low energy ion beams by space charge neutralization with low energy electrons emitted from field emitter (2011)
  • Author(s): J.Ishikawa, Y.Gotoh, M.Takeuchi
  • Journal Title: AIP Conf.Proc Volume: 1,321 Pages: 496-500
  • DOI: 10.1063/1.3548461
  • Peer Reviewed
• [Journal Article] Micro-pattering of Si (100) surfaces by ethanol cluster ion beans (2011)
  • Author(s): G.H.Takaoka
  • Journal Title: Surface & Coatings Technology Volume: 206 Issue: 5 Pages: 869-873
  • DOI: 10.1016/j.surfcoat.2011.04.051
  • Peer Reviewed
• [Journal Article] Chemical erosion and sputtering of solid surfaces with liquid cluster ions (2011)
  • Author(s): G.H.Takaoka
  • Journal Title: Surface & Coatings Technology Volume: 206 Issue: 5 Pages: 845-848
  • DOI: 10.1016/j.surfcoat.2011.03.108
  • NAID: 120003573884
  • Peer Reviewed
• [Journal Article] Fabrication of Impregnated-Electrode-Type Polyatomic Ion Source with Ionic Liquid (2011)
  • Author(s): M.Tateuchi, H.Ryuto, G.H.Takaoka
  • Journal Title: AIP Conf.Proc Volume: 1321 Pages: 456-459
  • Peer Reviewed
• [Journal Article] CARBON IMPLANTATION BY POLYATOMIC ION SOURCE OF ORGANIC LIQUIDS (2011)
  • Author(s): M.Tateuchi, H.Ryuto, G.H.Takaoka
  • Journal Title: Proceedings of IPAC'10 Pages: 136-138
• [Journal Article] APPLICATION OF LIQUID CLUSTER ION BEAMS IN SURFACE PROCESSING (2011)
  • Author(s): H.Ryuto, M.Takeuchi, G.Takaoka
  • Journal Title: Proceedings of IPAC'10 Pages: 133-135
• [Journal Article] Sources of polyatomic ions of organic liquids (2010)
  • Author(s): G.H.Takaoka, M.Takeuchi, H.Ryuto
  • Journal Title: The Review of scientific instruments Volume: 81
  • Peer Reviewed
• [Journal Article] Characteristics of liquid cluster ion beam for surface treatment (2010)
  • Author(s): H.Ryuto, R.Ozaki, Y.Kubo, M.Takeuchi, G.H.Takaoka
  • Journal Title: The Review of scientific instruments Volume: 81
  • Peer Reviewed
• [Journal Article] Metal-free and gasless space charge compensation of low energy ion beam by using surface-carbonized silicon field emitter array (2010)
  • Author(s): M.Takeuchi, Y.Gotoh, H.Tsuji, J.Ishikawa, S.Sakai
  • Journal Title: Journal of Vacuum Science & Technology B Volume: 28
  • Peer Reviewed
• [Journal Article] 多原子分子イオンビームによるシリコン表面照射効果 (2010)
  • Author(s): 竹内光明, 龍頭啓充, 高岡義寛
  • Journal Title: 信学技報 Volume: 110 Pages: 69-72
  • NAID: 110008676031
• [Presentation] Development of High-current Ionic Liquid Ion Source toward Surface Modification (2013)
  • Author(s): Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
  • Organizer: 2013 MRS Spring Meeting & Exhibit
  • Place of Presentation: San Francisco, California, USA
• [Presentation] Surface Smoothing of Glass Substrate by Irradiation of Ionic Liquid Ion Beams (2013)
  • Author(s): Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
  • Organizer: 2013 MRS Spring Meeting & Exhibit
  • Place of Presentation: San Francisco, California, USA
• [Presentation] イオン液体イオンビーム照射によるガラス基板の表面改質(II) (2013)
  • Author(s): 濱口拓也, 竹内光明, 龍頭啓充, 高岡義寛
  • Organizer: 第60回応用物理学会春季学術講演会
  • Place of Presentation: 神奈川工科大学
• [Presentation] Development of High-current Ionic Liquid Ion Source toward Surface Modification (2013)
  • Author(s): Mitsuaki Takeuchi (代表者), Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
  • Organizer: 2013 MRS Spring Meeting & Exhibit April 1-5, 2013 San Francisco, California, USA
  • Place of Presentation: San Francisco, California, USA
• [Presentation] Surface Smoothing of Glass Substrate by Irradiation of Ionic Liquid Ion Beams (2013)
  • Author(s): Mitsuaki Takeuchi (代表者), Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
  • Organizer: 2013 MRS Spring Meeting & Exhibit April 1-5, 2013 San Francisco, California, USA
  • Place of Presentation: San Francisco, California, USA
• [Presentation] イオン液体イオンビーム照射によるガラス基板の表面改質(II） (2013)
  • Author(s): 濱口拓也，竹内光明 (代表者)，龍頭啓充，高岡義寛
  • Organizer: 第60回応用物理学会春季学術講演会
  • Place of Presentation: 神奈川工科大学
• [Presentation] イオン液体イオンビームの質量分析 (2012)
  • Author(s): 濱口拓也, 植田亨, 竹内光明, 龍頭啓充, 高岡義寛
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 東京
  • Year and Date: 2012-03-17
• [Presentation] イオン液体イオンビームの固体表面照射効果 (2012)
  • Author(s): 竹内光明, 濱口拓也, 植田亨, 龍頭啓充, 高岡義寛
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 東京
  • Year and Date: 2012-03-17
• [Presentation] 多原子分子クラスターイオンビームの固体表面に対する照射効果 (2012)
  • Author(s): 大村祐貴, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 東京
  • Year and Date: 2012-03-17
• [Presentation] 水クラスターイオンとシリコン基板の表面反応 (2012)
  • Author(s): 市橋岳, 西村拓朗, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 東京
  • Year and Date: 2012-03-16
• [Presentation] Deposition of Ionic Liquid Ion Beams on Solid Substrate (2012)
  • Author(s): M. Takeuchi, T. Hamaguchi, H. Ryuto, and G. H. Takaoka
  • Organizer: 25th International Conference on Atomic Collisions in Solids
  • Place of Presentation: Kyoto, Japan
• [Presentation] Development of Ionic Liquid Ion Source with Porous Emitter for Surface Modification (2012)
  • Author(s): M. Takeuchi, T. Hamaguchi, H. Ryuto, and G. H. Takaoka
  • Organizer: 25th International Conference on Atomic Collisions in Solids
  • Place of Presentation: Kyoto, Japan
• [Presentation] Ion Beam Properties of Ionic Liquid Ion Source with Porous Emitter for BMI-PF6 and EMI-BF4 (2012)
  • Author(s): M. Takeuchi, T. Hamaguchi, H. Ryuto, and G. H. Takaoka
  • Organizer: IUMRS-ICEM2012
  • Place of Presentation: Yokohama, Japan
• [Presentation] Iradiation Effect of Ionic Liquid BMI-PF6 Ion Beam on Glass Surface (2012)
  • Author(s): M. Takeuchi, T. Hamaguchi, H. Ryuto, and G. H. Takaoka
  • Organizer: IUMRS-ICEM2012
  • Place of Presentation: Yokohama, Japan
• [Presentation] イオン液体イオンビーム照射によるガラス基板の表面改質 (2012)
  • Author(s): 濱口拓也, 竹内光明, 龍頭啓充, 高岡 義寛
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学・松山大学
• [Presentation] イオン液体イオンビームの固体表面照射効果 (2012)
  • Author(s): 竹内光明, 濱口拓也, 植田 亨, 龍頭啓充, 高岡義寛
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学
• [Presentation] Deposition of Ionic Liquid Ion Beams on Solid Substrate (2012)
  • Author(s): M. Takeuchi (代表者), T. Hamaguchi, H. Ryuto, and G. H. Takaoka
  • Organizer: 25th International Conference on Atomic Collisions in Solids October 21-25, 2012 Kyoto, Japan
  • Place of Presentation: Kyoto, Japan
• [Presentation] Development of Ionic Liquid Ion Source with Porous Emitter for Surface Modification (2012)
  • Author(s): M. Takeuchi (代表者), T. Hamaguchi, H. Ryuto, and G. H. Takaoka
  • Organizer: 25th International Conference on Atomic Collisions in Solids October 21-25, 2012 Kyoto, Japan
  • Place of Presentation: Kyoto, Japan
• [Presentation] Ion Beam Properties of Ionic Liquid Ion Source with Porous Emitter for BMI-PF6 and EMI-BF4 (2012)
  • Author(s): M. Takeuchi (代表者), T. Hamaguchi, H. Ryuto, and G. H. Takaoka
  • Organizer: IUMRS-ICEM2012, september 23-28, Yokohama, Japan
  • Place of Presentation: Yokohama, Japan
• [Presentation] Irradiation Effect of Ionic Liquid BMI-PF6 Ion Beam on Glass Surface (2012)
  • Author(s): M. Takeuchi (代表者), T. Hamaguchi, H. Ryuto, and G. H. Takaoka
  • Organizer: IUMRS-ICEM2012, september 23-28, Yokohama, Japan
  • Place of Presentation: Yokohama, Japan
• [Presentation] 固体表面改質へ向けたイオン液体 EMI-BF4 イオンビームの特性評価 (2012)
  • Author(s): 竹内光明 (代表者)，濱口拓也，龍頭啓充，高岡義寛
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学・松山大学
• [Presentation] 酸素イオンビーム照射によるポリイミド基板の表面改質 (2011)
  • Author(s): 古谷健悟, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形
  • Year and Date: 2011-09-02
• [Presentation] 多原子分子クラスターイオン照射痕のAFM観察II (2011)
  • Author(s): 大村祐貴, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形
  • Year and Date: 2011-09-02
• [Presentation] 水クラスターイオンビーム照射によるPMMA基板のマイクロパターニング (2011)
  • Author(s): 市橋岳, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形
  • Year and Date: 2011-09-02
• [Presentation] 含浸型イオン液体イオン源のイオンビーム特性(II) (2011)
  • Author(s): 植田亨, 竹内光明, 龍頭啓充, 高岡義寛
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形
  • Year and Date: 2011-09-01
• [Presentation] テトラデカンを用いた多原子分子イオンビームの生成 (2011)
  • Author(s): 竹内光明, 今中浩輔, 龍頭啓充, 高岡義寛
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形
  • Year and Date: 2011-09-01
• [Presentation] シリコン表面へのエタノールクラスターイオン照射効果の基板温度依存性 (2011)
  • Author(s): 龍頭啓充, 向井寛, 大村祐貴, 竹内光明, 高岡義寛
  • Organizer: 第9回ナノ学会
  • Place of Presentation: 札幌
  • Year and Date: 2011-06-02
• [Presentation] エタノールクラスターを用いたシリコン基板表面加 (2011)
  • Author(s): 龍頭啓充, 向井寛, 大村祐貴, 竹内光明, 高岡義寛
  • Organizer: 第9回ナノ学会
  • Place of Presentation: 札幌
  • Year and Date: 2011-06-02
• [Presentation] Carbon thin film synthesized by polyatomic ion beam deposition (2011)
  • Author(s): M.Takeuchi, H.Ryuto, G.H.Takaoka
  • Organizer: The 11th International Symposium on Sputtering and Plasma Processes
  • Place of Presentation: Kyoto
  • Year and Date: 2011-05-19
• [Presentation] Temperature dependent irradiation effects of polyatomic cluster ion beam on silicon surfac (2011)
  • Author(s): H.Ryuto, H.Mukai, M.Takeuchi, G.H.Takaoka
  • Organizer: The 11th International Symposium on Sputtering and Plasma Processes
  • Place of Presentation: Kyoto
  • Year and Date: 2011-05-19
• [Presentation] Irradiation effects of water cluster ion beam on PMMA surface (2011)
  • Author(s): H.Ryuto, G.Ichihashi, M.Takeuchi, G.H.Takaoka
  • Organizer: The 11th International Symposium on Sputtering and Plasma Processes
  • Place of Presentation: Kyoto
  • Year and Date: 2011-05-19
• [Presentation] 含浸型イオン液体イオン源のイオンビーム特性 (2011)
  • Author(s): 植田亨, 竹内光明, 龍頭啓充, 高岡義寛
  • Organizer: 第58応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-25
• [Presentation] ポリイミド基板への酸素クラスターイオンビーム照射効果,第58応用物理学関係連合講演会講演予稿集 (2011)
  • Author(s): 古谷健悟, 龍頭啓充, 竹内光明, ピヤヌットソムマニ, 辻博司, 高岡義寛
  • Organizer: 第58応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-25
• [Presentation] 多原子分子クラスターイオンのシリコン基板表面に対する照射効果の基板温度依存性 (2011)
  • Author(s): 向井寛, 大村祐貴, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第58応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-25
• [Presentation] 水クラスターイオンビーム照射によるアクリル基板のスパッタリング (2011)
  • Author(s): 市橋岳, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第58応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-25
• [Presentation] 酸素クラスターイオンビーム援用蒸着法により作製したSiOx薄膜の表面分析 (2011)
  • Author(s): 福島大貴, Xin Jin, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第58応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-25
• [Presentation] シリコン基板への炭素系多原子分子イオンビーム蒸着 (2011)
  • Author(s): 竹内光明, 龍頭啓充, 高岡義寛
  • Organizer: 第58応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-25
• [Presentation] アセトンクラスターの生成 (2011)
  • Author(s): 糸崎俊介, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第58応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-25
• [Presentation] 固体表面改質へ向けたイオン液体 EMI-BF4 イオンビームの特性評価 (2011)
  • Author(s): 竹内光明, 濱口拓也, 龍頭啓充, 高岡義寛
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学・松山大学
• [Presentation] 多原子分子イオンビームによるシリコン表面照射効果 (2010)
  • Author(s): 竹内光明, 龍頭啓充, 高岡義寛
  • Organizer: 電子情報通信学会シリコン材料・デバイス研究会
  • Place of Presentation: 京都大学
  • Year and Date: 2010-12-17
• [Presentation] シリコン基板に対するエタノールクラスターイオン照射効果の基板温度依存性 (2010)
  • Author(s): 向井寛, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-16
• [Presentation] 水クラスターイオンビームのアクリル基板への照射効果 (2010)
  • Author(s): 市橋岳, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-16
• [Presentation] 多原子分子イオンビームによるシリコン基板への炭素注入 (2010)
  • Author(s): 竹内光明, 龍頭啓充, 高岡義寛
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-16
• [Presentation] エタノールクラスターイオンビームのガラス表面への照射効果 (2010)
  • Author(s): 糸崎俊介, 龍頭啓充, 竹内光明, 高岡義寛
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-16
• [Presentation] 含浸型イオン液体イオン源の試作 (2010)
  • Author(s): 植田亨、竹内光明、龍頭啓充、高岡義寛
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-15
• [Presentation] Fabrication of Impregnated-Electrode-Type Polyatomic Ion Source with Ionic Liquid (2010)
  • Author(s): M.Takeuchi, H.Ryuto, G.H.Takaoka
  • Organizer: IIT2010
  • Place of Presentation: Kyoto
  • Year and Date: 2010-06-08
• [Presentation] Surface Processing and Modification of Polymers by Water Cluster Ion Beam (2010)
  • Author(s): H.Ryuto, M.Takeuchi, G.H.Takaoka
  • Organizer: IIT2010
  • Place of Presentation: Kyoto
  • Year and Date: 2010-06-08
• [Presentation] CARBON IMPLANTATION BY POLYATOMIC ION SOURCE OF ORGANIC LIQUIDS (2010)
  • Author(s): M.Takeuchi, H.Ryuto, G.H.Takaoka
  • Organizer: IPAC'10
  • Place of Presentation: Kyoto
  • Year and Date: 2010-05-24
• [Presentation] APPLICATION OF LIQUID CLUSTER ION BEAMS IN SURFACE PROCESSING (2010)
  • Author(s): H.Ryuto, M.Takeuchi, G.H.Takaoka
  • Organizer: IPAC'10
  • Place of Presentation: Kyoto
  • Year and Date: 2010-05-24
• [Presentation] 含浸型イオン液体イオン源のイオンビーム特性II
  • Author(s): 植田 亨, 竹内光明, 龍頭啓充, 高岡義寛
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学
• [Remarks]
  • URL: http://pesec.t.kyoto-u.ac.jp