| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2010: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Research Abstract |
Composite cluster beam generation apparatus was constructed and clusters composed with Ar gas and liquid materials, such as methanol, water or α-trichloroethane, were formed. When a Si target was irradiated with the CH3OH-Ar composite cluster ion beam, the intensity of secondary ions from the Si by composite cluster ion was 10 times higher than that by Ar cluster ion. This result shows that the CH3OH-Ar composite cluster ion beam is useful as probe beam of secondary ion mass spectroscopy.
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