Establishment of Basic Fabrication Techniques for Interdisciplinary Electoro-mechanical Systems with Ionic Conductive Polymer Actuators
Project/Area Number |
22860037
|
Research Category |
Grant-in-Aid for Research Activity Start-up
|
Allocation Type | Single-year Grants |
Research Field |
Intelligent mechanics/Mechanical systems
|
Research Institution | Wakayama University |
Principal Investigator |
|
Project Period (FY) |
2010 – 2011
|
Project Status |
Completed (Fiscal Year 2011)
|
Budget Amount *help |
¥3,146,000 (Direct Cost: ¥2,420,000、Indirect Cost: ¥726,000)
Fiscal Year 2011: ¥1,508,000 (Direct Cost: ¥1,160,000、Indirect Cost: ¥348,000)
Fiscal Year 2010: ¥1,638,000 (Direct Cost: ¥1,260,000、Indirect Cost: ¥378,000)
|
Keywords | 高分子アクチュエータ / イオン導電性高分子 / マイクロマシン / 無電解めっき / IPMC / 異分野融合型デバイス / 微細加工 / 多孔質 |
Research Abstract |
In this research, we have developed a basic fabrication techniques for interdisciplinary electoro-mechanical Systems(MEMS) with ionic polymer conductive polymer actuators. Ionic polymer-metal composite(IPMC) is used as an ionic polymer conductive polymer actuator. In order to confirm the efficiencies of our developed techniques, a prototype of an IPMC of cantilever-type was fabricated on the silicon substrate by using them.
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Report
(3 results)
Research Products
(25 results)