Budget Amount *help |
¥3,146,000 (Direct Cost: ¥2,420,000、Indirect Cost: ¥726,000)
Fiscal Year 2011: ¥1,508,000 (Direct Cost: ¥1,160,000、Indirect Cost: ¥348,000)
Fiscal Year 2010: ¥1,638,000 (Direct Cost: ¥1,260,000、Indirect Cost: ¥378,000)
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Research Abstract |
In this research, we have developed a basic fabrication techniques for interdisciplinary electoro-mechanical Systems(MEMS) with ionic polymer conductive polymer actuators. Ionic polymer-metal composite(IPMC) is used as an ionic polymer conductive polymer actuator. In order to confirm the efficiencies of our developed techniques, a prototype of an IPMC of cantilever-type was fabricated on the silicon substrate by using them.
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