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Mechanics of deformation and fracture in metal/ceramic nano-laminated thin films

Research Project

Project/Area Number 22860053
Research Category

Grant-in-Aid for Research Activity Start-up

Allocation TypeSingle-year Grants
Research Field Materials/Mechanics of materials
Research InstitutionUniversity of Hyogo

Principal Investigator

NAKATANI Masanori  兵庫県立大学, 大学院・工学研究科, 助教 (80581553)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥3,055,000 (Direct Cost: ¥2,350,000、Indirect Cost: ¥705,000)
Fiscal Year 2011: ¥1,443,000 (Direct Cost: ¥1,110,000、Indirect Cost: ¥333,000)
Fiscal Year 2010: ¥1,612,000 (Direct Cost: ¥1,240,000、Indirect Cost: ¥372,000)
Keywords積層構造 / 表面構造 / 薄膜 / 機械的特性 / 自立化 / 積層薄膜 / 自立 / アルミニウム / アルミナ / 変形 / 破壊 / 窒化アルミ
Research Abstract

A fabrication method of free-standing metal/ceramic nano-laminate thin film and its tensile testing technique was developed, and the deformation and fracture behavior of free-standing metal/ceramic nano-laminate thin film was investigated. The fracture toughness of Cu/Al_2O_3 laminated film with 5 layers (thickness: 500nm, Cu: 120nm, Al_2O_3: 60nm) was lower than that of Cu film (thickness: 500nm). However, Cu layer with a thickness of only 120nm in laminated film still caused plastic deformation. Moreover, we proposed a novel technique for the fabrication of laminated film with surface nanostructure.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (11 results)

All 2012 2011

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (9 results)

  • [Journal Article] イオンビーム支援硬質窒化物薄膜の作製と特性評価2011

    • Author(s)
      内田仁,花木聡,中谷正憲
    • Journal Title

      プラズマ応用科学

      Volume: Vol. 19, No. 2 Pages: 85-92

    • NAID

      40019324397

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] イオンビーム支援蒸着法による島状ナノ構造TiN薄膜の創製2011

    • Author(s)
      中谷正憲,大澤拓也,花木聡,内田仁
    • Journal Title

      プラズマ応用科学

      Volume: Vol. 19, No. 2 Pages: 155-158

    • NAID

      40019324562

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Presentation] Influence of mixed layer on fatigue strength in carbon steel coated with tin film by ion beam assisted deposition2012

    • Author(s)
      Masanori Nakatani, Takuya Ohsawa, Satoshi Hanaki, Hitoshi Uchida
    • Organizer
      International Conference on Fatigue Damage of Structural Materials IX
    • Place of Presentation
      Massachusetts, USA
    • Year and Date
      2012-09-19
    • Related Report
      2011 Final Research Report
  • [Presentation] Mechanical property of nano-laminated TiN films with island-like morphology by ion beam assisted deposition2012

    • Author(s)
      Masanori Nakatani, Takuya Ohsawa, Satoshi Hanaki, Hitoshi Uchida
    • Organizer
      The 16th International Conference on Strength of Materials (ICSMA16)
    • Place of Presentation
      Bangalore, India
    • Year and Date
      2012-08-20
    • Related Report
      2011 Final Research Report
  • [Presentation] Formation and mechanical properties of island-like nanostructured titanium nitiride thin film by ion beam assisted deposition2012

    • Author(s)
      Masanori Nakatani, Takuya Ohsawa, Satoshi Hanaki, Hitoshi Uchida
    • Organizer
      The 15th International Conference on Experimental Mechanics (ICEM15)
    • Place of Presentation
      Porto, Portugal
    • Year and Date
      2012-07-23
    • Related Report
      2011 Final Research Report
  • [Presentation] SiN/SiC積層薄膜の創製とその自己き裂治癒能力2012

    • Author(s)
      西村淳樹, 中谷正憲, 花木聡, 内田仁
    • Organizer
      日本材料学会第61期学術講演会
    • Place of Presentation
      岡山大学
    • Year and Date
      2012-05-26
    • Related Report
      2011 Final Research Report
  • [Presentation] 島状表面ナノ構造を有するTiN薄膜の創製と機械的特性2012

    • Author(s)
      中谷正憲, 大澤拓也, 花木聡, 内田仁
    • Organizer
      日本材料学会第61期学術講演会
    • Place of Presentation
      岡山大学
    • Year and Date
      2012-05-26
    • Related Report
      2011 Final Research Report
  • [Presentation] イオンビーム支援蒸着法により面外回転体に成膜したTiN薄膜の機械的特性評価2011

    • Author(s)
      中谷正憲, 大澤拓也, 花木聡, 内田仁
    • Organizer
      日本機械学会M&M材料力学カンファレンス2011
    • Place of Presentation
      九州工業大学
    • Year and Date
      2011-07-18
    • Related Report
      2011 Final Research Report
  • [Presentation] イオンビーム支援蒸着法により成膜したTiN薄膜の破壊挙動2011

    • Author(s)
      中谷正憲, 花木聡, 内田仁
    • Organizer
      日本材料学会第60期学術講演会
    • Place of Presentation
      大阪大学
    • Year and Date
      2011-05-26
    • Related Report
      2011 Final Research Report
  • [Presentation] 自己き裂治癒能力を有するSiN/SiC積層薄膜の創製2011

    • Author(s)
      中谷正憲, 西村淳樹, 花木聡, 内田仁
    • Organizer
      日本材料学会第60期学術講演会
    • Place of Presentation
      大阪大学
    • Year and Date
      2011-05-25
    • Related Report
      2011 Final Research Report
  • [Presentation] イオンビーム支援蒸着法により作製したBN薄膜の機械的特性と内部応力緩和法の検討2011

    • Author(s)
      植山広基, 花木聡, 中谷正憲, 内田仁
    • Organizer
      日本材料学会第60期学術講演会
    • Place of Presentation
      大阪大学
    • Year and Date
      2011-05-25
    • Related Report
      2011 Final Research Report

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Published: 2010-08-27   Modified: 2016-04-21  

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