Mechanics of deformation and fracture in metal/ceramic nano-laminated thin films
| Project/Area Number |
22860053
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| Research Category |
Grant-in-Aid for Research Activity start-up
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| Allocation Type | Single-year Grants |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | University of Hyogo |
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Principal Investigator |
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| Project Period (FY) |
2010 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥3,055,000 (Direct Cost: ¥2,350,000、Indirect Cost: ¥705,000)
Fiscal Year 2011: ¥1,443,000 (Direct Cost: ¥1,110,000、Indirect Cost: ¥333,000)
Fiscal Year 2010: ¥1,612,000 (Direct Cost: ¥1,240,000、Indirect Cost: ¥372,000)
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| Keywords | 積層構造 / 表面構造 / 薄膜 / 機械的特性 / 自立化 / 積層薄膜 / 自立 / アルミニウム / アルミナ / 変形 / 破壊 / 窒化アルミ |
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| Research Abstract |
A fabrication method of free-standing metal/ceramic nano-laminate thin film and its tensile testing technique was developed, and the deformation and fracture behavior of free-standing metal/ceramic nano-laminate thin film was investigated. The fracture toughness of Cu/Al_2O_3 laminated film with 5 layers (thickness: 500nm, Cu: 120nm, Al_2O_3: 60nm) was lower than that of Cu film (thickness: 500nm). However, Cu layer with a thickness of only 120nm in laminated film still caused plastic deformation. Moreover, we proposed a novel technique for the fabrication of laminated film with surface nanostructure.
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Report
(3 results)
Research Products
(11 results)
