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ポスト2nm世代スピントロクスデバイス実現に向けた材料・デバイス・回路技術

Research Project

Project/Area Number 22H00214
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Review Section Medium-sized Section 21:Electrical and electronic engineering and related fields
Research InstitutionOsaka Metropolitan University (2024)
Kyoto University (2022-2023)

Principal Investigator

安藤 裕一郎  大阪公立大学, 大学院工学研究科, 教授 (50618361)

Project Period (FY) 2022-04-01 – 2026-03-31
Project Status Granted (Fiscal Year 2024)
Budget Amount *help
¥43,290,000 (Direct Cost: ¥33,300,000、Indirect Cost: ¥9,990,000)
Fiscal Year 2025: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2024: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2023: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
Fiscal Year 2022: ¥24,570,000 (Direct Cost: ¥18,900,000、Indirect Cost: ¥5,670,000)
Keywordsシリコンスピンデバイス / シリコンLSI / 電子スピン / 14族半導体 / シリコンスピントロニクス / シリコン / スピン流 / スピンデバイス / スピントロニクス / 14族元素
Outline of Research at the Start

微細化による半導体素子の性能向上は物理的限界に直面しつつある.本研究では電子スピンを活用するスピントロニクスに着目する.申請者はシリコンスピンFETや単一素子で切り替え可能な論理演算素子の室温動作実証に成功している.しかし実現した素子は1990年代レベルの素子サイズであるほか,遅延や容量等は未検討,現代の標準技術である歪やhigh-k絶縁膜等も未導入である.本研究はシリコンスピンデバイスに最新半導体技術を積極的に採用し,素子性能の飛躍的向上を目指す.また実用化には不可避の検討項目である遅延,容量,次段デバイスへの情報伝達手法等も検討する.

Outline of Annual Research Achievements

本年度は下記の(A)~(C)に関連する研究を実施し,以下に示すような結果を得た.
(A)シリコンデバイスの高速応答特性を評価するために,高周波電流源を用いてスピン信号の特性評価を行った.10Hzから100kHzまでの間でスピン輸送信号の評価を行い,電荷に起因する電圧成分,およびスピンに起因する電圧成分の詳細な切り分けを行ったところ,スピンに固有の容量成分が存在することが判明した.
(B)スピンの向きや総数を自在に制御することにより,論理演算を行うシリコンチャネル・スピン論理演算素子の実現を目指す研究を行った.デバイス加工の最適化を行ったところ,通常のプレーナー型スピン素子において,7オームを超える巨大なスピン依存抵抗を発現することに成功した.本結果は微小電流でも十分なスピン機能を発現できる可能性を示唆しており,多彩なスピンデバイスの基礎となる技術である.次に本作製手法を用いて非共線配置のスピンデバイスを作製した.スピンの回転操作のON/OFF,ゲート電圧のON/OFFにより,1素子で複数の演算内容を切り替え可能なスピン論理演算素子の室温原理実証に成功した.
(C)ショットキー障壁により高効率なスピン流電流変換を実現できるシリコンベースMESOデバイスの創成を目指し,強磁性体スピン注入源,シリコンスピン輸送チャネル,スピン流電流変換材料(SOI材料)が積層された基板を用いてMESO構造の作製を行った.作製プロセス過程において,シリコンチャネルのダメージが顕著であることが判明し,現在までのところスピン流―電流変換現象は得られていない.本目的のためにはフッ酸等のウェットプロセスの手法,時間の最適化が必要であることが判明した.

Current Status of Research Progress
Current Status of Research Progress

2: Research has progressed on the whole more than it was originally planned.

Reason

新しい物理現象の発見や,新規デバイス機能の実証等は順調に進んでいる.従って総合的に見れば概ね順調に進展していると判断できる.いくつかの研究内容については論文執筆の段階に到達していると判断できるため,今後は論文執筆にも注力したい.

Strategy for Future Research Activity

シリコンデバイスの高速応答については実験装置の拡充を図り,GHz領域まで評価し,学理の開拓を進めていきたい.MESOデバイスなどの新規スピンデバイスについては,まずは微細加工技術の改善を図り,室温での動作実証を図っていく予定である.また新しい展開として量子演算との融合を図り,より少数のスピンで駆動するスピンデバイスを創製し,高感度スピン検出の技術開発も図っていく予定である.

Report

(3 results)
  • 2023 Annual Research Report
  • 2022 Comments on the Screening Results   Annual Research Report
  • Research Products

    (19 results)

All 2024 2023 2022

All Journal Article (10 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 10 results,  Open Access: 3 results) Presentation (9 results) (of which Int'l Joint Research: 9 results,  Invited: 2 results)

  • [Journal Article] Evaluation of Spin Hall Effect in Ferromagnets by Means of Unidirectional Spin Hall Magnetoresistance in Ta/Co Bilayers2024

    • Author(s)
      Aoki M.、Ohshima R.、Shinjo T.、Shiraishi M.、Ando Y.
    • Journal Title

      Journal of the Magnetics Society of Japan

      Volume: 48 Issue: 2 Pages: 28-33

    • DOI

      10.3379/msjmag.2403R003

    • ISSN
      1882-2924, 1882-2932
    • Year and Date
      2024-03-01
    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] A circular photogalvanic effect in two-dimensional electron gas on the surface of SrTiO32024

    • Author(s)
      Yamamoto Mahiro、Nishijima Taiki、Ohshima Ryo、Ando Yuichiro、Shiraishi Masashi
    • Journal Title

      Applied Physics Letters

      Volume: 124 Issue: 8 Pages: 1-4

    • DOI

      10.1063/5.0190118

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magnetoresistance ratio in magnetic tunnel junction with silicon diffused MgO barrier2023

    • Author(s)
      Watanabe Tatsuki、Goto Minori、Ando Yuichiro、Watakabe Tsubasa、Nomura Hikaru、Suzuki Yoshishige
    • Journal Title

      Applied Physics Express

      Volume: 17 Issue: 1 Pages: 013001-013001

    • DOI

      10.35848/1882-0786/ad0ba1

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Precise estimation of spin drift velocity and spin mobility in the absence of synthetic Rashba spin-orbit field in a Si metal-oxide-semiconductor2023

    • Author(s)
      H. Inoue, H. Koike, R. Ohshima, Y. Ando and M. Shiraishi
    • Journal Title

      Physical Review B

      Volume: 108 Issue: 21 Pages: 214414-214414

    • DOI

      10.1103/physrevb.108.214414

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Gigantic Anisotropy of Self-Induced Spin-Orbit Torque in Weyl Ferromagnet Co2MnGa2023

    • Author(s)
      Aoki Motomi、Yin Yuefeng、Granville Simon、Zhang Yao、Medhekar Nikhil V.、Leiva Livio、Ohshima Ryo、Ando Yuichiro、Shiraishi Masashi
    • Journal Title

      Nano Letters

      Volume: 23 Issue: 15 Pages: 6951-6957

    • DOI

      10.1021/acs.nanolett.3c01573

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Ferroic Berry Curvature Dipole in a Topological Crystalline Insulator at Room Temperature2023

    • Author(s)
      Nishijima Taiki、Watanabe Takuto、Sekiguchi Hiroaki、Ando Yuichiro、Shigematsu Ei、Ohshima Ryo、Kuroda Shinji、Shiraishi Masashi
    • Journal Title

      Nano Letters

      Volume: 23 Issue: 6 Pages: 2247-2252

    • DOI

      10.1021/acs.nanolett.2c04900

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] All-electric spin device operation using the Weyl semimetal, WTe2, at room temperature2023

    • Author(s)
      K. Ohnishi, M. Aoki, R. Ohshima, E. Shigematsu, Y. Ando, T. Takenobu and M. Shiraishi
    • Journal Title

      Advanced Electronic Materials

      Volume: 9 Issue: 1 Pages: 2200647-2200647

    • DOI

      10.1002/aelm.202200647

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Realization of Efficient Tuning of the Fermi Level in Iron-based Ferrimagnetic Alloys2022

    • Author(s)
      N. Yamashita, E. Shigematsu, S. Honda, R. Ohshima, M. Shiraishi, and Y. Ando
    • Journal Title

      Physical Review Materials

      Volume: 6 Issue: 10 Pages: 104405-104405

    • DOI

      10.1103/physrevmaterials.6.104405

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Anomalous sign inversion of spin-orbit torque in ferromagnetic/nonmagnetic bilayer systems due to self-induced spin-orbit torque2022

    • Author(s)
      M. Aoki, E. Shigematsu, R. Ohshima, T. Shinjo, M. Shiraishi, and Y. Ando
    • Journal Title

      Physical Review B

      Volume: 106 Issue: 17 Pages: 174418-174418

    • DOI

      10.1103/physrevb.106.174418

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Efficient room-temperature magnetization direction detection by means of the enhanced anomalous Nernst effect in a Weyl ferromagnet2022

    • Author(s)
      Leiva L.、Granville S.、Zhang Y.、Dushenko S.、Shigematsu E.、Ohshima R.、Ando Y.、Shiraishi M.
    • Journal Title

      Physical Review Materials

      Volume: 6 Issue: 6 Pages: 064201-064201

    • DOI

      10.1103/physrevmaterials.6.064201

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Presentation] Spin Hall Effect Mediated Photocurrent Generation at the Edge of Nonmagnetic Metals2024

    • Author(s)
      T. Nishijima, R. Ohshima, Y. Yanase, R. Ishii, M. Shiraishi, Y. Ando
    • Organizer
      International Symposia on Creation of Advanced Photonic and Electronic Devices 2024 and Advanced Quantum Technology for Future 2024
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Circular photogalvanic effect in spin-splitting metallic state at the surface of SrTiO32023

    • Author(s)
      M. Yamamoto, T. Nishijima, R. Ohshima, Y. Ando, and M. Shiraishi
    • Organizer
      Solid State Devices and Materials 2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of the self-induced spin-orbit torque in spin-orbit torque measurements for nonmagnet/ferromagnet bilayer systems2023

    • Author(s)
      M. Aoki, E. Shigematsu, R. Ohshima, T. Shinjo, M. Shiraishi, and Y. Ando
    • Organizer
      11th International Conference on Superconductivity and Magnetism
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Coexistence of low-frequency spin-torque ferromagnetic resonance and unidirectional spin Hall magnetoresistance in spin torque ferromagnetic resonance signals2023

    • Author(s)
      Y. Ando, M. Aoki and M. Shiraishi
    • Organizer
      8th International Conference on Superconductivity and Magnetism
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Observation of charge-to-spin conversion in ferromagnets by means of spin-orbit torque2023

    • Author(s)
      M. Aoki, E. Shigematsu, R. Ohshima, T. Shinjo, M. Shiraishi, and Y. Ando
    • Organizer
      8th International Conference on Superconductivity and Magnetism
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Spin Dependent Photocurrent Generation in Germanene-like Structure2022

    • Author(s)
      T. Nishijima, S. Kawa, Y. Ando, A. Ohta, J. Yuhara, M. Kurosawa, E. Shigematsu, R. Ohshima, and M. Shiraishi
    • Organizer
      The 67th Annual Conference on Magnetism and Magnetic Materials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Investigation of electric and spin properties in germanium-based post graphene materials2022

    • Author(s)
      T. Nishijima, S. Kawa, Y. Ando, A. Ohta, J. Yuhara, M. Kurosawa, E. Shigematsu, R. Ohshima and M. Shiraishi
    • Organizer
      IUMRS-ICYRAM 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Spin-dependent unidirectional spin Hall magnetoresistance detected with spin torque ferromagnetic resonance2022

    • Author(s)
      M. Aoki, Y. Ando, R. Ohshima, E. Shigematsu, T. Shinjo, and M. Shiraishi
    • Organizer
      International Colloquium on Magnetic Film and Surfaces
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Realization of low-magnon damping in ultra-thin Co films by controlling uniaxial interfacial magnetic anisotropy field at ferromagnet/nonmagnet interfaces2022

    • Author(s)
      S. Yoshii, E. Shigematsu, R. Ohshima, Y. Ando and M. Shiraishi
    • Organizer
      International Colloquium on Magnetic Film and Surfaces
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research

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Published: 2022-04-19   Modified: 2025-04-17  

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