Research Project
Grant-in-Aid for Challenging Research (Exploratory)
SiとGeの半導体結晶の接合技術「常温SAB」を用いて,0.5-100keVの広帯域X線・ガンマ線と,0.3-1.8μmの可視光・近赤外線を一気に観測可能な「Si-Ge一体型撮像素子」を開発する.Geの検出部でX線・ガンマ線および可視光・近赤外線それぞれの波長で観測帯域が広げつつ,Si回路層で低雑音や小さいピクセルを実現する.本研究の初年度に単素子フォトダイオードを試作し,常温SABの条件出しを行う.2年目には,申請者が開発したX線SOIを薄化したSi回路層をGeに接合し,実際にSi-Ge一体型撮像素子を試作し撮像分光を実証する.
We have developed a Si-Ge integrated imaging device that can observe broadband X-rays and gamma-rays in the 0.5-100 keV range, and optical and near-infrared light in the 0.3-1.8 μm range at once by adopting the room-temperature Sirface Activate Bonding (SAB) technique for Si-Ge semiconductor crystals. The photoresponse of the best devices was evaluated under three annealing conditions. The basic concept of Si-Ge was confirmed by successful observation of photocurrent by infrared light, which is not absorbed by Si. We clarified issues in bonding and assembling the imaging device by using an X-ray SOI sensor as the Si side. We expect that this improvement will complete the Si-Ge image sensor in the future.
本研究はSi-Ge一体型撮像素子への第1歩であり,その実現は下記の意義がある.現状のSi以外の素材の2次元ピクセル撮像素子は全てバンプボンディングを介して2次元ASICで読み出す.これは複雑・高価で性能に限界がある.Si-Ge一体型は,自然な結晶接合を利用するので,安価で構造も強固である.ピクセルサイズや読み出しノイズなどの性能は,ベースのSi素子で決まり,高性能化が見込める.Ge以外も接合可能である.これは米国が独占している近赤外線領域では極めて重要である.低コストが重要な社会実装でも本研究の応用が見込める.例えば太陽光の影響がない赤外線TOFによる距離計測などに応用可能だろう.
All 2024 2023 2022
All Journal Article (11 results) (of which Int'l Joint Research: 4 results, Peer Reviewed: 10 results, Open Access: 8 results) Presentation (67 results) (of which Int'l Joint Research: 7 results, Invited: 1 results) Book (1 results)
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume: 1060 Pages: 169033-169033
10.1016/j.nima.2023.169033
IEEE Transactions on Nuclear Science
Volume: 70 Issue: 7 Pages: 1444-1450
10.1109/tns.2023.3287130
The Astrophysical Journal
Volume: 950 Issue: 2 Pages: 137-137
10.3847/1538-4357/acccf6
Volume: 940 Issue: 2 Pages: 105-105
10.3847/1538-4357/ac94cf
Publications of the Astronomical Society of Japan
Volume: 74 Issue: 5 Pages: 1143-1156
10.1093/pasj/psac060
Volume: 74 Issue: 4 Pages: 757-766
10.1093/pasj/psac033
Proc. SPIE
Volume: 12191 Pages: 12191-12191
10.1117/12.2629771
Journal of Astronomical Telescopes, Instruments, and Systems
Volume: 8 Issue: 04 Pages: 046001-046001
10.1117/1.jatis.8.4.046001
Proceedings of SPIE Astronomical Telescopes and Instrumentation
Volume: 12181 Pages: 1218122-1218122
10.1117/12.2628772
Proceedings of the SPIE
Volume: 12181 Pages: 11-11
10.1117/12.2626894
Volume: 8 Issue: 02 Pages: 26007-26007
10.1117/1.jatis.8.2.026007