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Development of high-performance deformable mirror with nobel structure

Research Project

Project/Area Number 22K18752
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
Research InstitutionNagoya University

Principal Investigator

Matsuyama Satoshi  名古屋大学, 工学研究科, 准教授 (10423196)

Project Period (FY) 2022-06-30 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2023: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2022: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
KeywordsX線ミラー / 形状可変鏡 / X線光学 / X線顕微鏡 / 補償光学 / X線ナノビーム
Outline of Research at the Start

X線光学では,波長が1nm~1ÅのX線を扱うため,理想的な実験をしようとすると,非常に高い形状精度を持つ鏡が必要である.しかし,現在の最先端技術をもってしても鏡の作製には2nm前後の誤差が生じてしまう.このような鏡の形状誤差は,X線の波面を歪めるため,集光や結像などの高度な実験を困難にする.本研究では自由かつ高精度に変形できる鏡(形状可変鏡)を実現し,その形状をX線照射下でその場調整することでこの課題を克服する.高い完成度でX線領域の補償光学を実現すべく,全く新しい構造を持つ形状可変鏡を提案し,Åオーダーの精度と安定性の達成に挑む.

Outline of Final Research Achievements

X-ray optics mainly handles light with wavelengths from 10 to 0.01 nm, so mirrors with extremely high shape accuracy are required for ideal experiments. However, even with current state-of-the-art technology, there is still an fabrication error of around 2 nm in the mirror fabrication. To solve this problem, we proposed a monolithic deformable mirror based on a single-crystal piezoelectric element. The design was carefully considered using finite element simulation, and a prototype was fabricated. The performance was evaluated using visible light interferometry and X-ray interferometry, and was found to have high stability and reproducibility. It was confirmed that the performance of the proposed device can be applied to actual X-ray experiments.

Academic Significance and Societal Importance of the Research Achievements

本研究で開発された高性能な形状可変鏡は,様々な領域で波面収差の補正を実施できるポテンシャルを有していた.例えば,X線顕微鏡,X線望遠鏡,X線ナノビーム,X線(EUV)リソグラフィにおいては,残存する波面収差によって性能劣化が引き起こされている.安定かつ再現性良くこれを補正することが可能となり,これらの性能向上へとつながることが予想される.X線光学における技術向上が次世代のX線光学を拓くために必要であり,本研究で得られた形状可変鏡はその一助になると考える.

Report

(3 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Research-status Report
  • Research Products

    (13 results)

All 2024 2023 2022 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (10 results) (of which Int'l Joint Research: 4 results,  Invited: 1 results) Remarks (2 results)

  • [Journal Article] Monolithic deformable mirror based on lithium niobate single crystal for high-resolution X-ray adaptive microscopy2024

    • Author(s)
      Inoue Takato、Nakabayashi Sota、Uematsu Kota、Tanaka Yuto、Nakamori Hiroki、Kohmura Yoshiki、Yabashi Makina、Matsuyama Satoshi
    • Journal Title

      Optica

      Volume: 11 Issue: 5 Pages: 621-621

    • DOI

      10.1364/optica.516909

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Development of ultraprecise X-ray adaptive optical system for high-resolution full-field microscopy2023

    • Author(s)
      Sota Nakabayashi, Takato Inoue, Kota Uematsu, Yuto Tanaka, Yoshio Ichii, Yoshiki Kohmura, Makina Yabashi and Satoshi Matsuyama
    • Organizer
      8th International Conference on X-ray Optics and Applications 2023 (XOPT2023) in OPIC2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 単結晶圧電素子ベース形状可変ミラーを用いたアダプティブ結像型X線顕微鏡の開発2023

    • Author(s)
      中林荘太,井上陽登,伊藤颯希,香村芳樹,矢橋牧名,松山智至
    • Organizer
      2023年度精密工学会秋季大会学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] 超高分解能結像型X線顕微鏡のためのアダプティブミラー光学系の開発2023

    • Author(s)
      井上陽登,中林荘太,田中優人,上松航太,加納愛彩,香村芳樹,矢橋牧名,松山智至
    • Organizer
      日本光学会年次学術講演会 Optics and Photonics Japan 2023
    • Related Report
      2023 Annual Research Report
  • [Presentation] ニオブ酸リチウムを用いた高精度形状可変ミラーの開発2023

    • Author(s)
      中林荘太,井上陽登,上松航太,矢橋牧名,香村芳樹,松山智至
    • Organizer
      第36回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2022 Research-status Report
  • [Presentation] High-resolution Full-field X-ray Microscope Based on Multilayer Advanced KB Mirrors2022

    • Author(s)
      S. Matsuyama
    • Organizer
      15th International Conference on X-ray Microscopy
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Novel deformable X-ray mirrors based on lithium niobate singlecrystal2022

    • Author(s)
      S. Nakabayashi, K. Uematsu, T. Inoue, and S. Matsuyama
    • Organizer
      7th International Conference on X-ray Optics and Applications 2022
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Development of ultra precise adaptive X-ray optical imaging system for high-resolution X-ray microscope2022

    • Author(s)
      S. Nakabayashi, T. Inoue, K. Uematsu, Y. Kohmura, M. Yabashi and S. Matsuyama
    • Organizer
      Asia-Oceania Conference on Synchrotron Radiation Instrumentation 2022
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] 高空間分解能な結像型X線顕微鏡のためのX線ミラー補償光学系2022

    • Author(s)
      田中優人,井上陽登,中林荘太,上松航太,伊藤颯希,山田純平,香村芳樹,矢橋牧名,山内和人,松山智至
    • Organizer
      第36回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2022 Research-status Report
  • [Presentation] ニオブ酸リチウム単結晶を用いたX線用形状可変ミラーの開発 ー第2報:アダプティブ Advanced KBミラー光学系の構築ー2022

    • Author(s)
      中林荘太,井上陽登,上松航太,香村芳樹,矢橋牧名,松山智至
    • Organizer
      2022精密工学会秋季大会学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] 次世代X線顕微鏡のための高精度X線形状可変ミラーの開発2022

    • Author(s)
      井上陽登,中林荘太,上松航太,一井愛雄,香村芳樹,矢橋牧名,山内和人,松山智至
    • Organizer
      日本光学会年次学術講演会
    • Related Report
      2022 Research-status Report
  • [Remarks] 名古屋大学松山研究室

    • URL

      https://x-ray.mp.pse.nagoya-u.ac.jp/

    • Related Report
      2023 Annual Research Report
  • [Remarks] 松山研究室【名古屋大学院工学研究科・物質科学専攻・量子ビーム物性工学】

    • URL

      https://x-ray.mp.pse.nagoya-u.ac.jp/

    • Related Report
      2022 Research-status Report

URL: 

Published: 2022-07-05   Modified: 2025-01-30  

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