MEMS技術に基づく応力制御によるダイヤモンドのバンドエンジニアリング

• Project/Area Number: 22K18957
• Research Category: Grant-in-Aid for Challenging Research (Exploratory)
• Allocation Type: Multi-year Fund
• Review Section: Medium-sized Section 28:Nano/micro science and related fields
• Research Institution: National Institute for Materials Science
• Principal Investigator: 廖 梅勇 国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主席研究員 (70528950)
• Co-Investigator(Kenkyū-buntansha): 小泉 聡 国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, グループリーダー (90215153) ; SANG Liwen 国立研究開発法人物質・材料研究機構, 国際ナノアーキテクトニクス研究拠点, 独立研究者 (90598038)
• Project Period (FY): 2022-06-30 – 2025-03-31
• Project Status: Granted (Fiscal Year 2022)
• Budget Amount: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000); Fiscal Year 2024: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2023: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2022: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: ダイヤモンド / MEMS / バンドエンジニアリング

Outline of Research at the Start

本研究では、研究代表者らが十年来開発してきたMEMS（Microelectromechanical systems）技術を使用して、ダイヤモンドにおける引張ひずみを誘発し、ダイヤモンドのバンドギャップエネルギーを変調させ、ダイヤモンド中のリン（n型）またはボロン（p型）のイオン化エネルギーを減らすことにより、ダイヤモンドのドーピングの欠点を解決し、室温でも高電気伝導を実現することを目的とする。

Outline of Annual Research Achievements

This proposal is to modulate the bandgap of diamond by using our developed diamond MEMS technology. In this year, we fabicated single-crystal diamond MEMS structures such as cantilevers and double-clamped beams with different dimensions of length from 50 to 160 um, width around 10um, and thickness from 500nm to 4um. We etched the ion-implantation induced damages in diamond by using an efficient atomic scale etching method and improved the quality factor of the single-crystal diamond cantilever from 10000 to over 200000 within 10 hrs. We also succeeded in the electrostatic control of the diamond bending, which was evidenced by the resonance frequency measurements and resonance amplitude control. These work forms the basis for next-stage of strain controlling in single-crystal diamond.

Current Status of Research Progress

2: Research has progressed on the whole more than it was originally planned.

Reason

The single-crystal diamond MEMS structures were fabricated and the crystal quality was improved as expected.

Strategy for Future Research Activity

In this year, we will further reduce the single-crystal diamond MEMS resonator thickness to less than 300 nm. In such a case, we could bend the single-crystal diamond by external electrodes to achieve a large elastic deformation. Then, we will measure the photocurrent of the bended single-srytal diamond MEMS cantilevers. The strain and the energy bandgap of single-crystal diamond can thus be determined. To achieve this aim, high crystal diamond epiplayers will be further grown by tunning the growth parameters. After that, boron-doped single-crystal diamond epilayers will be grown and the related p-type diamond MEMS structures will be fabricated. The bending of the boron-doped p-type diamond MEMS will be demonstrated by external electric fields.

Research Products

• [Journal Article] Unconventional Giant “Magnetoresistance” in Bosonic Semiconducting Diamond Nanorings (2023)
  • Author(s): Zhang Gufei、Zulkharnay Ramiz、Ke Xiaoxing、Liao Meiyong、Liu Liwang、Guo Yujie、Li Yejun、Rubahn Horst‐G?nter、Moshchalkov Victor V.、May Paul W.
  • Journal Title: Advanced Materials Volume: 35 Issue: 22 Pages: 2211129-2211129
  • DOI: 10.1002/adma.202211129
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film (2023)
  • Author(s): Zhang Zilong、Zhao Wen、Chen Guo、Toda Masaya、Koizumi Satoshi、Koide Yasuo、Liao Meiyong
  • Journal Title: Advanced Functional Materials Volume: 33 Issue: 27 Pages: 2300805-2300805
  • DOI: 10.1002/adfm.202300805
  • Peer Reviewed
• [Journal Article] Effect of gas pressure on the quality-factor of single-crystal diamond micro cantilevers (2022)
  • Author(s): Chen Yinling、Sang Liwen、Koizumi Satoshi、Koide Yasuo、Liu Xiaoxi、Liao Meiyong
  • Journal Title: Diamond and Related Materials Volume: 129 Pages: 109340-109340
  • DOI: 10.1016/j.diamond.2022.109340
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] n-Type Diamond Metal-Semiconductor Field-Effect Transistor With High Operation Temperature of 300°C (2022)
  • Author(s): Shimaoka Takehiro、Liao Meiyong、Koizumi Satoshi
  • Journal Title: IEEE Electron Device Letters Volume: 43 Issue: 4 Pages: 588-591
  • DOI: 10.1109/led.2022.3156149
  • Peer Reviewed
• [Presentation] Air damping effect on the quality factor of single-crystal diamond MEMS resonators. (2022)
  • Author(s): CHEN, Yingling, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, 劉 小晰, LIAO, Meiyong
  • Organizer: 第83回応用物理学会秋季学術講演会
• [Presentation] Effect of deep-defects on the energy dissipation of diamond MEMS resonator (2022)
  • Author(s): サン フアンイン, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong
  • Organizer: 19th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XIX)
• [Presentation] Effect of pressure on quality-factor of single-crystal diamond micro cantilevers. (2022)
  • Author(s): CHEN, Yingling, サン フアンイン, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, Xiaoxi Liu, LIAO, Meiyong.
  • Organizer: International Conference on New Diamond and Nano Carbons (NDNC2022)
• [Presentation] Efficient etching of diamond by oxygen annealing toward high-Q factor diamond MEMS resonators. (2022)
  • Author(s): CHEN, Yingling, サン フアンイン, SANG, Liwen, KOIZUMI, Satoshi, KOIDE, Yasuo, Xiaoxi Liu, LIAO, Meiyong.
  • Organizer: E-MRS Spring Meeting 2022 https://www.european-mrs.com/advanced-carbon-materials-emrs
  • Int'l Joint Research / Invited