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Development of highly stable deformable mirrors for extreme focusing of X-ray free-electron lasers.

Research Project

Project/Area Number 22K20407
Research Category

Grant-in-Aid for Research Activity Start-up

Allocation TypeMulti-year Fund
Review Section 0301:Mechanics of materials, production engineering, design engineering, fluid engineering, thermal engineering, mechanical dynamics, robotics, aerospace engineering, marine and maritime engineering, and related fields
Research InstitutionNagoya University

Principal Investigator

Inoue Takato  名古屋大学, 工学研究科, 助教 (40966777)

Project Period (FY) 2022-08-31 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2023: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2022: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
KeywordsX線自由電子レーザー / X線ミラー / 形状可変ミラー / 圧電素子 / X線集光
Outline of Research at the Start

超高ピーク強度を有するX線自由電子レーザー(XFEL)を小さくかつ高密度に集光することで,X線領域の新たな学問が拓かれつつある.しかし,原子スケールの短い波長を有するXFELを極限集光するためにはサブナノメートルの表面形状精度を有するミラーが不可欠であり,現状の製造技術では達成不可能である.そこで本研究では圧電素子の逆圧電効果を利用した形状可変ミラーを開発することで,この課題解決を試みる.

Outline of Final Research Achievements

In this study, a deformable mirror was developed to create a system capable of focusing an X-ray free-electron laser with high stability. Piezoelectric-driven deformable mirrors are commonly used in the X-ray region. To increase the deformation in response to an applied voltage, we implemented a bonding structure using metal junctions, successfully enhancing the amount of deformation. Additionally, a thin-plate bonding structure was devised to achieve finer deformation shapes. This structure was successfully fabricated using silver nanopaste, and the deformable mirror exhibited successful deformation in an X-ray beamline.

Academic Significance and Societal Importance of the Research Achievements

X線自由電子レーザー(XFEL)を利用することで,試料の真の非破壊観察や,X線非線形光学の開拓が期待されている.これらを実現するためには,XFELを高い安定性の下,小さく高密度に集光する必要がある.すなわち,高い形状精度と安定性を有するX線集光素子が不可欠であり,本研究で開発する形状可変ミラーはそれらを満足する.

Report

(3 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Research-status Report
  • Research Products

    (13 results)

All 2024 2023

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (12 results) (of which Int'l Joint Research: 4 results)

  • [Journal Article] Monolithic deformable mirror based on lithium niobate single crystal for high-resolution X-ray adaptive microscopy2024

    • Author(s)
      Inoue Takato、Nakabayashi Sota、Uematsu Kota、Tanaka Yuto、Nakamori Hiroki、Kohmura Yoshiki、Yabashi Makina、Matsuyama Satoshi
    • Journal Title

      Optica

      Volume: 11 Issue: 5 Pages: 621-621

    • DOI

      10.1364/optica.516909

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Development of monolithic bimorph mirror based on single crystal piezoelectric element for variable beam size optical system2024

    • Author(s)
      Junya Yoshimizu, Takato Inoue, Yoshiki Kohmura, Makina Yabashi and Satoshi Matsuyama
    • Organizer
      9th International Conference on X-ray Optics and Applications 2024 (XOPT2024) in OPIC2024
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of deformable mirror with bonded multiple piezoelectric substrates for high spatial frequency shape control2024

    • Author(s)
      Maaya Kano, Takato Inoue, Junya Yoshimizu, Toma Ueyama and Satoshi Matsuyama
    • Organizer
      The 20th International Conference on Precision Engineering 2024(ICPE 2024)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高空間周波数形状制御可能な接合型形状可変ミラーの開発2024

    • Author(s)
      加納愛彩,井上陽登,中林荘太,香村芳樹,矢橋牧名,松山智至
    • Organizer
      第37回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2023 Annual Research Report
  • [Presentation] 単結晶圧電素子を用いたビームサイズ可変光学系用形状可変ミラーの開発2024

    • Author(s)
      吉水純弥,井上陽登,香村芳樹,矢橋牧名,松山智至
    • Organizer
      第37回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2023 Annual Research Report
  • [Presentation] Development of ultraprecise X-ray adaptive optical system for high-resolution full-field microscopy2023

    • Author(s)
      Sota Nakabayashi, Takato Inoue, Kota Uematsu, Yuto Tanaka, Yoshio Ichii, Yoshiki Kohmura, Makina Yabashi and Satoshi Matsuyama
    • Organizer
      8th International Conference on X-ray Optics and Applications 2023 (XOPT2023) in OPIC2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a novel deformable X-ray mirror based on a single-crystal piezoelectric element2023

    • Author(s)
      Junya Yoshimizu, Takato Inoue, Maaya Kano, Sota Nakabayashi, Yoshiki Kohmura, Makina Yabashi and Satoshi Matsuyama
    • Organizer
      The 10th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN) 2023
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 単結晶圧電素子ベース形状可変ミラーを用いたアダプティブ結像型X線顕微鏡の開発2023

    • Author(s)
      中林荘太,井上陽登,伊藤颯希,香村芳樹,矢橋牧名,松山智至
    • Organizer
      2023年度精密工学会秋季大会学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] ニオブ酸リチウムを用いた大変形可能なX線形状可変ミラーの開発2023

    • Author(s)
      吉水純弥,井上陽登,加納愛彩,中林荘太,香村芳樹,矢橋牧名,松山智至
    • Organizer
      2023年度精密工学会秋季大会学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] ビームサイズ可変X線光学系のための単結晶圧電素子を使った形状可変ミラーの開発2023

    • Author(s)
      吉水純弥,井上陽登,加納愛彩,中林荘太,香村芳樹,矢橋牧名,松山智至
    • Organizer
      日本光学会年次学術講演会 Optics and Photonics Japan 2023
    • Related Report
      2023 Annual Research Report
  • [Presentation] 超高分解能結像型X線顕微鏡のためのアダプティブミラー光学系の開発2023

    • Author(s)
      井上陽登,中林荘太,田中優人,上松航太,加納愛彩,香村芳樹,矢橋牧名,松山智至
    • Organizer
      日本光学会年次学術講演会 Optics and Photonics Japan 2023
    • Related Report
      2023 Annual Research Report
  • [Presentation] 高空間周波数形状制御可能な新規構造の形状可変ミラーの開発2023

    • Author(s)
      加納愛彩,井上陽登,中林荘太,上松航太,香村芳樹,矢橋牧名,松山智至
    • Organizer
      2023年度精密工学会春季大会学術講演会
    • Related Report
      2022 Research-status Report
  • [Presentation] 単結晶圧電素子を用いた大変形可能なX線形状可変ミラーの開発2023

    • Author(s)
      吉水純弥,井上陽登,中林荘太,上松航太,松山智至
    • Organizer
      2023年度精密工学会春季大会学術講演会
    • Related Report
      2022 Research-status Report

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Published: 2022-09-01   Modified: 2025-01-30  

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