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高温対応ダイヤモンドMEMS磁気センサ

Research Project

Project/Area Number 22KF0382
Project/Area Number (Other) 22F21341 (2022)
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeMulti-year Fund (2023)
Single-year Grants (2022)
Section外国
Review Section Basic Section 21050:Electric and electronic materials-related
Research InstitutionNational Institute for Materials Science

Principal Investigator

廖 梅勇  国立研究開発法人物質・材料研究機構, 電子・光機能材料研究センター, 主席研究員 (70528950)

Co-Investigator(Kenkyū-buntansha) ZHANG ZILONG  国立研究開発法人物質・材料研究機構, 電子・光機能材料研究センター, 外国人特別研究員
Project Period (FY) 2023-03-08 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 2023: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2022: ¥1,200,000 (Direct Cost: ¥1,200,000)
Keywordsダイヤモンド / MEMS / 磁気センサ
Outline of Research at the Start

We integrate magnetic thin films with high-Curie temperature (>900K) on diamond MEMS resonators to develop high-reliability magnetic sensors. We will investigate the interface between diamond and the magnetic thin film to optimize the sensing properties.The dimensions of diamond MEMS resonators will also be optimized to achieve high sensitivity.

Outline of Annual Research Achievements

本研究では、500℃までの高温MEMS磁気センサーを開発することを目指す。 今年度は、単結晶ダイヤモンド を巨大な磁歪 FeGa 膜と結合することにより、オンチップの統合型単結晶ダイヤモンド (SCD) MEMS 磁気トランスデューサを実証した。 FeGa 膜は、機械共振子の駆動、外部磁場の自己感知、および共振信号の電気的な読み取りのために多機能化された。 オンチップ単結晶ダイヤモンド MEMSトランスデューサは、室温から500℃まで3.2 Hz/mTの高感度と、300℃まで9.45 nT/Hz^0.5の低ノイズレベルを示した。 共振周波数の最小変動は室温で1.9×10^(-6)、300℃で2.3×10^(-6)で、高温でも10nT未満の磁場分解能をを達成した。 さらに、並列電気読み出しを備えた単結晶ダイヤモンド MEMS 共振器アレイも実現され、磁気イメージ センサーの開発への道が開かれた。8x8 ダイヤモンドMEMSカンチレバーアレイも開発された。 今回の研究により、高性能および高い熱安定性を備えた、集積されたオンチップ MEMS 共振器トランスデューサの開発が期待されている。

Report

(2 results)
  • 2023 Annual Research Report
  • 2022 Annual Research Report
  • Research Products

    (10 results)

All 2024 2023 2022

All Journal Article (4 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 4 results,  Open Access: 1 results) Presentation (6 results) (of which Int'l Joint Research: 1 results)

  • [Journal Article] Effect of defects on Q factors of single-crystal diamond MEMS resonators2023

    • Author(s)
      Zhang Zilong、Chen Guo、Gu Keyun、Koizumi Satoshi、Liao Meiyong
    • Journal Title

      Functional Diamond

      Volume: 3 Issue: 1 Pages: 2221280-2221280

    • DOI

      10.1080/26941112.2023.2221280

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film2023

    • Author(s)
      Zhang Zilong、Zhao Wen、Chen Guo、Toda Masaya、Koizumi Satoshi、Koide Yasuo、Liao Meiyong
    • Journal Title

      Advanced Functional Materials

      Volume: 33 Issue: 27 Pages: 2300805-2300805

    • DOI

      10.1002/adfm.202300805

    • Related Report
      2023 Annual Research Report 2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Diamond MEMS: From Classical to Quantum2023

    • Author(s)
      Sun Huanying、Zhang Zilong、Liu Yulong、Chen Guo、Li Tiefu、Liao Meiyong
    • Journal Title

      Advanced Quantum Technologies

      Volume: 6 Issue: 11 Pages: 2300189-2300189

    • DOI

      10.1002/qute.202300189

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Enhancement of magnetic sensing performance of diamond resonators coupling with magnetic-strictive FeGa films by various interlayers2022

    • Author(s)
      Zhang Zilong、Sang Liwen、Huang Jian、Wang Linjun、Koide Yasuo、Koizumi Satoshi、Liao Meiyong
    • Journal Title

      Carbon

      Volume: 200 Pages: 401-409

    • DOI

      10.1016/j.carbon.2022.08.086

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] Diamond MEMS resonators for real-time dual sensing of magnetic fields and temperatures up to 300℃2024

    • Author(s)
      ZHANG, Zilong, 顧 克云, 陳 果, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong
    • Organizer
      2024年第71回応用物理学会春季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Diamond microresonators with on-chip actuation and sensing for magnetic sensing at high temperatures2024

    • Author(s)
      ZHANG, Zilong, 顧 克云, 陳 果, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong
    • Organizer
      The International Conference on the Science and Technology for Advanced Ceramics (STAC)
    • Related Report
      2023 Annual Research Report
  • [Presentation] Effect of magnetostrictive film thickness for enhancing magnetic sensing performance of diamond MEMS resonator2023

    • Author(s)
      ZHANG, Zilong, 陳 果, 顧 克云, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong
    • Organizer
      2023年第84回応用物理学会秋季学術講演会.
    • Related Report
      2023 Annual Research Report
  • [Presentation] On-chip diamond MEMS resonators magnetic sensing uo to 500℃.2023

    • Author(s)
      ZHANG, Zilong, 陳 果, Guangchao Chen, KOIZUMI, Satoshi, KOIDE, Yasuo, LIAO, Meiyong
    • Organizer
      The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)
    • Related Report
      2023 Annual Research Report
  • [Presentation] High-temperature diamond MEMS magnetic sensor with on-chip actuation and sensing2023

    • Author(s)
      ZHANG, Zilong, 陳 果, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Enhancement of Magnetic Sensing Performances of Single-crystal Diamond Resonators through Various Interlayers2022

    • Author(s)
      ZHANG, Zilong, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong.
    • Organizer
      15th International Conference on New Diamond and Nano Carbons 2022 (NDNC2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research

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Published: 2022-07-28   Modified: 2024-12-25  

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