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微小機械式可変メタマテリアルのプラズモン共鳴変調機構の解明と超高速THz波制御

Research Project

Project/Area Number 22KJ0238
Project/Area Number (Other) 22J11158 (2022)
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeMulti-year Fund (2023)
Single-year Grants (2022)
Section国内
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionTohoku University

Principal Investigator

HUANG YING  東北大学, 工学研究科, 特別研究員(PD)

Project Period (FY) 2023-03-08 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2023: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2022: ¥900,000 (Direct Cost: ¥900,000)
KeywordsTHz waves / MEMS metamaterials / Plasmonics / MEMS / Metamaterials
Outline of Research at the Start

1. The design of the MEMS-based THz device will be conducted via finite element method;
2. The fabrication will be conducted by surface micromachining technics;
3. The measurement will be conducted via THz time-domain spectrometer.

Outline of Annual Research Achievements

The dynamic reconfigurable metamaterials based on ultra-small microelectromechanical systems cantilevers have been improved in terms of mechanical resonant frequency and repeatability. The device has been designed, calculated, fabricated, and evaluated. Part of the results have been reported in the 36th International Microprocesses and Nanotechnology Conference and the 84th Japanese Journal of Applied Physics Autumn meeting by oral presentation, and reported in the 7th A3 Metamaterial Forum by poster presentation. Part of the results have been published in a journal paper on Opt.Express.

Report

(2 results)
  • 2023 Annual Research Report
  • 2022 Annual Research Report
  • Research Products

    (8 results)

All 2023 2022

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 2 results) Presentation (6 results) (of which Int'l Joint Research: 3 results,  Invited: 1 results)

  • [Journal Article] Reconfigurable THz metamaterial based on microelectromechanical cantilever switches with a dimpled tip2023

    • Author(s)
      Huang Ying、Okatani Taiyu、Inomata Naoki、Kanamori Yoshiaki
    • Journal Title

      Optics Express

      Volume: 31 Issue: 18 Pages: 29744-29754

    • DOI

      10.1364/oe.497514

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] A reconfigurable ladder-shaped THz metamaterial integrated with a microelectromechanical cantilever array2023

    • Author(s)
      Huang Ying、Okatani Taiyu、Inomata Naoki、Kanamori Yoshiaki
    • Journal Title

      Applied Physics Letters

      Volume: 122 Issue: 5 Pages: 051705-051705

    • DOI

      10.1063/5.0124601

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] An electromechanical cantilever actuator with a dimpled tip used for reconfigurable THz metamaterials2023

    • Author(s)
      HUANG YING
    • Organizer
      The 36th International Microprocesses and Nanotechnology Conference
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Transparent electrodes for electromechanically reconfigurable THz metamaterials2023

    • Author(s)
      HUANG YING
    • Organizer
      The 7th A3 Metamaterial Forum
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] An electromechanical cantilever actuator with a high mechanical resonant frequency exceeding 1.5 MHz used for THz metamaterials2023

    • Author(s)
      HUANG YING
    • Organizer
      The 84th Japanese Journal of Applied Physics Autumn meeting
    • Related Report
      2023 Annual Research Report
  • [Presentation] A reconfigurable H-shaped THz metamaterial based on an ultra-small micromechanical cantilever array2023

    • Author(s)
      HUANG YING
    • Organizer
      The 70th Japan Society of Applied Physics spring meeting
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] An H-shaped metamaterial-based MEMS device with a high mechanical resonant frequency for THz waves2022

    • Author(s)
      HUANG YING
    • Organizer
      The 83rd Japan Society of Applied Physics autumn meeting
    • Related Report
      2022 Annual Research Report
  • [Presentation] A switchable THz filter by integrating an H-shaped metamaterial and ultra-small MEMS switches2022

    • Author(s)
      HUANG YING
    • Organizer
      The 15th Pacific Rim Conference on Lasers and Electro-Optics
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research

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Published: 2022-04-28   Modified: 2024-12-25  

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