Development of laser-assisted micro removal processing tool controlled by the spatial light field allowing nanoscale correction for 3-D micro objects
| Project/Area Number |
23246028
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TAKAHASHI Satoru 東京大学, 先端科学技術研究センター, 教授 (30283724)
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| Co-Investigator(Kenkyū-buntansha) |
TAKAMASU Kiyoshi 東京大学, 大学院工学系研究科, 教授 (70154896)
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| Project Period (FY) |
2011-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥43,290,000 (Direct Cost: ¥33,300,000、Indirect Cost: ¥9,990,000)
Fiscal Year 2014: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
Fiscal Year 2012: ¥20,540,000 (Direct Cost: ¥15,800,000、Indirect Cost: ¥4,740,000)
Fiscal Year 2011: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
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| Keywords | 超精密加工 / ナノ修正加工 / ソフトマテリアル / マイクロマシン / マイクロ・ナノデバイス / 精密微細加工 |
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| Outline of Final Research Achievements |
We proposed a new laser-assisted material-removal processing concept, yielding a potential nanoscale correction process for next-generation functional structured soft material such as nanostructured photoresist surfaces and micro 3-D objects fabricated using microstereolithography, which has been required in the nano production engineering. Theoretical analyses suggested the use of TiO2 photocatalyst nanoparticles trapped by a remotely controlled radiation force, which allows not only remote processing based on an inherent property of light energy, but also fine process resolution beyond the focusing diffraction limit. Experimental analyses verified that the proposed method can provide fine process resolution with the lateral resolution beyond the diffraction limit and with the depth resolution less than 10 nm.
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Report
(5 results)
Research Products
(37 results)
