| Budget Amount *help |
¥43,290,000 (Direct Cost: ¥33,300,000、Indirect Cost: ¥9,990,000)
Fiscal Year 2014: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
Fiscal Year 2012: ¥20,540,000 (Direct Cost: ¥15,800,000、Indirect Cost: ¥4,740,000)
Fiscal Year 2011: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
|
|---|
| Outline of Final Research Achievements |
We proposed a new laser-assisted material-removal processing concept, yielding a potential nanoscale correction process for next-generation functional structured soft material such as nanostructured photoresist surfaces and micro 3-D objects fabricated using microstereolithography, which has been required in the nano production engineering. Theoretical analyses suggested the use of TiO2 photocatalyst nanoparticles trapped by a remotely controlled radiation force, which allows not only remote processing based on an inherent property of light energy, but also fine process resolution beyond the focusing diffraction limit. Experimental analyses verified that the proposed method can provide fine process resolution with the lateral resolution beyond the diffraction limit and with the depth resolution less than 10 nm.
|
