Development of a novel micro-column using the multi-gated field emitter for SEM application
Project/Area Number |
23246065
|
Research Category |
Grant-in-Aid for Scientific Research (A)
|
Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Electron device/Electronic equipment
|
Research Institution | Shizuoka University |
Principal Investigator |
|
Co-Investigator(Kenkyū-buntansha) |
NEO Yoichiro 静岡大学, 電子工学研究所, 准教授 (50312674)
NAGAO Masayoshi 独立行政法人産業技術総合研究所, 研究員 (80357607)
YOSHIDA Tomoya 独立行政法人産業技術総合研究所, 研究員 (80462844)
|
Project Period (FY) |
2011-04-01 – 2014-03-31
|
Project Status |
Completed (Fiscal Year 2013)
|
Budget Amount *help |
¥48,230,000 (Direct Cost: ¥37,100,000、Indirect Cost: ¥11,130,000)
Fiscal Year 2013: ¥14,560,000 (Direct Cost: ¥11,200,000、Indirect Cost: ¥3,360,000)
Fiscal Year 2012: ¥16,380,000 (Direct Cost: ¥12,600,000、Indirect Cost: ¥3,780,000)
Fiscal Year 2011: ¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
|
Keywords | 多段ゲート微小電子源 / マイクロカラム / 電子ビーム / ビーム収束 / 収差 / 電子銃 / 静電レンズ / 多段ゲート電界放出電子源 / ビーム集束 |
Research Abstract |
We have developed a novel micro-column using the multi-gated field emitter for scanning electron microscope (SEM) application. We designed and fabricated the micro-column, and measured the electron beam characteristics of the micro-column. We have successfully developed the novel micro-column as we designed. However, for the SEM application, the beam size emitted from the micro-column is still not sufficient. Reducing the initial beam angle from the micro-column is necessary. We considered to incorporate a welt electrode with the micro-column, and investigated the effect of the welt electrode. As a result, we have concluded that we can realize a multi-gated field emitter micro-column for SEM application by incorporating a welt electrode with the micro-column.
|
Report
(4 results)
Research Products
(25 results)