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Development of a novel micro-column using the multi-gated field emitter for SEM application

Research Project

Project/Area Number 23246065
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionShizuoka University

Principal Investigator

MIMURA Hidenori  静岡大学, 電子工学研究所, 教授 (90144055)

Co-Investigator(Kenkyū-buntansha) NEO Yoichiro  静岡大学, 電子工学研究所, 准教授 (50312674)
NAGAO Masayoshi  独立行政法人産業技術総合研究所, 研究員 (80357607)
YOSHIDA Tomoya  独立行政法人産業技術総合研究所, 研究員 (80462844)
Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥48,230,000 (Direct Cost: ¥37,100,000、Indirect Cost: ¥11,130,000)
Fiscal Year 2013: ¥14,560,000 (Direct Cost: ¥11,200,000、Indirect Cost: ¥3,360,000)
Fiscal Year 2012: ¥16,380,000 (Direct Cost: ¥12,600,000、Indirect Cost: ¥3,780,000)
Fiscal Year 2011: ¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Keywords多段ゲート微小電子源 / マイクロカラム / 電子ビーム / ビーム収束 / 収差 / 電子銃 / 静電レンズ / 多段ゲート電界放出電子源 / ビーム集束
Research Abstract

We have developed a novel micro-column using the multi-gated field emitter for scanning electron microscope (SEM) application. We designed and fabricated the micro-column, and measured the electron beam characteristics of the micro-column. We have successfully developed the novel micro-column as we designed. However, for the SEM application, the beam size emitted from the micro-column is still not sufficient. Reducing the initial beam angle from the micro-column is necessary. We considered to incorporate a welt electrode with the micro-column, and investigated the effect of the welt electrode. As a result, we have concluded that we can realize a multi-gated field emitter micro-column for SEM application by incorporating a welt electrode with the micro-column.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (25 results)

All 2013 2012 2011 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (23 results) (of which Invited: 8 results)

  • [Journal Article] Electron Optical Properties of Microcolumn with Field Emitter2013

    • Author(s)
      Y.Neo, A.Koike, T.Fujino, H.Mimura, H.Murata, T.Yoshida, T.Nishi, M.Nagao
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol.52 Issue: 3R Pages: 036603-036603

    • DOI

      10.7567/jjap.52.036603

    • NAID

      210000141899

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Field Emitter Equipped With a Suppressor to Control Emission Angle2013

    • Author(s)
      A.Koike, Y.Neo, H.Mimura, H.Murata, T.Yoshida, T.Nishi, and M.Nagao
    • Journal Title

      IEEE Electron Device Letters

      Volume: Vol.34 Issue: 5 Pages: 704-706

    • DOI

      10.1109/led.2013.2252598

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Presentation] Performance of Microclumn for Fine Electron Beam Applications2013

    • Author(s)
      Y.Neo, A.Koike, H.Mimura, H.Murata, T.Yoshida, T.Nish, and M.Nagao
    • Organizer
      20^<th> International Display Workshop
    • Place of Presentation
      Sapporo Convention Center、Sapporo
    • Year and Date
      2013-12-06
    • Related Report
      2013 Final Research Report
  • [Presentation] 静電レンズ一体型Field Emitter Array の電子軌道解析2013

    • Author(s)
      村田英一、下山宏、根尾陽一郎、三村秀典、吉田知也、長尾昌善
    • Organizer
      電子情報通信学会技術報告
    • Place of Presentation
      北海道大学
    • Year and Date
      2013-10-22
    • Related Report
      2013 Final Research Report
  • [Presentation] 多段ゲート型マイクロカラムの開発2013

    • Author(s)
      根尾陽一郎、小池昭史、三村秀典、村田英一、西孝、吉田知也、長尾昌善
    • Organizer
      第74回応用物理学会学術講演会
    • Place of Presentation
      同志社大学、京都
    • Year and Date
      2013-09-18
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] Novel Micro Column Using Multi-gated Field Emitters2013

    • Author(s)
      H.Mimura, Y.Neo, T.Aoki, T.Yoshida and M.Nagao
    • Organizer
      2^<nd> International Conference Materials, Energy and Environments
    • Place of Presentation
      Kanto Gakuin University、Yokohama
    • Year and Date
      2013-08-08
    • Related Report
      2013 Final Research Report
  • [Presentation] Development of Muli-gated Field Emitters2013

    • Author(s)
      H.Mimura, Y.Neo, T.Aoki, T.Yoshida and M.Nagao
    • Organizer
      13^<th> International Conference on Quality in Research
    • Place of Presentation
      Sheraton Mustika Resort & Spa、Indonesia
    • Year and Date
      2013-06-26
    • Related Report
      2013 Final Research Report
  • [Presentation] Novel Micro Column Using a Multi-gated Field Emitter2013

    • Author(s)
      H.Mimura, Y.Neo, T.Aoki
    • Organizer
      2^<nd> International Conference on Nanotechnlogy and Biomedical Engineering Energy and Environments
    • Place of Presentation
      Technical University of Moldova、Moldova
    • Year and Date
      2013-04-18
    • Related Report
      2013 Final Research Report
  • [Presentation] Novel Micro Column Using a Multi-gated Field Emitter2013

    • Author(s)
      H. Mimura, Y. Neo, T. Aoki
    • Organizer
      2nd Inter. Conf. on Nanotechnlogy and Biomedical Engineering Energy and Environments
    • Place of Presentation
      Technical University of Moldova, Moldova
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Development of Muli-gated Field Emitters2013

    • Author(s)
      H. Mimura, Y. Neo, T. Aoki, T. Yoshida and M. Nagao
    • Organizer
      13th Inter. Conf. on Quality in Research
    • Place of Presentation
      Sheraton Mustika Yogyakarta Resort & Spa, Indonesia
    • Related Report
      2013 Annual Research Report
  • [Presentation] Novel Micro Column Using Multi-gated Field Emitters2013

    • Author(s)
      H. Mimura, Y. Neo, T. Aoki, T. Yoshida and M. Nagao
    • Organizer
      2nd Inter. Conf. Materials, Energy and Environments
    • Place of Presentation
      関東学院大学、神奈川
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Performance of Microclumn for Fine Electron Beam Applications2013

    • Author(s)
      Y. Neo, A. Koike, H. Mimura, H. Murata, T. Yoshida, T. Nish, and M. Nagao
    • Organizer
      20th Inter, Display Workshop
    • Place of Presentation
      札幌コンベンションセンター、北海道
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 静電レンズ一体型Field Emitter Arrayの電子軌道解析2013

    • Author(s)
      村田英一、下山 宏、根尾陽一郎、三村秀典、吉田知也、長尾昌善
    • Organizer
      電子情報通信学会技術報告
    • Place of Presentation
      北海道大学、北海道
    • Related Report
      2013 Annual Research Report
  • [Presentation] マイクロサイズ電子筐筒の開発2013

    • Author(s)
      三村秀典
    • Organizer
      第10回真空ナノエレクトロニクスシンポジウム
    • Place of Presentation
      大阪大学中之島センター(大阪府)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Multi-gated Field Emitters for Nanovision Science2012

    • Author(s)
      H.Mimura, Y.Neo, T.Aoki, T.Yoshida and M.Nagao
    • Organizer
      2012 Symposium on Nanovision Technology
    • Place of Presentation
      National Taipei University of Technology、Taiwan
    • Year and Date
      2012-10-19
    • Related Report
      2013 Final Research Report
  • [Presentation] Field Emitter Technology for Nanovision Science2012

    • Author(s)
      H.Mimura
    • Organizer
      25th International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Hyatt Regency Jeju、Korea
    • Year and Date
      2012-07-12
    • Related Report
      2013 Final Research Report
  • [Presentation] Electron Emission Characteristics of Multi-gated Field Emitters2012

    • Author(s)
      H.Mimura, Y.Neo, T.Aoki, T.Yoshida and M.Nagao
    • Organizer
      4^<th> International Conference on Radiation Interaction with Material and its Use in Technologies
    • Place of Presentation
      Hotel Daniela、Lithuania
    • Year and Date
      2012-05-14
    • Related Report
      2013 Final Research Report
  • [Presentation] Si Multi-gated Field Emitters with a Built-in Electrostatic Lens2012

    • Author(s)
      H.Mimura
    • Organizer
      1^<st> International Conference on Materials, Energy and Environments
    • Place of Presentation
      Park Inn Hotel Toledo、USA
    • Year and Date
      2012-05-10
    • Related Report
      2013 Final Research Report
  • [Presentation] マイクロサイズ電子筐筒の開発2012

    • Author(s)
      三村秀典、根尾陽一郎、小池昭史、村田英一、西孝、吉田知也、長尾昌善
    • Organizer
      第10回真空ナノエレクトロニクスシンポジウム
    • Place of Presentation
      大阪大学中ノ島センター
    • Year and Date
      2012-03-06
    • Related Report
      2013 Final Research Report
  • [Presentation] Si Multi-gated Field Emitters with a Built in Electrostatic Lens2012

    • Author(s)
      Hidenori Mimura
    • Organizer
      1st International Conference on Materials, Energy and Environments
    • Place of Presentation
      Park Inn Hotel, USA
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Electron Emission Characteristics of Multi-gated Field Emitters2012

    • Author(s)
      Hidenori Mimura
    • Organizer
      4th International Conference on Radiation Interaction with Material and its Use in Technologies
    • Place of Presentation
      Hotel Daniela, Lithuania
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Field Emitter Technology for Nanovision Science2012

    • Author(s)
      Hidenori Mimura
    • Organizer
      25th International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Hyatt Regency Jeju, Korea
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] A functional tiny electron gun for a true microcolumn2011

    • Author(s)
      A.Koike, Y.Takagi, T.Fujino, T.Aoki, Y.Neo, H.Mimura, T.Yoshida, M.Nagao, H.Murata
    • Organizer
      24^<th> International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Wuppertal University、 Germany
    • Year and Date
      2011-07-21
    • Related Report
      2013 Final Research Report
  • [Presentation] A functional tiny electron gun for a true microcolumn2011

    • Author(s)
      A.Koike, Y.Takagi, T.Fujino, T.Aoki, Y.Neo, H.Mimura
    • Organizer
      24^<th> International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Bergische Universitat、Germany Wuppertal
    • Year and Date
      2011-07-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] Multi-gated Field Emitters for Nanovision Science

    • Author(s)
      Hidenori Mimura
    • Organizer
      2012 Symposium on Nanovision Technology
    • Place of Presentation
      National Taipei University of Technology, Taiwan
    • Related Report
      2012 Annual Research Report
    • Invited

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Published: 2011-04-06   Modified: 2019-07-29  

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