| Budget Amount *help |
¥48,230,000 (Direct Cost: ¥37,100,000、Indirect Cost: ¥11,130,000)
Fiscal Year 2013: ¥14,560,000 (Direct Cost: ¥11,200,000、Indirect Cost: ¥3,360,000)
Fiscal Year 2012: ¥16,380,000 (Direct Cost: ¥12,600,000、Indirect Cost: ¥3,780,000)
Fiscal Year 2011: ¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
|
|---|
| Research Abstract |
We have developed a novel micro-column using the multi-gated field emitter for scanning electron microscope (SEM) application. We designed and fabricated the micro-column, and measured the electron beam characteristics of the micro-column. We have successfully developed the novel micro-column as we designed. However, for the SEM application, the beam size emitted from the micro-column is still not sufficient. Reducing the initial beam angle from the micro-column is necessary. We considered to incorporate a welt electrode with the micro-column, and investigated the effect of the welt electrode. As a result, we have concluded that we can realize a multi-gated field emitter micro-column for SEM application by incorporating a welt electrode with the micro-column.
|
