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Ultrasonic Microspectroscopy of Wide Bandgap Semiconductor Materials

Research Project

Project/Area Number 23246075
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Measurement engineering
Research InstitutionTohoku University

Principal Investigator

KUSHIBIKI Jun-ichi  東北大学, 工学(系)研究科(研究院), 名誉教授 (50108578)

Co-Investigator(Kenkyū-buntansha) ARAKAWA Mototaka  東北大学, 大学院医工学研究科, 助教 (00333865)
OHASHI Yuji  東北大学, 大学院工学研究科, 助教 (50396462)
HASHIMOTO Kenya  千葉大学, 大学院工学研究科, 教授 (90134353)
Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥47,710,000 (Direct Cost: ¥36,700,000、Indirect Cost: ¥11,010,000)
Fiscal Year 2013: ¥10,140,000 (Direct Cost: ¥7,800,000、Indirect Cost: ¥2,340,000)
Fiscal Year 2012: ¥12,220,000 (Direct Cost: ¥9,400,000、Indirect Cost: ¥2,820,000)
Fiscal Year 2011: ¥25,350,000 (Direct Cost: ¥19,500,000、Indirect Cost: ¥5,850,000)
Keywords超精密超音波計測 / ワイドバンドギャップ半導体 / 超音波マイクロスペクトロスコピー / 材料定数 / 欠陥評価技術
Research Abstract

To realize highly efficient and long life devices using wide bandgap semiconductors, such as AlN, ZnO, SiC, and GaN, it is necessary to employ homogeneous bulk single crystal substrates as well as proper fabrication processes for making homogeneous and high-quality films. To do so, we developed a new method for evaluating semiconductor materials using ultrasonic micro-spectroscopy (UMS) technology as an accurate evaluation technology. Although characterization of epitaxial film is generally difficult because of their elastic anisotropy, we demonstrated usefulness of the evaluation method through measuring velocities of leaky surface acoustic waves by the UMS technology and measuring density based on the Archimedes' principle for Sc doped AlN film specimens.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (13 results)

All 2014 2013 2012 2011 Other

All Journal Article (3 results) (of which Peer Reviewed: 2 results) Presentation (9 results) (of which Invited: 2 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Determination Method of Acoustical Physical Constants and Their Temperature Coefficients of La_3Ta_<0.5>Ga_<5.3>Al_<0.2>O_<14> Single Crystal2012

    • Author(s)
      Y.Ohashi, T.Karaki, T.Lv, H.Yoshida, M.Arakawa, M.Adachi and J.Kushibiki
    • Journal Title

      Proc. 2012 IEEE International Ultrason. Symp.

      Pages: 2738-2741

    • DOI

      10.1109/ultsym.2012.0686

    • NAID

      110009626877

    • Related Report
      2013 Final Research Report
  • [Journal Article] Measurements of Acoustical Physical Constants of La_3Ta_<0.5>Ga_<5.3>Al_<0.2>O_<14> Single Crystals at High Temperatures2012

    • Author(s)
      T.Karaki, T.Lv, M.Adachi, Y.Ohashi, M.Arakawa, and J.Kushibiki
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol.51 Issue: 9S1 Pages: 09LD09-09LD09

    • DOI

      10.1143/jjap.51.09ld09

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Surface Acoustic Wave Properties of Amorphous Ta_2O_5 and Nb_2O_5 Thin Films Prepared by Radio Frequency Sputtering2012

    • Author(s)
      S.Kakio, K.Hosaka, M.Arakawa, Y.Ohashi, and J.Kushibiki
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol.51 Issue: 7S Pages: 07GA01-07GA01

    • DOI

      10.1143/jjap.51.07ga01

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Presentation] Ultrasonic Microspectroscopy of Tempered Glass2013

    • Author(s)
      J.Kushibiki, M.Arakawa, Y.Ohashi, K.Kawaguchi, and N.Takeda
    • Organizer
      Proc. Ultrasonic Electronics Symposium
    • Place of Presentation
      Doshisya Univ., Kyoto
    • Year and Date
      2013-11-20
    • Related Report
      2013 Final Research Report
  • [Presentation] Analyzing Crystals by Ultrasonic Microspectroscopy2013

    • Author(s)
      Yuji Ohashi, Mototaka Arakawa, and Jun-ichi Kushibiki
    • Organizer
      The Collaborative Conference on Crystal Growth (3CG)
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2013-06-11
    • Related Report
      2013 Final Research Report
  • [Presentation] Analyzing Crystals by Ultrasonic Micro-Spectroscopy2013

    • Author(s)
      Yuji Ohashi, Mototaka Arakawa, and Jun-ichi Kushibiki
    • Organizer
      Collaborative Conference on Crystal Growth 2013
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Evaluation of Acoustical Properties for GaN Single Crystal by the Ultrasonic Microspectroscopy Technology2012

    • Author(s)
      Yuji Ohashi and Jun-ichi Kushibiki
    • Organizer
      2012 IEEE International Ultrasonics Symposium
    • Place of Presentation
      Dresden, Germany
    • Year and Date
      2012-10-10
    • Related Report
      2013 Final Research Report 2012 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術によるGaN 単結晶の音響特性評価2012

    • Author(s)
      大橋雄二、櫛引淳一
    • Organizer
      日本音響学会春季講演発表会
    • Place of Presentation
      神奈川大学
    • Year and Date
      2012-03-13
    • Related Report
      2013 Final Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術によるGaN単結晶の音響特性評価2012

    • Author(s)
      大橋雄二、櫛引淳一
    • Organizer
      日本音響学会
    • Place of Presentation
      神奈川大学
    • Year and Date
      2012-03-13
    • Related Report
      2011 Annual Research Report
  • [Presentation] 超音波計測と電気電子材料2012

    • Author(s)
      櫛引淳一
    • Organizer
      電子情報通信学会超音波研究会
    • Place of Presentation
      GE ヘルスケア・ジャパン(株),東京
    • Year and Date
      2012-02-23
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Characterization of acoustical properties for GaN single crystal by the ultrasonic microspectroscopy technology2011

    • Author(s)
      Y.Ohashi and J.Kushibiki
    • Organizer
      Proc. Ultrasonic Electronics Symposium
    • Place of Presentation
      Kyoto Univ, Kyoto
    • Year and Date
      2011-11-09
    • Related Report
      2013 Final Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー(UMS)技術による材料評価

    • Author(s)
      櫛引淳一, 荒川元孝, 大橋雄二
    • Organizer
      日本学術振興会第161 委員会 第82回研究会
    • Place of Presentation
      主婦会館(東京)
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 圧電単結晶/セラミック材料の音響関連物理定数決定方法、その方法を使った音響関連物理定数の温度係数決定方法及びその温度係数決定方法を使った最適結晶方位及び伝搬方向決定方法2014

    • Inventor(s)
      大橋雄二、荒川元孝、櫛引淳一、安達正利
    • Industrial Property Rights Holder
      東北大学、櫛引淳一
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-070945
    • Filing Date
      2014-03-31
    • Related Report
      2013 Final Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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