Development of Scanning Thermal Microscopy with sub-nanometer lateral resolution

• Project/Area Number: 23310068
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Nanostructural science
• Research Institution: National Institute for Materials Science
• Principal Investigator: CUSTANCE Oscar 独立行政法人物質・材料研究機構, 極限計測ユニット, グループリーダー (00444555)
• Project Period (FY): 2011-04-01 – 2014-03-31
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥19,890,000 (Direct Cost: ¥15,300,000、Indirect Cost: ¥4,590,000); Fiscal Year 2013: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2011: ¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000)
• Keywords: ナノプローブ / 走査型熱顕微鏡 / 原子分解能原子間力顕微鏡 / 原子間力顕微鏡

Research Abstract

Scanning thermal microscopy (SThM) is a variant of atomic force microscopy (AFM) that uses a heat-sensing cantilever probe. The heat generated by this cantilever probe can be used to study the thermal resistivity of surfaces and devices at the nano scale, as well as for the fabrication of masks of a few nanometers half-pitch that can be used for the patterning semiconductor substrates and prototype device fabrication. The main goal of this project was to combine the heating cantilever probe technology developed by IBM for the "millipede project" with our expertise in the development of instrumentation for atomic resolution AFM to push the resolution limits of SThM. We reached our goal of developing a high-resolution SThM operative in UHV environment.

Research Products

• [Journal Article] Manipulation of individual water molecules on CeO2(111) (2012)
  • Author(s): S. Torbrugge, O. Custance, S. Morita and M. Reichling
  • Journal Title: J. Phys. : Condens. Matter Volume: 24
• [Presentation] Characterization of pentacene on TiO2 (101) anatase surface by cantilever-based intra-molecular atomic force microscopy imaging (2014)
  • Author(s): Oleksandr Stetsovych, Milica Todorovi., Tomoko Shimizu, Cesar Moreno, Ruben Perez and Oscar Custance
  • Organizer: 1st KANSAI Nanoscience and Nanotechnology International Symposium
  • Place of Presentation: Osaka, Japan
• [Presentation] Discrimination between the atomic species of the TiO2 (101) anatase surface by means of simultaneous STM/AFM (2013)
  • Author(s): Oleksandr Stetsovych, Milica Todorovi., Tomoko Shimizu, Cesar Moreno, Oscar Custance and Ruben Perez
  • Organizer: 16th International Conference on Noncontact Atomic Force Microscopy (NC-AFM 2013)
  • Place of Presentation: Maryland, USA
• [Presentation] Clarifying atomic contrast of the TiO2(101) anatase surface by means of bimodal atomic force microscopy / spectroscopy and simultaneous scanning tunneling microscopy (2013)
  • Author(s): Oscar Custance
  • Organizer: Materials Research Society Spring Meeting
  • Place of Presentation: San Francisco, USA
• [Presentation] Clarifying atomic contrast of the TiO2(101) anatase surface by means of bimodal atomic force microscopy/spectroscopy and simultaneous scanning tunneling microscopy (2013)
  • Author(s): Oscar Custance
  • Organizer: 2013 MRS Spring Meeting & Exhibit
  • Place of Presentation: San Francisco, USA
  • Invited
• [Presentation] Discrimination between the atomic species of the TiO2 (101) anatase surface by means of simultaneous STM/AFM (2013)
  • Author(s): Oscar Custance
  • Organizer: 16th International Conference on Non-Contact Atomic Force Microscopy
  • Place of Presentation: Maryland, USA
  • Invited
• [Presentation] Characterization of pentacene molecules adsorbed on the TiO2(101) anatase surface by means of bimodal atomic force microscopy and simultaneous scanning tunneling microscopy (2012)
  • Author(s): Oscar Custance
  • Organizer: International Workshop on Soft Interface Sciences for Young Scientists (SISYS2012)
  • Place of Presentation: Tsukuba, Japan
• [Presentation] New Insights on Atomic Resolution Frequency Modulation Kelvin Probe Force Microscopy Imaging of Semiconductors (2011)
  • Author(s): Oscar Custance
  • Organizer: 3rd GCOE International Symposium : Electronic Devices Innovation (EDIS 2011)
  • Place of Presentation: Osaka, Japan
• [Presentation] Complex atomic assemblies produced at room temperature using atomic force microscopy (2011)
  • Author(s): Oscar Custance
  • Organizer: The 1st Forum on Trends in Nano-manufacturing
  • Place of Presentation: Heifei, China
• [Presentation] Atomic-scale characterization of the (111), (110) and (100) surfaces of ceria single crystals with atomic force microscopy (2011)
  • Author(s): Chung-Kay Fang and Oscar Custance
  • Organizer: CECAM Workshop "Understanding structure and functions of reducible oxide systems : a challenge for theory and experiment"
  • Place of Presentation: Zaragoza, Spain
• [Remarks] UHV Scanning Thermal Microscopy
  • URL: http://www.nims.go.jp/nanomechanics/Instrumentation.html