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Development of low-background, wide-band and ADC integrated SOI X-ray sensor

Research Project

Project/Area Number 23340047
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Astronomy
Research InstitutionKyoto University

Principal Investigator

TSURU Takeshi  京都大学, 理学(系)研究科(研究院), 教授 (10243007)

Co-Investigator(Kenkyū-buntansha) ARAI Yasuo  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 教授 (90167990)
NAKAZAWA Kazuhiro  東京大学, 大学院理学系研究科, 講師 (50342621)
Co-Investigator(Renkei-kenkyūsha) NAKAJIMA Hiroshi  大阪大学, 大学院理学研究科, 助教 (70570670)
Project Period (FY) 2011-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2014: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2013: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2012: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2011: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
KeywordsX線天文学 / 宇宙物理 / X線 / 検出器 / SOI / X線検出器 / SOI / X線天文学 / 放射線・X線・粒子線 / 半導体検出器
Outline of Final Research Achievements

We develop monolithic active pixel sensors, X-ray SOIPIXs, based on the SOI technology for next-generation X-ray astronomy satellites. In order to reduce the non-X-ray background dominating above 5-10 keV using the anti-coincidence technique, we develop the event trigger output function implemented in each pixel.
In this study, we developed 4 sensors. The largest chip has the size of 6mm. We successfully produced a fully depleted layer with a thickness of 500μm. We also achieved an energy resolution of 320 eV (FWHM) at 6 keV and a read-out noise of 35e- (rms) in the frame readout mode, which allows us to clearly resolve Mn-Kα and Kβ. We found in-pixel circuitries disturb the electric fields in the sensor and degrade the charge collection efficiency. We successfully solved the problem by changing the location of the in-pixel circuitries. The event-driven readout mode was successfully demonstrated with the time resolution of 10μsec and the throughput of 1kHz.

Report

(5 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (27 results)

All 2015 2014 2013 2012 2011 Other

All Journal Article (11 results) (of which Peer Reviewed: 8 results,  Acknowledgement Compliant: 1 results,  Open Access: 1 results) Presentation (13 results) (of which Invited: 1 results) Remarks (3 results)

  • [Journal Article] Improvement of Spectroscopic Performance using a Charge-sensitive Amplifier Circuit for an X-Ray Astronomical SOI Pixel Detector2015

    • Author(s)
      Ayaki Takeda, Takeshi Go Tsuru, Takaaki Tanaka, Hiroyuki Uchida, Hideaki Matsumura, Yasuo Arai, Koji Mori, Yusuke Nishioka, Ryota Takenaka, Takayoshi Kohmura, Shinya Nakashima, Shoji Kawahito , Keiichiro Kagawa , Keita Yasutomi, Hiroki Kamehama, and Sumeet Shrestha
    • Journal Title

      JINST

      Volume: 印刷中

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Investigation of charge-collection efficiency of Kyoto's X-ray astronomical SOI pixel sensors, XRPIX2014

    • Author(s)
      Matsumura, Hideaki; Tsuru, Takeshi Go; Tanaka, Takaaki; Nakashima, Shinya; Ryu, Syukyo G.; Takeda, Ayaki; Arai, Yasuo; Miyoshi, Toshinobu
    • Journal Title

      Nuclear Inst. and Methods in Physics Research, A

      Volume: 765 Pages: 183-186

    • DOI

      10.1016/j.nima.2014.05.025

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Investigation of Charge-Collection Efficiency of Kyoto's X-ray Astronomical SOI Pixel Sensor, XRPIX2014

    • Author(s)
      Matsumura, Hideaki; Tsuru, Takeshi Go; Tanaka, Takaaki; Nakashima, Shinya; Arai, Yasuo; Takeda, Ayaki; Mori, Koji; Nishioka, Yusuke; Takenaka, Ryota; Kohmura, Takayoshi
    • Journal Title

      Suzaku-MAXI 2014: Expanding the Frontiers of the X-ray Universe, proceedings of a conference held 19-22 February, 2014 at Ehime University, Japan. Edited by M. Ishida, R. Petre, and K. Mitsuda

      Volume: 1 Pages: 176-176

    • Related Report
      2014 Annual Research Report
  • [Journal Article] Development and Performance of Kyoto's X-ray Astronomical SOI pixel (SOIPIX) sensor2014

    • Author(s)
      Tsuru, Takeshi G.; Matsumura, Hideaki; Takeda, Ayaki; Tanaka, Takaaki; Nakashima, Shinya; Arai, Yasuo; Mori, Koji; Takenaka, Ryota; Nishioka, Yusuke; Kohmura, Takayoshi; Hatsui, Takaki; Kameshima, Takashi; Ozaki, Kyosuke; Kohmura, Yoshiki; et al.
    • Journal Title

      Proceedings of the SPIE

      Volume: 9144 Pages: 914412-914412

    • DOI

      10.1117/12.2057158

    • Related Report
      2014 Annual Research Report
  • [Journal Article] Design and Evaluation of a SOI Pixel Sensor for X-ray Trigger-driven Readout2013

    • Author(s)
      Ayaki Takeda, Yasuo Arai, et al
    • Journal Title

      IEEE Trans.on Nucl. Sci., Vol. PP, Issue

      Volume: 99 Issue: 2 Pages: 586-591

    • DOI

      10.1109/tns.2012.2225072

    • Related Report
      2013 Annual Research Report 2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Tests With Soft X-rays of an Improved Monolithic SOI Active Pixel Sensor2013

    • Author(s)
      丸藤竜之介、他
    • Journal Title

      IEEE Transactions on Nuclear Science (TNS)

      Volume: 60 Issue: 1 Pages: 465-469

    • DOI

      10.1109/tns.2012.2231880

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development and characterization of the latest X-ray SOI pixel sensor for a future astronomical mission2013

    • Author(s)
      Shinya Nakashima, Syukyo Gando Ryu, Takaaki Tanaka, Takeshi Go Tsuru, Ayaki Takeda, Yasuo Arai, Toshifumi Imamura, Takafumi Ohmoto, Atsushi Iwata
    • Journal Title

      NIM A

      Volume: 未定

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Progress in Development of Monolithic Active Pixel Detector for X-ray Astronomy with S01 CMOS Technology2012

    • Author(s)
      Shinya Nakashima
    • Journal Title

      Physics Procedia

      Volume: 37 Pages: 1-373

    • DOI

      10.1016/j.phpro.2012.04.100

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Progress in Development of Monolithic Active Pixel Detector for X-ray Astronomy with SOI CMOS Technology2012

    • Author(s)
      S.Nakashima, T.G.Tsuru, et al
    • Journal Title

      NIM A

      Volume: (Accepted)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] First Performance Evaluation of an X-Ray SOI Pixel Sensor for Imaging Spectroscopy2011

    • Author(s)
      丸藤竜之介, 他
    • Journal Title

      IEEE TRANSACTIONS ON NUCLEAR SCIENCE

      Volume: 58 Issue: 5 Pages: 2528-2536

    • DOI

      10.1109/tns.2011.2160970

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] esign and Development of Trigger-driven Readout with X-ray SOI Pixel Senso2011

    • Author(s)
      S.G.Ryu, T.Tsuru, et al
    • Journal Title

      IEEE NSS Conf.Record (NSS/MIC) 2011

    • Related Report
      2011 Annual Research Report
  • [Presentation] XRPIXの開発計画2014

    • Author(s)
      鶴 剛
    • Organizer
      SOI新学術領域研究会
    • Place of Presentation
      金沢工業大学
    • Year and Date
      2014-11-26 – 2014-11-27
    • Related Report
      2014 Annual Research Report
  • [Presentation] SOI技術を用いた新型X線撮像分光器の開発10: 開発の現状2014

    • Author(s)
      鶴剛, 松村英晃, 武田彩希, 田中孝明 (京大理), 中島真也 (ISAS/JAXA), 新井康夫 (KEK), 森浩二, 竹中亮太, 西岡祐介 (宮崎大工), 幸村孝由 (東京理科大), 初井宇記, 尾崎恭介, 香村芳樹, 和賀井達也, 武井大 (理研), 亀島敬 (JASRI), 川人祥二, 香川景一郎, 安富啓太, 亀濱博紀, Sumeet Shrestha (静岡大電子工学研究所)
    • Organizer
      日本天文学会
    • Place of Presentation
      山形大学
    • Year and Date
      2014-09-11 – 2014-09-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] Development and Performance of Kyoto's X-ray Astronomical SOI pixel (SOIPIX) sensor2014

    • Author(s)
      Tsuru, Takeshi G.; Matsumura, Hideaki; Takeda, Ayaki; Tanaka, Takaaki; Nakashima, Shinya; Arai, Yasuo; Mori, Koji; Takenaka, Ryota; Nishioka, Yusuke; Kohmura, Takayoshi; Hatsui, Takaki; Kameshima, Takashi; Ozaki, Kyosuke; Kohmura, Yoshiki; Wagai, et al.
    • Organizer
      SPIE Astronomical Telescopes and Instrumentation
    • Place of Presentation
      モントリオール, カナダ
    • Year and Date
      2014-06-22 – 2014-06-27
    • Related Report
      2014 Annual Research Report
  • [Presentation] Development and Performance of Kyoto's X-ray Astronomical SOI pixel sensor2014

    • Author(s)
      T.G.Tsuru, H. Matsumura, A.Takeda, T.Tanaka (Kyoto U.),   Y.Arai (KEK), K.Mori, Y.Nishioka, R.Takenaka (U. Miyazaki), T.Kohmura (Tokyo U. of Science), S.Nakashima (ISAS/JAXA), T. Hatsui, T. Kameshima, K.Ozaki, Y.Kohmura, T. Wagai, D.Takei (Riken), S. Kawahito (Shizuoka U.)
    • Organizer
      FEE2014
    • Place of Presentation
      Argonne National Labo, USA
    • Year and Date
      2014-05-20 – 2014-05-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] Development and Performance of Kyoto's X-Ray Astronomical SOI Pixel Sensor2014

    • Author(s)
      Takeshi Tsuru
    • Organizer
      FEE2014
    • Place of Presentation
      Argonne National Laboratory, アルゴンヌ市, イリノイ州, 米国
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Development of Kyoto’s X-ray Astronomical SOI pixel sensor2013

    • Author(s)
      S.G. Ryu, S.Nakashima, Matsumura, T.Tanaka, A.Takeda, Y.Arai, T. Imamura, A. Iwata, T. Ohmoto, T. Maeda, M. Bautz, G.Y.Prigozhin, S.E.Kissel, B.LaMarr, R.F.Foster
    • Organizer
      SOI Collaboration Meeting at Krakow
    • Place of Presentation
      Krakow, Poland
    • Related Report
      2013 Annual Research Report
  • [Presentation] Development of a Fully Depleted Back Illumination Sensor Based on SOI CMOS Technology for Future X-Ray Astronomy Satellites2013

    • Author(s)
      Hideaki Matsumura, S. Nakashima, T. G. Tsuru, T. Tanaka, A. Takeda, Y. Arai, T. Miyoshi, R. Ichimiya, T. Imamura, T. Ohmoto, A. Iwata
    • Organizer
      HSDT9
    • Place of Presentation
      Hiroshima, JAPAN
    • Related Report
      2013 Annual Research Report
  • [Presentation] Development of SOI Pixel Sensors for X-ray Astronomy2013

    • Author(s)
      Takaaki Tanaka, Shinya Nakashima, Hideaki Matsumura, Takeshi Go Tsuru, Ayaki Takeda, Yasuo Arai
    • Organizer
      IEEE NSS 2013
    • Place of Presentation
      Soule, Korea
    • Related Report
      2013 Annual Research Report
  • [Presentation] Development and Performance of Kyoto’s X-ray Astronomical SOI pixel sensor Sensor2013

    • Author(s)
      S.G. Ryu, S.Nakashima, Matsumura, T.Tanaka, A.Takeda, Y.Arai, T. Imamura, A. Iwata, T. Ohmoto, T. Maeda, M. Bautz, G.Y.Prigozhin, S.E.Kissel, B.LaMarr, R.F.Foster
    • Organizer
      SDW2013
    • Place of Presentation
      Florence, Italy
    • Related Report
      2013 Annual Research Report
  • [Presentation] Development and Performance of Kyoto's X-ray Astronomical SOI pixel sensor2012

    • Author(s)
      T.G.Tsuru, S.G. Ryu, S.Nakashima, A.Takeda, Y.Ara, T. Imamura, A. Iwata, T. Ohmoto, T. Maeda, M. Bautz, G.Y.Prigozhin, S.E.Kissel, B.LaMarr, R.F.Foster,. Nakajima, H. Tsunemi, J.P.Doty
    • Organizer
      SPIE
    • Place of Presentation
      Amsterdam
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development and Performance of X-ray Astronomical SOI pixel sensor2011

    • Author(s)
      T.G.Tsuru, et al
    • Organizer
      IEEE NSS/MIC 2011
    • Place of Presentation
      スペイン,バレンシア
    • Year and Date
      2011-10-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] esign and Development of Trigger-driven Readout with X-ray SOI Pixel Senso2011

    • Author(s)
      S.G.Ryu, T.Tsuru, et al
    • Organizer
      IEEE NSS/MIC 2011
    • Place of Presentation
      スペイン,バレンシア
    • Year and Date
      2011-10-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of a built-in Analog-to-DigitalConverter for a X-ray AstronomyDetector with the SOI CMOS Technology2011

    • Author(s)
      S.Nakashima, T.G.Tsuru, et al
    • Organizer
      IEEE NSS/MIC 2011
    • Place of Presentation
      スペイン,バレンシア
    • Year and Date
      2011-10-25
    • Related Report
      2011 Annual Research Report
  • [Remarks] 次世代衛星用X線SOIピクセルカメラ

    • URL

      http://www-cr.scphys.kyoto-u.ac.jp/member/ryu/html/SOIPIX.html

    • Related Report
      2013 Annual Research Report
  • [Remarks] SOIPIX

    • URL

      http://www-cr.scphys.kyoto-u.ac.jp/member/ryu/html/SOIPIX.html

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www-cr.scphys.kyoto-u.ac.jp/member/ryu/html/SOIPIX.html

    • Related Report
      2011 Annual Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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