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Investigation of high brightness property of Li-LMES for nano-focued X-ray microscope

Research Project

Project/Area Number 23360021
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionMie University

Principal Investigator

HATA Koichi  三重大学, 工学(系)研究科(研究院), 教授 (30228465)

Co-Investigator(Kenkyū-buntansha) NAGAI Shigekazu  三重大学, 大学院工学研究科, 助教 (40577970)
Co-Investigator(Renkei-kenkyūsha) OKADA Tomoyuki  浜松ホトニクス株式会社, 電子管事業部, 専任部員 (50394151)
YABUSHITA Ryosuke  浜松ホトニクス株式会社, 電子管事業部, 部員 (80573005)
Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2012: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2011: ¥12,090,000 (Direct Cost: ¥9,300,000、Indirect Cost: ¥2,790,000)
KeywordsTaylorコーン / X線顕微鏡 / リチウム / 液体金属電子源 / 超高真空走査型電子顕微鏡 / 電界放射型陰極 / 電界放射陰極 / X線顕微鏡 / 電界放出
Research Abstract

In this study, we verified emission properties of Lithium liquid metal electron source (Li-LMES) as one of candidate of electron source for high-resolution X-ray microscope used in a field of nanotechnology. Our newly developed an X-ray microscope equipped with Li-LMES. Under condition of the acceleration voltage of 7 kV, the target current of 14 nA could be obtained by using Li-LMES, which value is three orders of magnitude higher than a conventional W field-emitter due to high current density of Li-LMES. The value of the target current was not enough to establish a contrast for X-ray imaging. For getting time-resolved X-ray images, we must consider new electron optics with higher transparency.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (4 results)

All 2012

All Presentation (4 results) (of which Invited: 2 results)

  • [Presentation] Newly Designed High Resolution X-ray Microscope with a Liquid Lithium Field Emission Electron Sources2012

    • Author(s)
      K.Hata, R.Nagai, S.Nagai
    • Organizer
      25^<th> International Vacuum Nanoelectronisc Conference
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2012-07-09
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] 顕微X線励起用集束一次電子線のプローブ径評価システム2012

    • Author(s)
      畑浩一,前田達也,永井遼,永井滋一,津野勝重
    • Organizer
      第9回真空ナノエレクトロニクスシンポジウム
    • Place of Presentation
      大阪大学
    • Year and Date
      2012-03-05
    • Related Report
      2013 Final Research Report
  • [Presentation] 顕微X線励起用集束一次電子線のプローブ径評価システム2012

    • Author(s)
      畑浩一
    • Organizer
      日本学術振興会第158委員会主催 第9回真空ナノエレクトロニクスシンポジウム
    • Place of Presentation
      大阪大学(招待講演)
    • Year and Date
      2012-03-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] Newly Designed High Resolution X-ray Microscope with a Liquid Lithium Field Emission Electron Source2012

    • Author(s)
      K. Hata, R. Nagai, S.Nagai
    • Organizer
      25th International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2012 Annual Research Report
    • Invited

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Published: 2011-04-06   Modified: 2019-07-29  

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