Investigation of high brightness property of Li-LMES for nano-focued X-ray microscope
| Project/Area Number |
23360021
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Mie University |
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Principal Investigator |
HATA Koichi 三重大学, 工学(系)研究科(研究院), 教授 (30228465)
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| Co-Investigator(Kenkyū-buntansha) |
NAGAI Shigekazu 三重大学, 大学院工学研究科, 助教 (40577970)
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| Co-Investigator(Renkei-kenkyūsha) |
OKADA Tomoyuki 浜松ホトニクス株式会社, 電子管事業部, 専任部員 (50394151)
YABUSHITA Ryosuke 浜松ホトニクス株式会社, 電子管事業部, 部員 (80573005)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2012: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2011: ¥12,090,000 (Direct Cost: ¥9,300,000、Indirect Cost: ¥2,790,000)
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| Keywords | Taylorコーン / Ｘ線顕微鏡 / リチウム / 液体金属電子源 / 超高真空走査型電子顕微鏡 / 電界放射型陰極 / 電界放射陰極 / X線顕微鏡 / 電界放出 |
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| Research Abstract |
In this study, we verified emission properties of Lithium liquid metal electron source (Li-LMES) as one of candidate of electron source for high-resolution X-ray microscope used in a field of nanotechnology. Our newly developed an X-ray microscope equipped with Li-LMES. Under condition of the acceleration voltage of 7 kV, the target current of 14 nA could be obtained by using Li-LMES, which value is three orders of magnitude higher than a conventional W field-emitter due to high current density of Li-LMES. The value of the target current was not enough to establish a contrast for X-ray imaging. For getting time-resolved X-ray images, we must consider new electron optics with higher transparency.
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Report
(4 results)
Research Products
(4 results)
