Accumulation of atoms due to a concentration of electron flow near the corner composed of dissimilar metal lines and its utilization for fabrication of various micro/nano structures
| Project/Area Number |
23360050
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Materials/Mechanics of materials
|
|---|
| Research Institution | Tohoku University |
|---|
Principal Investigator |
SAKA Masumi 東北大学, 工学(系)研究科(研究院), 教授 (20158918)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
MURAOKA Mikio 秋田大学, 大学院工学資源学研究科, 教授 (50190872)
TOHMYOH Hironori 東北大学, 大学院工学研究科, 准教授 (50374955)
|
|---|
| Project Period (FY) |
2011-04-01 – 2014-03-31
|
| Project Status |
Completed (Fiscal Year 2013)
|
| Budget Amount *help |
¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000)
Fiscal Year 2013: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2012: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2011: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
|
|---|
| Keywords | マイクロ・ナノ構造体 / エレクトロマイグレーション / 異種金属接合角部 / 原子集積 / ワイヤ / アレイ / 高機能断面 / 特性評価 |
|---|
| Research Abstract |
This study treated the fabrication of micro/nano structures utilizing electromigration where the atoms are moved by the electron flow. To accumulate atoms efficiently, we paid attention to the corner composed of dissimilar metal lines. First theoretical analysis on the accumulation of atoms at the corner was performed, and based on the analytical results, new samples for effectively fabricating various micro/nano structures were fabricated. Various micro/nano structures, e.g., longer wire, wire array, tube, etc. were realized by the new samples. Mechanical, electromagnetic and thermal properties of the micro/nano structures were also investigated. Finally the guidelines for effectively fabricating the micro/nano structures utilizing electromigration was pointed out.
|
Report
(4 results)
Research Products
(59 results)
