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Efficient method for ordered nano dot array fabrication by combination of machining and self-organization process

Research Project

Project/Area Number 23360065
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTokyo Institute of Technology

Principal Investigator

YOSHINO Masahiko  東京工業大学, 理工学研究科, 教授 (40201032)

Co-Investigator(Kenkyū-buntansha) MATSUMURA Takashi  東京電機大学, 工学部, 教授 (20199855)
UMEHARA Noritsugu  名古屋大学, 大学院工学研究科, 教授 (70203586)
Co-Investigator(Renkei-kenkyūsha) YAMAMOTO Takatoki  東京工業大学, 大学院理工学研究科, 准教授 (20322688)
YAMANAKA Akinori  東京農工大学, 大学院工学府, 准教授 (50542198)
Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥19,240,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥4,440,000)
Fiscal Year 2013: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2012: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2011: ¥13,910,000 (Direct Cost: ¥10,700,000、Indirect Cost: ¥3,210,000)
Keywordsマイクロナノデバイス / 機械工作・生産工学 / 先端機能デバイス / ナノ材料 / 精密部品加工 / 自己組織化 / 光学特性 / マイクロ・ナノデバイス / 機械加工 / 超精密加工 / 光学機能 / マイクロアレイ / ナノインプリント / 薄膜モールド / ナノ・マイクロ加工 / ナノドット / 塑性加工 / ナノデバイス / 局在表面プラズモン共鳴 / インプリンティング / 薄膜
Research Abstract

This project aimed to develop efficient processes at a low cost to produce the gold nano dot array having 10nm level. The conclusions obtained from the project is the following three.
Nano-dot arrays with a diameter of smaller than 100nm can be produced by a combination process of patterning by the nano plastic forming and self-organization by annealing.
It is efficient to employ the nanoimprinting process to groove grid patterning in order to improve productivity of nano dot arrays. It was shown that nanodot arrays exhibit unique optical properties, and the potential for industrial applications as biosensors was shown.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (55 results)

All 2014 2013 2012 2011 Other

All Journal Article (12 results) (of which Peer Reviewed: 12 results) Presentation (41 results) Remarks (2 results)

  • [Journal Article] Regularly-formed threedimensional gold nanodot array with controllable optical properties2014

    • Author(s)
      Zhenxing Li, Masahiko Yoshino, Akinori Yamanaka
    • Journal Title

      J. Micromech. Microeng

      Volume: 24 Pages: 45011-45011

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Morphology of Nanodots on LSPR property2014

    • Author(s)
      Truong Duc Phuc , Masahiko Yoshino, Akinori Yamanaka, Takatoki Yamamoto
    • Journal Title

      Int. J. of Automation Technology

      Volume: Vol.8 No.1 Pages: 74-82

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Morphology of Nanodots on LSPR property2014

    • Author(s)
      Truong Duc Phuc , Masahiko Yoshino , Akinori Yamanaka and Takatoki Yamamoto
    • Journal Title

      Int. J. of Automation Technology

      Volume: 8 Pages: 74-82

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Regularly-formed three-dimensional gold nanodot array with controllable optical properties2014

    • Author(s)
      Zhenxing Li, Masahiko Yoshino, Akinori Yamanaka
    • Journal Title

      J. Micromech. Microeng

      Volume: 24 Pages: 0-4

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A New Process to Fabricate Three Dimensional Ordered Nano Dot Array Structures by Nano Plastic Forming and Dewetting2012

    • Author(s)
      Zhenxing Li, Akinori Yamanaka, Masahiko Yoshino
    • Journal Title

      Key Engineering Materials

      Volume: Vols.523-524 Pages: 627-632

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of three dimensional ordered nanodot array structures by thermal dewetting method2012

    • Author(s)
      Li Zhenxing, Masahiko Yoshino, Akinori Yamanaka
    • Journal Title

      Nanotechnology

      Volume: 23 Pages: 485303-485303

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effects of process conditions on nano-dot array formation by thermal dewetting2012

    • Author(s)
      Masahiko Yoshino, Hiroki Osawa, Akinori Yamanaka
    • Journal Title

      Journal of Manufacturing Processes

      Volume: 14, 4 Pages: 478-486

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of three dimensional ordered nanodot array structures by thermal dewetting method2012

    • Author(s)
      Li Zhenxing
    • Journal Title

      Nanotechnology

      Volume: 23 Issue: 48 Pages: 485303-485303

    • DOI

      10.1088/0957-4484/23/48/485303

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of process conditions on nano-dot array formation by thermal dewetting2012

    • Author(s)
      Masahiko Yoshino
    • Journal Title

      Journal of Manufacturing Processes

      Volume: 14 Pages: 478-486

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A New Process to Fabricate Three Dimensional Ordered Nano Dot Array Structures by Nano Plastic Forming and Dewetting2012

    • Author(s)
      Li Zhenxing
    • Journal Title

      Key Engineering Materials

      Volume: 523-524 Pages: 627-632

    • DOI

      10.4028/www.scientific.net/kem.523-524.627

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Modification of Surface Properties by Roller Nano/Micro-Imprinting Processes2011

    • Author(s)
      Masahiko Yoshino, Willy Kurnia, Akinori Yamanaka, Takashi Matsumura
    • Journal Title

      Steel Research international special edition 10th ICTP 2011

      Pages: 1008-1013

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical Properties of Ordered Metal Nano-dots Allay Fabricated by Nano Plastic Forming and Annealing2011

    • Author(s)
      Akinori Yamanaka, Hiroki Osawa, Masahiko Yoshino
    • Journal Title

      Steel Research international special edition 10th ICTP 2011

      Pages: 997-1001

    • Related Report
      2013 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Rapid fabrication of ordered plasmonic nanostructures : from nanoblocks to nanorods2014

    • Author(s)
      Zhenxing Li, Masahiko Yoshino
    • Organizer
      ICOMM2014, 26B4-13
    • Place of Presentation
      Nanyang Technological University, Singapore (査読有)
    • Related Report
      2013 Final Research Report
  • [Presentation] パターニングした基板を用いた焼鈍法による金属ナノドットアレイの作製法2014

    • Author(s)
      吉野雅彦,Truong Duc Phuc,寺野 元規
    • Organizer
      2014年度精密工学会年春季大会学術講演会
    • Place of Presentation
      東京大学 (講演論文集 941-942 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] 積層型金属ナノ構造アレイを用いた表面増強ラマン散乱2014

    • Author(s)
      李振星,Dao Duy Thang,長尾 忠昭,吉野雅彦
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学 (講演予稿集 3-173 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] Rapid fabrication of ordered plasmonic nanostructures: from nanoblocks to nanorods2014

    • Author(s)
      Zhenxing Li, Masahiko Yoshino
    • Organizer
      ICOMM2014
    • Place of Presentation
      南洋理工大学 シンガポール
    • Related Report
      2013 Annual Research Report
  • [Presentation] パターニングした基板を用いた焼鈍法による金属ナノドットアレイの作製法2014

    • Author(s)
      吉野 雅彦,Truong Duc Phuc,寺野 元規
    • Organizer
      2014年度精密工学会年春季大会学術講演会
    • Place of Presentation
      東京大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 積層型金属ナノ構造アレイを用いた表面増強ラマン散乱2014

    • Author(s)
      李 振星,Dao Duy Thang,長尾 忠昭,吉野 雅彦
    • Organizer
      第61 回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 焼鈍法により生成した金属ナノドットの形態とそのLSPR特性2013

    • Author(s)
      吉野雅彦、Truong Duc Phuc
    • Organizer
      機機械学会第5回マイクロナノ工学シンポジウム
    • Place of Presentation
      東北大学 (講演論文集,(2013-11) 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] 金属ナノドットアレイの光学的特性2013

    • Author(s)
      吉野雅彦,永松明浩, 二宮崚
    • Organizer
      日本機械学会 2013年度年次大会
    • Place of Presentation
      岡山大学 (講演論文集 CD,J112032 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] プラスチック板上に配列したナノドットアレイの効率的製造法2013

    • Author(s)
      吉野雅彦、Truong Duc Phuc,山中晃徳,山本貴富喜
    • Organizer
      精密工学会平成25年春季講演会
    • Place of Presentation
      東京工業大学 (303-304 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] 精密切削による金属ナノドットアレイ作製用モールドの開発2013

    • Author(s)
      保土田亮, 三田正弘, 吉野雅彦
    • Organizer
      精密工学会平成25年春季講演会
    • Place of Presentation
      東京工業大学 (301-302 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] Optical properties of multilayer ordered gold nanodot array fabricated by thermal dewetting method2013

    • Author(s)
      Zhenxing Li, Masahiko Yoshino, Akinori Yamanaka
    • Organizer
      The First CIRP Conference on Biomanufacturing
    • Place of Presentation
      University of Tokyo, Japan (42-46 査読有)
    • Related Report
      2013 Final Research Report
  • [Presentation] 金属ナノドットアレイの光学的特性2013

    • Author(s)
      吉野 雅彦,永松 明浩, 二宮 崚
    • Organizer
      日本機械学会 2013年度年次大会
    • Place of Presentation
      岡山大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 焼鈍法により生成した金属ナノドットの形態とそのLSPR特性2013

    • Author(s)
      吉野 雅彦、Truong Duc Phuc
    • Organizer
      機機械学会第5回マイクロナノ工学シンポジウム
    • Place of Presentation
      東北大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Optical properties of multilayer ordered gold nanodot array fabricated by thermal dewetting method2013

    • Author(s)
      Zhenxing Li
    • Organizer
      The First CIRP Conference on Biomanufacturing
    • Place of Presentation
      University of Tokyo (東京都)
    • Related Report
      2012 Annual Research Report
  • [Presentation] プラスチック板上に配列したナノドットアレイの効率的製造法2013

    • Author(s)
      吉野 雅彦
    • Organizer
      精密工学会平成25年春季講演会
    • Place of Presentation
      東京工業大学(東京都)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 精密切削による金属ナノドットアレイ作製用モールドの開発2013

    • Author(s)
      保土田 亮
    • Organizer
      精密工学会平成25年春季講演会
    • Place of Presentation
      東京工業大学(東京都)
    • Related Report
      2012 Annual Research Report
  • [Presentation] A New Process to Fabricate Three Dimensional Ordered Nano Dot Array Structures by Nano Plastic Forming and Dewetting2012

    • Author(s)
      Zhenxing Li, Akinori Yamanaka, Masahiko Yoshino
    • Organizer
      ICPE2012
    • Place of Presentation
      淡路夢舞台国際会議場 (査読有)
    • Year and Date
      2012-11-26
    • Related Report
      2013 Final Research Report
  • [Presentation] 焼鈍法による金属ナノドットアレイの生成に及ぼす影響因子2012

    • Author(s)
      吉野雅彦、大澤裕樹、山中晃徳
    • Organizer
      2012年精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of multilayer ordered metallic nano-dot arrays by nano plastic forming and thermal dewetting process2012

    • Author(s)
      Zhenxing Li, Akinori Yamanaka, Masahiko Yoshino
    • Organizer
      2012年精密工学会春季大会学術講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] 光学機能表面のための金属ナノドットアレイの効率的製造法2012

    • Author(s)
      吉野雅彦、保土田亮、永松明浩、山中晃徳
    • Organizer
      日本機械学会、第9回 生産加工・工作機械部門講演会
    • Place of Presentation
      秋田県立大学 (査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] 焼鈍法による三次元ナノドットアレイの作成2012

    • Author(s)
      吉野雅彦、山中晃徳、李振星
    • Organizer
      日本機械学会第4回マイクロナノ工学シンポジウム
    • Place of Presentation
      北九州国際会議場・西日本総合展示場 (講演論文集、(2012)、OS2-2-1 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] 焼鈍法による金属ナノドット凝集におけるドット寸法の制御因子2012

    • Author(s)
      吉野雅彦、山中晃徳、李振星
    • Organizer
      2012年精密工学会秋期大会学術講演会
    • Place of Presentation
      九州工業大学 (講演論文集, (2012), M36, 903-904 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] 焼鈍法による金属ナノドットアレイの凝集機構2012

    • Author(s)
      吉野雅彦、Li Zhenxing、山中晃徳
    • Organizer
      2012年度機械学会年次大会
    • Place of Presentation
      金沢大学 (講演論文集, (2012), J164032 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] 超微細塑性加工により作製した金属ナノドットアレイのバイオセンシングへの応用2012

    • Author(s)
      永松明浩、吉野雅彦、山中晃徳、山本貴富喜
    • Organizer
      平成24年度塑性加工春季講演会
    • Place of Presentation
      コマツウェイ総合研修センタ (講演論文集 (2012) 311-312 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] Effects of Process Conditions on Nano-dot Array Formation by Thermal Dewetting2012

    • Author(s)
      Masahiko Yoshino, Hiroki Osawa, Akinori Yamanaka
    • Organizer
      ICTMP5 (2012) NAMRC40-7740
    • Place of Presentation
      University of Notre Dame, INDIANA, USA (査読有)
    • Related Report
      2013 Final Research Report
  • [Presentation] 焼鈍法による金属ナノドットアレイの生成に及ぼす影響因子2012

    • Author(s)
      吉野 雅彦、大澤 裕樹、山中 晃徳
    • Organizer
      2012年精密工学会春季大会学術講演会
    • Place of Presentation
      首都大学東京 (講演論文集 35-36 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] Fabrication of multilayer ordered metallic nano-dot arrays by nano plastic forming and thermal dewetting process2012

    • Author(s)
      Zhenxing Li, Akinori Yamanaka, Masahiko Yoshino
    • Organizer
      2012年精密工学会春季大会学術講演会
    • Place of Presentation
      首都大学東京 (講演論文集 63-64 査読無)
    • Related Report
      2013 Final Research Report
  • [Presentation] A New Process to Fabricate Three Dimensional Ordered Nano Dot Array Structures by Nano Plastic Forming and Dewetting2012

    • Author(s)
      Zhenxing Li
    • Organizer
      ICPE2012
    • Place of Presentation
      Awaji Yumebutai International Conference Center (兵庫県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Effects of Process Conditions on Nano-dot Array Formation by Thermal Dewetting2012

    • Author(s)
      Masahiko Yoshino
    • Organizer
      ICTMP5
    • Place of Presentation
      University of Notre Dame (USA Indiana)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 超微細塑性加工により作製した金属ナノドットアレイのバイオセンシングへの応用2012

    • Author(s)
      永松 明浩
    • Organizer
      平成24年度塑性加工春季講演会講演論文集
    • Place of Presentation
      コマツウェイ総合研修センタ (石川県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 焼鈍法による金属ナノドットアレイの凝集機構2012

    • Author(s)
      吉野雅彦
    • Organizer
      平成24年度機械学会年次大会
    • Place of Presentation
      金沢大学 (石川県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 焼鈍法による金属ナノドット凝集におけるドット寸法の制御因子2012

    • Author(s)
      吉野雅彦
    • Organizer
      2012年精密工学会秋期大会学術講演会
    • Place of Presentation
      九州工業大学(福岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 焼鈍法による三次元ナノドットアレイの作成2012

    • Author(s)
      吉野 雅彦
    • Organizer
      日本機械学会第4回マイクロナノ工学シンポジウム
    • Place of Presentation
      北九州国際会議場・西日本総合展示場(福岡県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] 光学機能表面のための金属ナノドットアレイの効率的製造法2012

    • Author(s)
      吉野 雅彦
    • Organizer
      第9回 生産加工・工作機械部門講演会
    • Place of Presentation
      秋田県立大学(秋田県)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Development of nanostructured foil mold for roller nano imprint process2011

    • Author(s)
      Masahiko YOSHINO, Masao KOBAYASHI, Akinori YAMANAKA
    • Organizer
      LEM21
    • Place of Presentation
      大宮
    • Year and Date
      2011-11-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] Finite-Difference-Time-Domain Analysis of Optical Properties of Ordered Nano-Dots Array Fabricated with Nano Plastic Forming2011

    • Author(s)
      Akinori YAMANAKA, Masahiko YOSHINO
    • Organizer
      LEM21
    • Place of Presentation
      大宮
    • Year and Date
      2011-11-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of multilayer nano dot array structures by combination of coating, nano plastic forming and annealing process2011

    • Author(s)
      Zhenxing Li, Akinori Yamanaka, Masahiko Yoshino
    • Organizer
      Proceedings of 4th Asian Workshop on Nano/Micro Forming Technology
    • Place of Presentation
      豊橋
    • Year and Date
      2011-10-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] 微細塑性加工による規則的ナノドットアレイ形成のMulti-Phase-Fieldシミュレーション2011

    • Author(s)
      山中晃徳、吉野雅彦
    • Organizer
      日本機械学会2011年度年次大会
    • Place of Presentation
      東京
    • Year and Date
      2011-09-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of nanostructured foil mold for roller nano imprint process2011

    • Author(s)
      asahiko YOSHINO, Masao KOBAYASHI, Akinori YAMANAKA
    • Organizer
      LEM21
    • Place of Presentation
      埼玉 (3250 査読有)
    • Related Report
      2013 Final Research Report
  • [Presentation] Fabrication of multilayer nano dot array structures by combination of coating, nano plastic forming and annealing process2011

    • Author(s)
      Zhenxing Li, Akinori Yamanaka, Masahiko Yoshino
    • Organizer
      Proceedings of 4th Asian Workshop on Nano/Micro Forming Technology
    • Place of Presentation
      豊橋 (29-30 査読有)
    • Related Report
      2013 Final Research Report
  • [Presentation] 微細塑性加工による規則的ナノドットアレイ形成のMulti-Phase-Field シミュレーション2011

    • Author(s)
      山中 晃徳、吉野 雅彦
    • Organizer
      日本機械学会 2011年度年次大会
    • Place of Presentation
      東京工業大学 (CD、J111031 査読無)
    • Related Report
      2013 Final Research Report
  • [Remarks]

    • URL

      http://www.yocky.mes.titech.ac.jp/kenkyuzyosei.html

    • Related Report
      2013 Final Research Report
  • [Remarks] 科学研究費補助金(基盤研究(B))

    • URL

      http://www.yocky.mes.titech.ac.jp/kenkyuzyosei.html

    • Related Report
      2013 Annual Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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