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Development and applications of a large-scale nanostereolithography molding technique

Research Project

Project/Area Number 23360066
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionYokohama National University

Principal Investigator

MARUO Shoji  横浜国立大学, 工学研究院, 教授 (00314047)

Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2012: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2011: ¥14,040,000 (Direct Cost: ¥10,800,000、Indirect Cost: ¥3,240,000)
Keywordsマイクロ光造形 / 精密部品加工 / セラミックス / マイクロマシン
Research Abstract

In this study, we have developed both a novel nanostereolithography technique and a ceramic molding process for the production of functional ceramic microdevices. Two-types of nanostereolithography systems that have a potential to obtain sub-100 nm resolution have been constructed with a femtosecond pulsed laser and an ultraviolet laser. Using ceramic molding process based on microstereolithography, three-dimensional complex ceramic devices such as bioceramic scaffolds and piezoelectric elements have been produced. The bioceramic scaffolds will be applied for regenerative medicine. The spiral-shaped piezoelectric elements were utilized for energy harvesting devices that can generate electric energy by three-dimensional vibration owing to their three-dimensional shape. In addition, we found that the power generation efficiency will be drastically improved by optimizing the electrode pattern. The spiral-shaped piezoelectric elements will be applied for highly efficient energy harvesters.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (57 results)

All 2014 2013 2012 2011 Other

All Journal Article (12 results) (of which Peer Reviewed: 6 results) Presentation (40 results) (of which Invited: 5 results) Book (3 results) Remarks (2 results)

  • [Journal Article] 超高精細3D プリンティングの開発とマイクロマシン応用2014

    • Author(s)
      丸尾昭二
    • Journal Title

      技術士

      Volume: No.2 Pages: 20-23

    • Related Report
      2013 Final Research Report
  • [Journal Article] マイクロ・ナノ光造形法の新展開2013

    • Author(s)
      丸尾昭二
    • Journal Title

      インターラボ

      Volume: No.109 Pages: 15-20

    • Related Report
      2013 Final Research Report
  • [Journal Article] 三次元光造形システム =マイクロ光造形法の最近の進展=2013

    • Author(s)
      丸尾昭二
    • Journal Title

      光アライアンス

      Volume: 第24巻,第12号 Pages: 10-13

    • Related Report
      2013 Final Research Report
  • [Journal Article] マイクロ光造形モールディングによる次世代の多品種少量生産技術への期待2013

    • Author(s)
      丸尾昭二
    • Journal Title

      粉体技術

      Volume: 第5巻,第7号 Pages: 638-645

    • Related Report
      2013 Final Research Report 2012 Annual Research Report
  • [Journal Article] Three-dimensional ceramic molding based on microstereolithography for the production of piezoelectric energy harvesters2013

    • Author(s)
      K.Monri and S.Maruo
    • Journal Title

      Sensors and Actuators A 200

      Pages: 31-36

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Three-dimensional ceramic molding based on microstereolithography for the production of piezoelectric energy harvesters2013

    • Author(s)
      Kensaku Monri
    • Journal Title

      Sensors and Actuators A: Physical

      Volume: 197

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 3D molding processes based on two-photon microfabrication2012

    • Author(s)
      S.Maruo
    • Journal Title

      SPIE Newsroom

    • DOI

      10.1117/2.1201211.004378

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of three-dimensional metalized movable microstructures by the combination of two-photon microfabrication and electroless plating2012

    • Author(s)
      T.Ikegami, M.P.Stocker, K.Monaco, J.T.Fourkas, S.Maruo
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 51(印刷中)

    • NAID

      210000140836

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 3 次元マイクロ・ナノ光造形法の開発と応用2011

    • Author(s)
      丸尾昭二
    • Journal Title

      オプトロニクス

      Volume: 第30巻,第11号 Pages: 90-94

    • Related Report
      2013 Final Research Report
  • [Journal Article] Three-Dimensional Molding based on Microstereolithography Using Beta-Tricalcium Phosphate Slurry for the Production of Bioceramic Scaffolds2011

    • Author(s)
      T.Torii, M.Inada, and S.Maruo
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 50, no.6

    • NAID

      210000070765

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Three-dimensional molding based on microstereolithography using beta-tricalcium phosphate slurry for the production of bioceramic scaffolds2011

    • Author(s)
      T.Torii, M.Inada, S.Maruo
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 50 Issue: 6S Pages: 06GL15-06GL15

    • DOI

      10.1143/jjap.50.06gl15

    • NAID

      210000070765

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 3次元マイクロ・ナノ光造形法の開発と応用2011

    • Author(s)
      丸尾昭二
    • Journal Title

      オプトロニクス

      Volume: 30 Pages: 90-94

    • Related Report
      2011 Annual Research Report
  • [Presentation] Three-dimensional ceramic molding process based on microstereolithography for the production of piezoelectric energy harvesters2014

    • Author(s)
      S.Maruo, K.Sugiyama, Y.Daicho
    • Organizer
      Proc. of SPIE 8970
    • Place of Presentation
      (89700H-1-89700H-9)
    • Related Report
      2013 Final Research Report
  • [Presentation] Three-dimensional ceramic molding process based on microstereolithography for the production of piezoelectric energy harvesters2014

    • Author(s)
      S. Maruo, K. Sugiyama, Y. Daicho
    • Organizer
      Photonics West, OPTO
    • Place of Presentation
      The Moscone Center, San Francisco, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] スパイラル型振動発電素子の特性解析と実証実験2013

    • Author(s)
      杉山健司,門利謙作, 丸尾昭二
    • Organizer
      第5回マイクロ・ナノ工学シンポジウム講演
    • Place of Presentation
      (論文集 5PM3-PMN-009)
    • Related Report
      2013 Final Research Report
  • [Presentation] Three-dimensional vibration energy harvester using a spiral piezoelectric element2013

    • Author(s)
      K.Sugiyama, K.Monri, and S.Maruo
    • Organizer
      Proc. of International Symposium on Micro-nanomechatronics and Human Science (MHS) 2013
    • Place of Presentation
      (118-123)
    • Related Report
      2013 Final Research Report
  • [Presentation] Spiral-shaped piezoelectric energy harvester produced by three-dimensional molding process based on microstereolithograhpy2013

    • Author(s)
      S.Maruo, K.Sugiyama, K.Monri
    • Organizer
      Proc. of the 6th International Congress on Laser Advanced Materials Processing (LAMP 2013)
    • Place of Presentation
      (162)
    • Related Report
      2013 Final Research Report
  • [Presentation] Spiral-shaped piezoelectric energy harvester produced by three-dimensional molding process based on microstereolithograhpy2013

    • Author(s)
      S. Maruo, K. Sugiyama, K. Monri
    • Organizer
      The 6th International Congress on Laser Advanced Materials Processing (LAMP 2013)
    • Place of Presentation
      朱鷺メッセ
    • Related Report
      2013 Annual Research Report
  • [Presentation] Three-dimensional vibration energy harvester using a spiral piezoelectric element2013

    • Author(s)
      K. Sugiyama, K. Monri, and S. Maruo
    • Organizer
      International Symposium on Micro-nanomechatronics and Human Science (MHS) 2013
    • Place of Presentation
      名古屋大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Microscale three-dimensional laser printing and molding for MEMS application2013

    • Author(s)
      S. Maruo
    • Organizer
      The third Korea-Japan Workshop on Digital Holography and Information Photonics (DHIP 2013)
    • Place of Presentation
      ETRI, Daejeon, Korea
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 3次元マイクロ光造形・鋳型技術の開発とその応用2012

    • Author(s)
      丸尾昭二
    • Organizer
      オプトメカトロニクス協会フォトンテクノロジー技術部会講演会
    • Place of Presentation
      機械振興会館別館(東京)(招待講演)
    • Year and Date
      2012-03-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] 3次元マイクロ光造形・鋳型技術の開発とラボオンチップ・バイオ応用2012

    • Author(s)
      丸尾昭二
    • Organizer
      三次元ナノ・マイクロ構造研究集会
    • Place of Presentation
      大阪大学接合科学研究所(茨木市)(招待講演)
    • Year and Date
      2012-03-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] マイクロ光造形法の開発とラボオンチップ・医療応用2012

    • Author(s)
      丸尾昭二
    • Organizer
      平成23年度医療ICTシンポジウム
    • Place of Presentation
      はまぎんホールヴィアマーレ(横浜市)(招待講演)
    • Year and Date
      2012-03-02
    • Related Report
      2011 Annual Research Report
  • [Presentation] 2光子マイクロ光造形の開発動向と応用展開2012

    • Author(s)
      丸尾昭二
    • Organizer
      強光場科学研究懇談会
    • Place of Presentation
      カンタムエレクトロニクス株式会社(横浜市)(招待講演)
    • Year and Date
      2012-01-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] 光ディアクティベーションを用いたナノ光造形法の開発2012

    • Author(s)
      大野彰人, John T. Fourkas,丸尾昭二
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム講演
    • Place of Presentation
      (論文集 113)
    • Related Report
      2013 Final Research Report
  • [Presentation] マイクロ光造形モールディングによるスパイラル発電素子の作製2012

    • Author(s)
      門利謙作, 丸尾昭二
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム講演
    • Place of Presentation
      (論文集 111)
    • Related Report
      2013 Final Research Report
  • [Presentation] 圧電セラミックスを用いた光造形モールディングによるマイクロ発電素子の試作と機能実証2012

    • Author(s)
      門利謙作,丸尾昭二
    • Organizer
      ロボティクス・メカトロニクス講演会
    • Place of Presentation
      (2012 講演論文集 1A1-T01)
    • Related Report
      2013 Final Research Report
  • [Presentation] Single-photon microstereolithography using photo-induced deactivation2012

    • Author(s)
      A.Ono, M.P.Stocker, J.T.Fourkas, and S.Maruo
    • Organizer
      Abstracts of International Union of Materials Research Societies - International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      (B-7-O24-010)
    • Related Report
      2013 Final Research Report
  • [Presentation] Development of three-dimensional power generation devices using ceramics molding process based on microstereolithography2012

    • Author(s)
      K.Monri and S.Maruo
    • Organizer
      Abstracts of International Union of Materials Research Societies - International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      (B-7-O24-007)
    • Related Report
      2013 Final Research Report
  • [Presentation] Three-dimensional ceramic molding based on microstereolithography for the production of micro power generation devices2012

    • Author(s)
      K.Monri and S.Maruo
    • Organizer
      Book of Abstracts of 9th International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA 2012)
    • Place of Presentation
      (32)
    • Related Report
      2013 Final Research Report
  • [Presentation] Three-dimensional molding processes based on one- and two-photon microfabrication2012

    • Author(s)
      S.Maruo
    • Organizer
      International Conference on Frontiers of Manufacturing with Photons, Energetic Particles and Power fields (MP3)
    • Place of Presentation
      Wuhan
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Three-dimensional laser microfabrication and its applications to functional microdevices2012

    • Author(s)
      S.Maruo
    • Organizer
      International Symposium on Micro-Nano Systems for the Interaction of Young Researchers
    • Place of Presentation
      Nagoya
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Three-dimensional molding processes based on one- and two-photon microfabrication2012

    • Author(s)
      Shoji Maruo
    • Organizer
      International Conference on Frontiers of Manufacturing with Photons, Energetic Particles and Power fields (MP3)
    • Place of Presentation
      Wuhan(中国)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Development of three-dimensional power generation devices using ceramics molding process based on microstereolithography2012

    • Author(s)
      Kensaku Monri
    • Organizer
      International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      横浜
    • Related Report
      2012 Annual Research Report
  • [Presentation] hree-dimensional ceramic molding based on microstereolithography for the production of micro power generation devices2012

    • Author(s)
      Kensaku Monri
    • Organizer
      International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA 2012)
    • Place of Presentation
      弘前
    • Related Report
      2012 Annual Research Report
  • [Presentation] Single-photon microstereolithography using photo-induced deactivation2012

    • Author(s)
      Akihito Ono
    • Organizer
      International Conference on Electronic Materials (IUMRS-ICEM 2012)
    • Place of Presentation
      横浜
    • Related Report
      2012 Annual Research Report
  • [Presentation] マイクロ光造形モールディングによるスパイラル発電素子の作製2012

    • Author(s)
      門利謙作
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      小倉
    • Related Report
      2012 Annual Research Report
  • [Presentation] 光ディアクティベーションを用いたナノ光造形法の開発2012

    • Author(s)
      大野彰人
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      小倉
    • Related Report
      2012 Annual Research Report
  • [Presentation] 圧電セラミックスを用いた光造形モールディングによるマイクロ発電素子の試作と機能実証2012

    • Author(s)
      門利謙作
    • Organizer
      ロボティクス・メカトロニクス講演会
    • Place of Presentation
      浜松
    • Related Report
      2012 Annual Research Report
  • [Presentation] マイクロ・ナノ光造形と3次元鋳型技術の進展2011

    • Author(s)
      丸尾昭二
    • Organizer
      レーザー加工学会講演会
    • Place of Presentation
      東京大学生産技術研究所(東京)(招待講演)
    • Year and Date
      2011-12-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] Metalized movable microstructures produced by the combination of two-photon microfabrication and electroless plating2011

    • Author(s)
      T.Ikegami, M.P.Stocker, K.Monaco, J.T.Fourkas, S.Maruo
    • Organizer
      24^<th> microprocesses and nanotechnology conference (MNC 2011)
    • Place of Presentation
      京都全日空ホテル(京都市)
    • Year and Date
      2011-10-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] マイクロ光造形モールディングによる3次元多孔質スキャフォールドの作製2011

    • Author(s)
      鳥居嵩, 丸尾昭二
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      タワーホール船堀(東京)
    • Year and Date
      2011-09-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] 2光子マイクロ光造形を用いた金属化マイクロ可動部品の作製法の提案と実証2011

    • Author(s)
      池上崇, J.T.Fourkas, 丸尾昭二
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      タワーホール船堀(東京)
    • Year and Date
      2011-09-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] マイクロ光造形モールディングによるマイクロ発電素子の開発(チタン酸バリウム微粒子を用いたセラミックス構造体の作製と圧電効果の実証)2011

    • Author(s)
      門利謙作, 丸尾昭二
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      タワーホール船堀(東京)
    • Year and Date
      2011-09-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] 2光子マイクロ光造形の新展開~フォトニクス,MEMS,バイオ応用~2011

    • Author(s)
      丸尾昭二
    • Organizer
      第337回マンスリーセミナー
    • Place of Presentation
      光産業技術振興協会(東京)(招待講演)
    • Year and Date
      2011-06-21
    • Related Report
      2011 Annual Research Report
  • [Presentation] Near-net-shape fabrication of three-dimensional bioceramic scaffolds using microstereolithography and ceramic slurry2011

    • Author(s)
      T.Torii, M.Inada, S.Maruo
    • Organizer
      12th International Symposium on Laser Precision Microfabrication (LPM 2011)
    • Place of Presentation
      かがわ国際会議場(高松市)
    • Year and Date
      2011-06-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] 光造形マルチモールディングの研究(第4報)バイオセラミックスを用いた3次元スキャフォールドの高精度作製2011

    • Author(s)
      鳥居嵩, 丸尾昭二
    • Organizer
      ロボティクス・メカトロニクス講演会2011
    • Place of Presentation
      岡山コンベンションセンター(岡山市)
    • Year and Date
      2011-05-27
    • Related Report
      2011 Annual Research Report
  • [Presentation] マイクロ光造形モールディングによる3次元多孔質スキャフォールドの作製2011

    • Author(s)
      鳥居嵩, 丸尾昭二
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      (講演論文集 91)
    • Related Report
      2013 Final Research Report
  • [Presentation] マイクロ光造形モールディングによるマイクロ発電素子の開発(チタン酸バリウム微粒子を用いたセラミックス構造体の作製と圧電効果の実証)2011

    • Author(s)
      門利謙作, 丸尾昭二
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      (講演論文集 113)
    • Related Report
      2013 Final Research Report
  • [Presentation] 光造形マルチモールディングの研究(第4 報)バイオセラミックスを用いた3次元スキャフォールドの高精度作製2011

    • Author(s)
      鳥居 嵩,丸尾昭二
    • Organizer
      ロボティクス・メカトロニクス講演会 2011
    • Place of Presentation
      (講演論文集 1A2-H10)
    • Related Report
      2013 Final Research Report
  • [Presentation] Near-net-shape fabrication of three-dimensional bioceramic scaffolds using microstereolithography and ceramic slurry2011

    • Author(s)
      T.Torii, M.Inada, and S.Maruo
    • Organizer
      Proc. of 12th International Symposium on Laser Precision Microfabrication
    • Place of Presentation
      (A#0144)
    • Related Report
      2013 Final Research Report
  • [Presentation] Optically-controlled lab-on-a-chips produced by two-photon microfabrication and molding processes2011

    • Author(s)
      S.Maruo
    • Organizer
      International Symposium on Optomechatronic Technologies
    • Place of Presentation
      Hong Kong
    • Related Report
      2013 Final Research Report
    • Invited
  • [Book] Optically driven microfluidic devices produced by multiphoton microfabrication, Optical Nano and Micro Actuator Technology2012

    • Author(s)
      S.Maruo(分担執筆)(George K. Knopf; Yukitoshi Otani (Eds.))
    • Publisher
      CRC Press
    • Related Report
      2013 Final Research Report
  • [Book] 二光子励起により作製したマイクロマシン 高効率2光子吸収材料の開発と応用2011

    • Author(s)
      丸尾昭二(分担執筆) (渡辺敏行 監修)
    • Publisher
      株式会社シーエムシー出版
    • Related Report
      2013 Final Research Report
  • [Book] 高効率2光子吸収材料の開発と応用2011

    • Author(s)
      丸尾昭二(分担執筆)
    • Total Pages
      200
    • Publisher
      株式会社シーエムシー出版
    • Related Report
      2011 Annual Research Report
  • [Remarks] 丸尾研究室ホームページ

    • URL

      http://www.mnt.ynu.ac.jp/mlab/Index.html

    • Related Report
      2013 Final Research Report
  • [Remarks] 横浜国立大学 丸尾研究室

    • URL

      http://www.mnt.ynu.ac.jp/

    • Related Report
      2012 Annual Research Report

URL: 

Published: 2011-04-06   Modified: 2019-07-29  

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